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List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
20 December 2024
18 December 2024
| 23:08 | E-Beam 1 - 4-inch, 4-wafer Fixture SOP diffhist +70 John d talk contribs (link to EB1 page) | ||||
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23:07 | E-Beam 1 (Sharon) 2 changes history +103 [John d (2×)] | |||
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23:07 (cur | prev) +4 John d talk contribs (fixed link) Tag: Visual edit | ||||
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22:31 (cur | prev) +99 John d talk contribs (link to 4-inch, 4-wafer Fixture SOP) Tag: Visual edit | ||||
| 23:07 | Move log John d talk contribs moved page EB-1 - 4-inch, 4-wafer Fixture SOP to E-Beam 1 - 4-inch, 4-wafer Fixture SOP without leaving a redirect (clarify page name) | ||||
| N 22:52 | EB-1 - 4-inch, 4-wafer Fixture SOP diffhist +1,043 John d talk contribs (added images) | ||||
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22:51 | (Upload log) [John d (4×)] | |||
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22:51 John d talk contribs uploaded File:EB-1 4-wf fixture 04 fixture loaded in chamber.jpg | ||||
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22:48 John d talk contribs uploaded File:EB-1 4-wf fixture 03 wafers inserted.jpg | ||||
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22:46 John d talk contribs uploaded File:EB-1 4-wf fixture 02 bolt.png | ||||
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22:43 John d talk contribs uploaded File:EB-1 4-wf fixture 01 empty.png | ||||
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N 20:04 | Mike Barreraz 2 changes history +30 [John d (2×)] | |||
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20:04 (cur | prev) +4 John d talk contribs (correct syntax) Tag: New redirect | ||||
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20:03 (cur | prev) +26 John d talk contribs (redirect to correctly spelled Staff user page) Tag: Visual edit: Switched | |||
17 December 2024
| 16:29 | Atomic Layer Deposition Recipes diffhist 0 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
16 December 2024
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18:23 | Atomic Layer Deposition Recipes 5 changes history +120 [Biljana (5×)] | |||
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18:23 (cur | prev) 0 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
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18:22 (cur | prev) 0 Biljana talk contribs (→Oxford FlexAL Chamber #3: Dielectrics) | ||||
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18:21 (cur | prev) −2 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) Tag: Manual revert | ||||
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18:20 (cur | prev) +2 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) Tag: Reverted | ||||
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18:19 (cur | prev) +120 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
13 December 2024
| m 18:51 | ICP Etching Recipes diffhist −8 John d talk contribs (→High Rate Bosch Etch (DSEIII): update PR selectivity based on cal data) | ||||
12 December 2024
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17:09 | PECVD Recipes 4 changes history +54 [Biljana (4×)] | |||
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17:09 (cur | prev) −3 Biljana talk contribs (→SiO2 deposition rate at 150C is 35nm/min) | ||||
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17:08 (cur | prev) +2 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
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17:08 (cur | prev) +19 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
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17:08 (cur | prev) +36 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
| 15:59 | Autostep 200 Mask Making Guidance diffhist +1 John d talk contribs (→Photomask Ordering Info: move ucsb ordering link to photomask ordering heading) | ||||