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23:12, 30 December 2024
1stdraft Autostep200 Quarter SECOND LAYER .pdf
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file
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708 KB
Biljana
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contribs
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22:44, 30 December 2024
5th draft Autostep200 Quarter FIRST LAYER.docx
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3.14 MB
Biljana
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talk
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contribs
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22:51, 18 December 2024
EB-1 4-wf fixture 04 fixture loaded in chamber.jpg
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1.23 MB
John d
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talk
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22:48, 18 December 2024
EB-1 4-wf fixture 03 wafers inserted.jpg
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1.08 MB
John d
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talk
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22:46, 18 December 2024
EB-1 4-wf fixture 02 bolt.png
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file
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9.43 MB
John d
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talk
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contribs
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1
22:43, 18 December 2024
EB-1 4-wf fixture 01 empty.png
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8.3 MB
John d
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talk
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contribs
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1
21:27, 9 December 2024
Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx
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file
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278 KB
John d
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talk
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contribs
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PPT file for users to fill out for Dicing work
1
05:54, 6 December 2024
ASML JobCreator - Example wafer layout.png
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file
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452 KB
John d
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talk
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contribs
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1
21:25, 27 November 2024
Dot Facet 00.jpg
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1.01 MB
Noahdutra
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talk
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contribs
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GaN etch, credit: Gopi Meena
1
21:02, 27 November 2024
GaN SPC.png
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file
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68 KB
Noahdutra
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talk
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contribs
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GaN SPC chart for etch cal on OXFD
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23:38, 25 November 2024
Microscope Training - Aperture Stop Buttons.jpg
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26 KB
John d
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talk
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contribs
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23:22, 25 November 2024
Microscope Training - BF-DF Slider.jpg
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83 KB
John d
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talk
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contribs
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1
22:46, 20 November 2024
SURFSCAN 6200 241120 small substrates.pdf
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file
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162 KB
Biljana
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talk
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contribs
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1
22:45, 20 November 2024
SURFSCAN 6200 241120 for 8inch wafers.pdf
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file
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104 KB
Biljana
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talk
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contribs
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22:44, 20 November 2024
SURFSCAN 6200 241120 for 6inch wafers.pdf
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file
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130 KB
Biljana
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talk
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contribs
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1
22:44, 20 November 2024
SURFSCAN 6200 241120 for 4inch wafers.pdf
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file
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128 KB
Biljana
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talk
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contribs
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1
00:01, 20 November 2024
RB IK P3 T2 60 800 018.jpg
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63 KB
Dread
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talk
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contribs
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1
23:50, 19 November 2024
Exsitu TGate.jpg
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1.44 MB
Dread
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contribs
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1
23:42, 19 November 2024
Ex situ porous GaN.png
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371 KB
Dread
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23:33, 19 November 2024
In situ porous GaN.jpg
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132 KB
Dread
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contribs
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17:38, 15 November 2024
MLA150 Quick Start Rev B.pdf
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565 KB
Sawyer l
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talk
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contribs
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1
17:37, 15 November 2024
MLA150 SOP Rev M (LS).pdf
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1.75 MB
Sawyer l
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contribs
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1
21:26, 6 November 2024
ICP2 Process Control Data Example.jpg
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159 KB
John d
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contribs
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newer data, "example" label
2
23:54, 5 November 2024
FEM example analysis GMoody Group 2024-11-04 v2.png
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58 KB
John d
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contribs
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added X in middle
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19:02, 26 October 2024
UCSB NetID - correct google account v1.png
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96 KB
John d
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contribs
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1
18:50, 26 October 2024
UCSB NetID wrong google account access denied v1.png
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150 KB
John d
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talk
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contribs
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1
18:46, 26 October 2024
UCSB NetID - wrong login access denied.png
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89 KB
John d
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talk
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contribs
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1
17:40, 24 October 2024
Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg
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1,019 KB
John d
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talk
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contribs
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17:12, 24 October 2024
Spontaneous Wafer Bond Glass to Silicon - Demis D John.png
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656 KB
John d
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talk
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contribs
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1
05:25, 23 October 2024
Google Drive - Example Job Folder.png
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file
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42 KB
John d
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talk
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contribs
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1
05:22, 23 October 2024
Trello - example job card.png
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209 KB
John d
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talk
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contribs
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1
05:21, 23 October 2024
Trello - Example Job Cards.png
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126 KB
John d
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talk
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contribs
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1
23:17, 22 October 2024
MLA150 Alignment versus Wafer Location v1.jpg
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8 KB
John d
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talk
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contribs
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1
21:03, 8 October 2024
Cal DSE Ar+ER.png
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file
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16 KB
Noahdutra
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talk
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contribs
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DSE STD_Bosch_Si etch AR/ER dependence
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20:44, 8 October 2024
DSE 16um Bosch Etch - 22 013.jpg
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883 KB
Noahdutra
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talk
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contribs
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STD_Bosch_Si example 8/26/24
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20:42, 8 October 2024
30D 003.jpg
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880 KB
Noahdutra
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talk
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contribs
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STD_Bosch_Si etch picture
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20:37, 8 October 2024
DSE plot.png
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26 KB
Noahdutra
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talk
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contribs
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Calibration plot for DSE
1
20:32, 8 October 2024
Cal vs Legacy DSE.png
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file
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20 KB
Noahdutra
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talk
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contribs
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Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.
1
16:23, 30 September 2024
PRStrip 019 (1).jpg
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file
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845 KB
Noahdutra
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talk
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contribs
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Si Etch FICP 9/19/24
1
16:15, 30 September 2024
PRStrip 022 (1).jpg
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955 KB
Noahdutra
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talk
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contribs
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1
17:54, 24 September 2024
Recipe Importing New Software.pdf
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389 KB
Sawyer l
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talk
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contribs
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1
20:32, 13 September 2024
FICP-Si.png
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file
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28 KB
Noahdutra
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talk
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contribs
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Fluorine ICP Si Etch Control Chart
1
22:51, 5 September 2024
Contact Layer 1 alignment example v1.png
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file
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55 KB
John d
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talk
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contribs
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1
01:18, 31 August 2024
Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf
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file
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1 MB
John d
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talk
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contribs
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added terminology slide
2
23:36, 22 August 2024
AZ5214 negative process schematic.png
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file
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68 KB
John d
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talk
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contribs
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1
16:59, 21 August 2024
AZ5214 Fabublox negative schematic.png
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46 KB
John d
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contribs
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1
16:57, 21 August 2024
AZ5214 Fabublox Positive PR schematic.png
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38 KB
John d
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contribs
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1
16:00, 30 July 2024
LEXT OLS4100 InstallManual Ver.3.1.8 offline.pdf
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882 KB
Hopkins a
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talk
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contribs
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LEXT Offline software
1
17:06, 26 July 2024
LaserMon - Temp Stabilize JoelGuo - 240725 noGas hold200C InPepi DSP.png
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file
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108 KB
John d
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talk
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contribs
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1
19:16, 19 July 2024
Stepper Reticle Tutorial - Reticle Masking Schematic.png
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file
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497 KB
John d
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talk
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contribs
)
1
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