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- |email = bosch@ece.ucsb.edu851 bytes (98 words) - 16:53, 28 October 2021
- #REDIRECT [[Si Deep RIE (PlasmaTherm/Bosch Etch)]]50 bytes (7 words) - 13:46, 11 July 2012
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- For Deep Silicon Etching, the [[ICP Etching Recipes#High Rate Bosch Etch .28DSEIII.29|Plasma-Therm DSE-iii]] is often used. Some single-step S ==Bosch and Release Etch (Si Deep RIE)==1 KB (199 words) - 23:04, 6 August 2024
- #redirect [[Si Deep RIE (PlasmaTherm/Bosch Etch)]]50 bytes (7 words) - 16:04, 16 July 2012
- #REDIRECT [[Si Deep RIE (PlasmaTherm/Bosch Etch)]]50 bytes (7 words) - 13:46, 11 July 2012
- |super= Tony Bosch |email=bosch@ece.ucsb.edu803 bytes (113 words) - 17:27, 1 April 2024
- |super2= Tony Bosch |email=bosch@ece.ucsb.edu995 bytes (133 words) - 22:07, 30 October 2023
- |super= Tony Bosch |email=bosch@ece.ucsb.edu1 KB (170 words) - 18:43, 31 March 2014
- |super= Tony Bosch810 bytes (112 words) - 18:13, 30 August 2022
- |email = bosch@ece.ucsb.edu851 bytes (98 words) - 16:53, 28 October 2021
- |super2= Tony Bosch |email=bosch@ece.ucsb.edu7 KB (1,073 words) - 21:51, 6 November 2024
- |super= Tony Bosch |email=bosch@ece.ucsb.edu4 KB (502 words) - 22:00, 24 October 2024
- |super2= Tony Bosch961 bytes (145 words) - 16:17, 29 August 2023
- |super= Tony Bosch ''This Tool is now available for training - please contact the [[Tony Bosch|supervisor]]. 2022-11-01''3 KB (382 words) - 18:03, 3 September 2024
- |super= Tony Bosch948 bytes (143 words) - 18:22, 30 August 2022
- |super= Tony Bosch |email=bosch@ece.ucsb.edu3 KB (454 words) - 17:35, 23 May 2023
- |super2= Tony Bosch1 KB (176 words) - 00:17, 2 August 2024
- |email=bosch@ece.ucsb.edu1 KB (187 words) - 14:27, 13 May 2022
- |super= Tony Bosch |email=bosch@ece.ucsb.edu3 KB (479 words) - 17:36, 30 August 2022
- |super= Tony Bosch1 KB (173 words) - 18:49, 30 August 2022
- ** '''''You must contact Tony Bosch for training on Fluorescence before using this feature!!!'''''2 KB (196 words) - 18:09, 15 April 2020
- |super= Tony Bosch1 KB (193 words) - 14:24, 31 August 2022