User contributions
Jump to navigation
Jump to search
- 16:40, 18 May 2023 diff hist +1 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:40, 18 May 2023 diff hist -1 m Stepper 3 (ASML DUV) →Process Control Data
- 16:39, 18 May 2023 diff hist +254 m Stepper 3 (ASML DUV) →Process Control Data Tag: Visual edit
- 16:37, 18 May 2023 diff hist +209 m Stepper 3 (ASML DUV) →Process Control Data: images link to data now
- 16:35, 18 May 2023 diff hist +360 Stepper 3 (ASML DUV) →Process Control Data: added example images of Process Control Data Tag: Visual edit: Switched
- 16:30, 18 May 2023 diff hist +39 N File:ASML CD Cals - Example Plot.jpg current
- 16:28, 18 May 2023 diff hist +46 N File:ASML CD Cals - Example Table.jpg current
- 15:13, 18 May 2023 diff hist +32 Direct-Write Lithography Recipes →Positive Resist (MLA150) Tag: Visual edit
- 10:34, 15 May 2023 diff hist -408 PECVD Recipes →ICP-PECVD (Unaxis VLR): moved "old recipe" links, fixred gDrive sharing settings Tag: Visual edit
- 22:05, 10 May 2023 diff hist +44 N File:SEM1 JEOL IT800HSL.jpg photo of SEM #1, JEOL IT800HSL current
- 22:01, 10 May 2023 diff hist +178 Microscopes →Microscope #8: AmScope Wide Field of View Stereoscope (Bay 4): added photo Tag: Visual edit: Switched
- 21:58, 10 May 2023 diff hist +45 N File:Amscope Stereoscope Photo.jpg current
- 21:51, 10 May 2023 diff hist +32 N File:DektakXT.jpg image of Dektak XT current
- 21:51, 10 May 2023 diff hist +40 Step Profilometer (DektakXT) changed image, linked to mfg. current Tag: Visual edit: Switched
- 12:35, 10 May 2023 diff hist +5 SEM 1 (JEOL IT800SHL) →Imaging
- 12:34, 10 May 2023 diff hist +14 SEM 1 (JEOL IT800SHL) cahnged tool pic
- 12:34, 10 May 2023 diff hist +2,712 N SEM 1 (JEOL IT800SHL) iniital page copied from SEM2 Tag: Visual edit: Switched
- 12:25, 10 May 2023 diff hist +7 Tool List →Electron Microscopy: changed links to just "SEM 1/2" and included model number of SEM1, and link to new SEM1 page. Tag: Visual edit
- 23:33, 4 May 2023 diff hist +93 Oxford ICP Etcher (PlasmaPro 100 Cobra) →Documentation: mentioend travelers for etches current Tag: Visual edit
- 11:18, 28 April 2023 diff hist +205 Contact Aligner (SUSS MA-6) →About: explained BSA a bit more. Tag: Visual edit
- 11:16, 28 April 2023 diff hist +163 Contact Aligner (SUSS MA-6) mentioned motorized systems Tag: Visual edit
- 11:15, 28 April 2023 diff hist +101 Suss Aligners (SUSS MJB-3) mentioned that systems are manual, not motorizd. Tag: Visual edit
- 11:13, 28 April 2023 diff hist +30 Tool List →Contact Aligners (Optical Exposure): changed "suss aligners" --> "contact aligners" Tag: Visual edit
- 10:02, 28 April 2023 diff hist +254 Calculators + Utilities →General CAD files for Litho: added schematics Tag: Visual edit
- 10:00, 28 April 2023 diff hist +35 N File:Vented font screnshot.jpg current
- 09:57, 28 April 2023 diff hist +45 N File:Vernier Template v2 screenshot.jpg current
- 09:54, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 09:52, 28 April 2023 diff hist +35 File:Vernier Template.gds →Summary: update date Tag: Visual edit
- 09:51, 28 April 2023 diff hist 0 File:Vernier Template.gds John d uploaded a new version of File:Vernier Template.gds
- 14:52, 27 April 2023 diff hist +225 Stepper 3 (ASML DUV) →Design Tools: CAD files links Tag: Visual edit
- 14:49, 27 April 2023 diff hist +191 Stepper 2 (AutoStep 200) →CAD Files: link to general CAD files Tag: Visual edit
- 14:48, 27 April 2023 diff hist +190 Stepper 1 (GCA 6300) →CAD Files: link to general CAD tempaltes Tag: Visual edit
- 14:47, 27 April 2023 diff hist +101 Calculators + Utilities →CAD Files & Templates: Added heading for general files, description for verniers Tag: Visual edit
- 14:46, 27 April 2023 diff hist +223 MLA150 - CAD Files and Templates link to general CAD file templates Tag: Visual edit
- 14:11, 26 April 2023 diff hist -13 m Frequently Asked Questions →Authorship on Publications Tag: Visual edit
- 12:44, 26 April 2023 diff hist +1,284 N Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement added basic description & steps referring to for details, Measuring_thin_metals_with_oxide_pre-measurement current Tag: Visual edit
- 12:37, 26 April 2023 diff hist +205 Ellipsometer (Woollam) →Operating Procedures: link to thin dielectric meas, pre-meas NatOx Tag: Visual edit
- 10:52, 26 April 2023 diff hist +640 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick updated to 150°C, quantity of wax for 4-inch wafers, and place both wafers in contact on hotplate, not on Logitech. Tag: Visual edit
- 10:36, 26 April 2023 diff hist +413 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick comment about wax on filter paper Tag: Visual edit
- 09:16, 26 April 2023 diff hist +349 ICP Etching Recipes →Through Silicon Via etch (DSEiii): wax mounting warnings + updates Tag: Visual edit
- 09:10, 26 April 2023 diff hist +272 ICP Etching Recipes →Through Silicon Via etch (DSEiii): publication policy on TSV process Tag: Visual edit
- 23:28, 25 April 2023 diff hist +355 Ion Beam Deposition (Veeco NEXUS) added schematic of ion beam Tag: Visual edit
- 23:27, 25 April 2023 diff hist 0 File:IBD Schematic.jpg John d uploaded a new version of File:IBD Schematic.jpg current
- 23:23, 25 April 2023 diff hist +33 N File:IBD Schematic.jpg
- 13:59, 23 April 2023 diff hist +242 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: new heading for schematics current Tag: Visual edit
- 14:52, 19 April 2023 diff hist +373 Template:News amscope entry
- 14:51, 19 April 2023 diff hist -10 Microscopes →Microscope #6: AmScope Wide Field of View Stereoscope (Bay 4): changed to Scope #8 Tag: Visual edit
- 14:50, 19 April 2023 diff hist +520 Microscopes Scope #6 initial entry - needs updating Tag: Visual edit
- 14:51, 17 April 2023 diff hist 0 File:Vented font DDJ.gds John d uploaded a new version of File:Vented font DDJ.gds current
- 14:50, 17 April 2023 diff hist +138 Calculators + Utilities →CAD Files & Templates: added instructions for vented font installation Tag: Visual edit