Tony Bosch
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Tony Bosch
Position
Senior Equipment Engineer
Room Number
1109C
Phone
(805) 839-3486
E-Mail
bosch@ece.ucsb.edu
About
.
.
.
Tools
Tony Bosch is the supervisor for the following tools.
Sputter 3 (AJA ATC 2000-F)
Sputter 4 (AJA ATC 2200-V)
Sputter 5 (AJA ATC 2200-V)
ICP-PECVD (Unaxis VLR)
ICP-Etch (Unaxis VLR)
Oxford ICP Etcher (PlasmaPro 100 Cobra)
Gold Plating Bench
ICP Etch 2 (Panasonic E640)
Rodwell Tube Furnace
Tube Furnace (Tystar 8300)
Tube Furnace AlGaAs Oxidation (Linberg)
Flip-Chip Bonder (Finetech)
Deep UV Optical Microscope (Olympus)
Laser Scanning Confocal M-scope (Olympus LEXT)
Automated Coat/Develop System (S-Cubed Flexi)
DSEIII (PlasmaTherm/Deep Silicon Etcher)
Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)
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