Tony Bosch: Difference between revisions
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*[[Vacuum Oven (YES)]] |
*[[Vacuum Oven (YES)]] |
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*[[Sputter 3 (AJA ATC 2000-F)]] |
*[[Sputter 3 (AJA ATC 2000-F)]] |
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*[[Sputter 4 (AJA ATC 2200-V)]] |
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*[[Sputter 5 (AJA ATC 2200-V)]] |
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*[[ICP-PECVD (Unaxis VLR)]] |
*[[ICP-PECVD (Unaxis VLR)]] |
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*[[ICP-Etch (Unaxis VLR)]] |
*[[ICP-Etch (Unaxis VLR)]] |
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*[[UV Ozone Reactor]] |
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*[[Gold Plating Bench]] |
*[[Gold Plating Bench]] |
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*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
Revision as of 16:46, 20 April 2020
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About
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Tools
Tony Bosch is the supervisor for the following tools.