User contributions for John d
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19 October 2021
- 14:2214:22, 19 October 2021 diff hist +359 Template:Announcements wifi maint. oct 21 6a
12 October 2021
- 23:2523:25, 12 October 2021 diff hist +567 Digital Microscope (Olympus DSX1000) updated description Tag: Visual edit
- 18:5018:50, 12 October 2021 diff hist +250 Wet Benches →Wafer Toxic Corrosive Benches: added photo of the various wafer holders Tag: Visual edit
- 18:4918:49, 12 October 2021 diff hist +75 N File:Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg No edit summary current
- 16:2116:21, 12 October 2021 diff hist −1 m Template:Announcements No edit summary
- 16:2016:20, 12 October 2021 diff hist −235 Template:Announcements deleted Microscope service
- 00:3300:33, 12 October 2021 diff hist +39 COVID-19 User Policies →NanoFab Policies: mentioned that masks are provided, for Thermo-Fischer vendor Tag: Visual edit
8 October 2021
- 21:0121:01, 8 October 2021 diff hist +293 ICP Etching Recipes →InP Ridge Etch (Oxford ICP Etcher): links to PDFs of etch characterizations Tag: Visual edit
- 20:5920:59, 8 October 2021 diff hist +111 N File:Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08.pdf Oxford Etcher - InP Ridge Etch using Oxford PlasmaPro 100 Cobra - 2021-09-08 Ning Cao, 2021-09-08
- 20:5520:55, 8 October 2021 diff hist +93 N File:Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26.pdf Oxford Etcher - InP Grating Etch at 20 C - Oxford Cobra 300 2021-08-26 Ning Cao
- 20:5320:53, 8 October 2021 diff hist +128 Dry Etching Recipes link to Oxford InP/PnGaAsP recipes Tag: Visual edit
7 October 2021
- 23:2323:23, 7 October 2021 diff hist +253 Template:Announcements microscopy tech service
- 16:5416:54, 7 October 2021 diff hist 0 m Stepper 3 (ASML DUV) →Design & Fabrication Tools: fix indent Tag: Visual edit: Switched
- 16:5316:53, 7 October 2021 diff hist +132 Stepper 3 (ASML DUV) →Operating Procedures: added Mask Making to "Design/Fab tools" Tag: Visual edit
- 16:3616:36, 7 October 2021 diff hist +45 Calculators + Utilities →Python Scripts: "pythonXY" --> "Spyder" Tag: Visual edit
4 October 2021
- 17:3917:39, 4 October 2021 diff hist −264 Template:Announcements deleted ASML PM
2 October 2021
- 00:1300:13, 2 October 2021 diff hist +7 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications Tag: Visual edit
- 00:1200:12, 2 October 2021 diff hist +318 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: mentioned 5mm exlcusion & wafers breaking Tag: Visual edit
- 00:1000:10, 2 October 2021 diff hist +289 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) added small-sample mounting notes Tag: Visual edit
- 00:0700:07, 2 October 2021 diff hist −941 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) deleted old mounting/Bosch process info Tag: Visual edit
30 September 2021
- 15:0015:00, 30 September 2021 diff hist −1 m Template:Announcements No edit summary
- 15:0015:00, 30 September 2021 diff hist −122 Template:Announcements Oxford ICP
- 04:3004:30, 30 September 2021 diff hist −7 m Template:News →Oxford PlasmaPro ICP Etcher Cobra installed
- 04:2904:29, 30 September 2021 diff hist −10 m Template:News No edit summary
29 September 2021
- 23:0923:09, 29 September 2021 diff hist −23 m Maskless Aligner (Heidelberg MLA150) fixed HIMT link Tag: Visual edit
- 19:1319:13, 29 September 2021 diff hist +22 m ICP Etching Recipes →SiO2 Etching (Fluorine ICP Etcher): listed etch gasses used Tag: Visual edit
- 18:5918:59, 29 September 2021 diff hist +143 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: updated ICP/RF powers Tag: Visual edit
- 18:2718:27, 29 September 2021 diff hist +475 Template:News ADDED OXFROD ICP etch
- 18:1918:19, 29 September 2021 diff hist +24 Oxford ICP Etcher (PlasmaPro 100 Cobra) updates to allowed materials Tag: Visual edit
- 17:4517:45, 29 September 2021 diff hist +124 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Detailed Specifications: added image, notes on substrate materials "discuss with staff" Tag: Visual edit
- 17:4217:42, 29 September 2021 diff hist 0 File:OxfordPlasmaPro.jpg John d uploaded a new version of File:OxfordPlasmaPro.jpg current
- 17:4117:41, 29 September 2021 diff hist +36 N File:OxfordPlasmaPro.jpg Photo from User Manual
- 02:1902:19, 29 September 2021 diff hist +15 m MLA150 - Troubleshooting →Aligning to a quarter-wafer Tag: Visual edit
- 02:1802:18, 29 September 2021 diff hist +182 MLA150 - Troubleshooting →Aligning to a quarter-wafer: inserted schematic Tag: Visual edit
- 02:1602:16, 29 September 2021 diff hist +68 N File:MLA Quarter-Wafer Alignment.jpg No edit summary
- 02:0102:01, 29 September 2021 diff hist +183 MLA150 - Troubleshooting →Aligning to a quarter-wafer: minor description update Tag: Visual edit
- 01:5701:57, 29 September 2021 diff hist +2,034 MLA150 - Troubleshooting added ALigning to a Quarter Wafer Tag: Visual edit
28 September 2021
- 04:3904:39, 28 September 2021 diff hist +2 m MLA150 - CAD Files and Templates No edit summary Tag: Visual edit
- 04:3904:39, 28 September 2021 diff hist +23 m MLA150 - CAD Files and Templates →Resolution and Calibration Patterns Tag: Visual edit
- 04:3704:37, 28 September 2021 diff hist −1 m Maskless Aligner (Heidelberg MLA150) →Troubleshooting & Known Bugs
- 04:3604:36, 28 September 2021 diff hist +37 m Maskless Aligner (Heidelberg MLA150) →Detailed Specifications Tag: Visual edit
- 04:3504:35, 28 September 2021 diff hist +105 Maskless Aligner (Heidelberg MLA150) →Design Tools/Info: renaming/reorg for clarify Tag: Visual edit: Switched
- 00:0200:02, 28 September 2021 diff hist +60 ICP Etching Recipes →Photoresist & ARC (Fluorine ICP Etcher): subheadings for BARC and PR strip Tag: Visual edit
24 September 2021
- 05:1005:10, 24 September 2021 diff hist −44 Template:Publications →Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask: fixed FL-ICP link
23 September 2021
- 22:5722:57, 23 September 2021 diff hist +91 Template:Announcements wifi update
- 17:2617:26, 23 September 2021 diff hist −83 Dicing Saw (ADT) →Detailed Specifications: deleted old SOP, Lee's SOP only Tag: Visual edit
- 17:1417:14, 23 September 2021 diff hist −64 Dicing Saw (ADT) →Recipes: corrected link to recipes Tag: Visual edit
- 17:1117:11, 23 September 2021 diff hist +17 Packaging Recipes →Dicing Saw Recipes (ADT 7100): link to Thermocarbon website Tag: Visual edit
22 September 2021
- 00:2500:25, 22 September 2021 diff hist +68 Calculators + Utilities →Example CAD File: GDS version of CAD Tutorial Tag: Visual edit
- 00:2300:23, 22 September 2021 diff hist +27 N File:CAD Tutorial for ASML Reticle v1 GDS.gds No edit summary current