Difference between revisions of "Tony Bosch"
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*[[Coater Track (SCube)]] | *[[Coater Track (SCube)]] | ||
*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] | *[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]] | ||
| − | *[[Fluorine | + | *[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]] |
*[[Lift-Off Station]] | *[[Lift-Off Station]] | ||
* [[]] | * [[]] | ||
|} | |} | ||
Revision as of 19:32, 27 October 2021
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About
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Tools
Tony Bosch is the supervisor for the following tools.