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- 21:07, 29 February 2024 diff hist +419 SEM 1 (JEOL IT800SHL) →Operating Procedures: linked to CalTech stuf correction vid with tops current Tag: Visual edit
- 13:46, 29 February 2024 diff hist +132 Oxygen Plasma System Recipes →N2/O2 effect on Gold contacts & Substrate Temperature: minor additions to clarify gold optical absorption Tag: Visual edit
- 12:29, 27 February 2024 diff hist +135 Direct-Write Lithography Recipes →Greyscale Lithography (MLA150): added link to GS page Tag: Visual edit
- 17:24, 23 February 2024 diff hist +14 Template:Announcements re-added "startfeed" <startfeed />
- 12:20, 23 February 2024 diff hist -23 Template:Announcements moved RIE5 below DSE and ICP1
- 12:18, 23 February 2024 diff hist -589 Template:Announcements deleted EB4, other tools up. Updated ICP1 and DSE from emails.
- 12:16, 23 February 2024 diff hist +15 m Critical Point Dryer current Tag: Visual edit
- 12:15, 23 February 2024 diff hist +182 Critical Point Dryer mention tool removed, link to QSF CPD Tag: Visual edit
- 12:13, 23 February 2024 diff hist -93 Tool List →Measurement & Characterization: deleted goniometer Tag: Visual edit
- 12:12, 23 February 2024 diff hist +189 Plasma Clean (Gasonics 2000) mention tool removed, link to YES and Pan1 Ashing current Tag: Visual edit
- 12:10, 23 February 2024 diff hist +95 SEM 1 (JEOL IT800SHL) mentioned nabity litho Tag: Visual edit
- 12:08, 23 February 2024 diff hist -19 Tool List →Direct-Write Lithography: link to SEM 1 Tag: Visual edit
- 12:08, 23 February 2024 diff hist -4 Tool List →Lithography: removed "FEI" text Tag: Visual edit
- 12:50, 16 February 2024 diff hist +69 Calculators + Utilities →Python Scripts: made scripts into header 2 Tag: Visual edit
- 15:17, 15 February 2024 diff hist +12 m DSEIII (PlasmaTherm/Deep Silicon Etcher) added model number current
- 15:15, 15 February 2024 diff hist +191 DSEIII (PlasmaTherm/Deep Silicon Etcher) added example SEM Tag: Visual edit
- 15:12, 15 February 2024 diff hist -5 Category:Inspection, Test and Characterization fixed link current Tag: Redirect target changed
- 15:10, 15 February 2024 diff hist +1 Main Page fixed Metro/Test link Tag: Visual edit
- 15:06, 15 February 2024 diff hist -6 m ICP Etching Recipes →High Rate Bosch Etch (DSEIII) Tag: Visual edit: Switched
- 15:05, 15 February 2024 diff hist +291 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added SEM of Bosch etched posts Tag: Visual edit
- 15:00, 15 February 2024 diff hist +77 N File:DSEiii Bosch Ecth SEM Example 01.png current
- 14:58, 14 February 2024 diff hist +1 m Template:Announcements →E-Beam #4 (CHA) - UP
- 14:58, 14 February 2024 diff hist -149 Template:Announcements EB4 up
- 17:34, 13 February 2024 diff hist +373 Nanofab Job Postings Intern - thin-fils: added description Tag: Visual edit
- 17:31, 13 February 2024 diff hist +174 Nanofab Job Postings →Process/Wafer Fab Engineer (Staff position): updated Tag: Visual edit
- 17:23, 13 February 2024 diff hist +21 Nanofab Job Postings →1) Processing Technician - Thin-Film & Etch Characterizations: added "staff" postion Tag: Visual edit
- 12:56, 13 February 2024 diff hist -1,338 Template:Announcements deleted defunct announcements
- 17:44, 12 February 2024 diff hist +296 Stepper 2 (AutoStep 200) link to stepper vs contact tutorial current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +295 Stepper 1 (GCA 6300) link to stepper vs. contact PPT current Tag: Visual edit
- 17:43, 12 February 2024 diff hist +7 m Stepper 3 (ASML DUV) →General Capabilities/Overview: fixed link Tag: Visual edit
- 17:42, 12 February 2024 diff hist 0 m File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf John d moved page File:UCSB Stepper Reticle Layout vs Wafer Layout v5.pdf to File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf without leaving a redirect: better name current
- 17:41, 12 February 2024 diff hist +295 Stepper 3 (ASML DUV) link to stepper vs. contact litho PPT Tag: Visual edit
- 17:38, 12 February 2024 diff hist +56 N File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf Demis Tutorial on Contact vs Stepper litho
- 15:39, 12 February 2024 diff hist +116 Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement minor updates current Tag: Visual edit
- 15:37, 12 February 2024 diff hist +27 Ellipsometer (Woollam) →Operating Procedures: updated oxide pre-meas name to "refl enhance" current Tag: Visual edit
- 12:41, 10 February 2024 diff hist +80 Photolithography - Improving Adhesion Photoresist Adhesion →HMDS Process for PR Improving Adhesion: dehydration/O2 pasma midifcation current Tag: Visual edit
- 15:31, 7 February 2024 diff hist 0 m Dry Etching Recipes corrected links current Tag: Visual edit
- 15:30, 7 February 2024 diff hist +4 Dry Etching Recipes corected Panaosnic model numbers + links Tag: Visual edit
- 15:29, 7 February 2024 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): changed model number to E646V Tag: Visual edit
- 15:28, 7 February 2024 diff hist +1 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): changed model number to E626I
- 15:19, 7 February 2024 diff hist +1 Tool List →ICP-RIE: corrected Pan model numbers & links
- 15:19, 7 February 2024 diff hist +42 N ICP Etch 2 (Panasonic E640) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current Tag: New redirect
- 15:19, 7 February 2024 diff hist 0 m ICP Etch 2 (Panasonic E626I) John d moved page ICP Etch 2 (Panasonic E640) to ICP Etch 2 (Panasonic E626I): Corrected model number current
- 15:18, 7 February 2024 diff hist +14 ICP Etch 2 (Panasonic E626I) added model number to tool info
- 15:18, 7 February 2024 diff hist +42 N ICP Etch 1 (Panasonic E626I) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current Tag: New redirect
- 15:18, 7 February 2024 diff hist 0 m ICP Etch 1 (Panasonic E646V) John d moved page ICP Etch 1 (Panasonic E626I) to ICP Etch 1 (Panasonic E646V): corrected model number current
- 15:18, 7 February 2024 diff hist +13 ICP Etch 1 (Panasonic E646V) added model
- 21:51, 5 February 2024 diff hist +177 Packaging Recipes →Dicing Saw Recipes (ADT 7100): mockup of dicing alignment guides (ASCII) Tag: Visual edit
- 21:11, 5 February 2024 diff hist +828 Packaging Recipes →Dicing Saw Recipes (ADT 7100): Added dicing instructions Tag: Visual edit
- 21:10, 5 February 2024 diff hist +92 N File:Example Dicing Instructions for UC Santa Barbara v1.pptx Example Dicing Instructions for UC Santa Barbara v1.pptx Demis D John, 2024-02 current