Difference between revisions of "Tony Bosch"
Jump to navigation
Jump to search
(→Tools) |
|||
(10 intermediate revisions by the same user not shown) | |||
Line 2: | Line 2: | ||
|position = Senior Equipment Engineer |
|position = Senior Equipment Engineer |
||
|room = 1109C |
|room = 1109C |
||
− | |phone = (805) 839- |
+ | |phone = (805) 839-3486 |
|email = bosch@ece.ucsb.edu |
|email = bosch@ece.ucsb.edu |
||
}} |
}} |
||
Line 18: | Line 18: | ||
|- valign="top" |
|- valign="top" |
||
| |
| |
||
− | *[[Nano-Imprint (Nanonex NX2000)]] |
||
− | *[[Oven 4 (Fisher)]] |
||
− | *[[Vacuum Oven (YES)]] |
||
*[[Sputter 3 (AJA ATC 2000-F)]] |
*[[Sputter 3 (AJA ATC 2000-F)]] |
||
*[[Sputter 4 (AJA ATC 2200-V)]] |
*[[Sputter 4 (AJA ATC 2200-V)]] |
||
Line 26: | Line 23: | ||
*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
||
*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
||
+ | *[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]] |
||
*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
||
*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
||
Line 32: | Line 30: | ||
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
*[[Tube Furnace AlGaAs Oxidation (Linberg)]] |
||
*[[Flip-Chip Bonder (Finetech)]] |
*[[Flip-Chip Bonder (Finetech)]] |
||
− | *[[Microscopes]] |
||
− | *[[Probe Station & Curve Tracer]] |
||
− | *[[Optical Film Thickness (Filmetrics)]] |
||
− | *[[Resistivity Mapper (CDE RESMAP)]] |
||
− | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
||
*[[Deep UV Optical Microscope (Olympus)]] |
*[[Deep UV Optical Microscope (Olympus)]] |
||
− | * |
+ | *[[Laser Scanning Confocal M-scope (Olympus LEXT)]] |
+ | *[[Automated Coat/Develop System (S-Cubed Flexi)]] |
||
+ | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] |
||
+ | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
||
|} |
|} |
Latest revision as of 09:53, 28 October 2021
|
About
.
.
.
Tools
Tony Bosch is the supervisor for the following tools.