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- 12:29, 20 January 2023 diff hist -2 m Process Group - Process Control Data →Panasonic ICP #1
- 12:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
- 12:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
- 12:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
- 12:20, 20 January 2023 diff hist -4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
- 12:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
- 12:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
- 12:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg current
- 12:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
- 12:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
- 12:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg current
- 12:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit
- 12:00, 20 January 2023 diff hist -61 m Process Group - Process Control Data →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
- 12:00, 20 January 2023 diff hist +1 m ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): fixed plot link Tag: Visual edit
- 11:46, 20 January 2023 diff hist +411 Process Group - Process Control Data →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit
- 11:45, 20 January 2023 diff hist +414 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): linked to Noah's google sheets - plots & data Tag: Visual edit
- 16:37, 19 January 2023 diff hist +151 Template:Announcements blue-M oven down
- 16:35, 19 January 2023 diff hist +276 Template:Announcements stepper 2 maint.
- 16:01, 19 January 2023 diff hist +151 Template:Announcements stepper 1 PM
- 15:58, 18 January 2023 diff hist +1 m ICP Etch 2 (Panasonic E626I) →Online Training Video: Tag: Visual edit
- 15:57, 18 January 2023 diff hist +17 ICP Etch 2 (Panasonic E626I) Made "online training" into a section heading, so it's obvious in Table of Contents. Also change "page title" levels to "header" level. Tag: Visual edit
- 21:56, 12 January 2023 diff hist -113 Template:Announcements updated OPEN annc
- 15:38, 12 January 2023 diff hist +108 Oxford ICP Etcher - Process Control Data added chamber wet clean current Tag: Visual edit
- 08:33, 11 January 2023 diff hist -194 Template:Announcements nanofab open for LN2 delivery
- 16:28, 10 January 2023 diff hist +66 Template:Announcements LN2 closure
- 17:20, 6 January 2023 diff hist +7 Oxford ICP Etcher - Process Control Data →Etch Rate Dependence on Sample Size (Oxford ICP Etcher): changed name to emphasize Sampel Size effect Tag: Visual edit
- 11:28, 6 January 2023 diff hist +170 Process Group - Process Control Data →ICP-PECVD (Unaxis VLR Dep): link to SiO2/SiN plots separately Tag: Visual edit
- 17:07, 5 January 2023 diff hist +464 Template:News added info about process control data
- 10:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit
- 19:22, 3 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
- 18:53, 3 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
- 17:41, 3 January 2023 diff hist -21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
- 17:40, 3 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit
- 17:38, 3 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
- 15:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 15:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 15:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 15:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
- 11:06, 31 December 2022 diff hist -3 m Template:News →Raith Velion: FIB/SEM Installation
- 11:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
- 08:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 21:15, 21 December 2022 diff hist -393 Template:Announcements nanofab holiday closure
- 10:50, 21 December 2022 diff hist -12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 10:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 10:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
- 08:34, 19 December 2022 diff hist -8 m Dry Etching Recipes Tag: Visual edit
- 08:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
- 00:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched