Latest revision as of 16:53, 28 October 2021

Tony Bosch

About

.

Tony Bosch is the supervisor for the following tools.

@@ Line 1: / Line 1: @@
 {{staff|{{PAGENAME}}
-|position  = Senior Development Engineer
+|position  = Senior Equipment Engineer
 |room = 1109C
-|phone = (805) 839-3918x217
+|phone = (805) 839-3486
 |email = bosch@ece.ucsb.edu
 }}
@@ Line 18: / Line 18: @@
 |- valign="top"
 |
-*[[Nano-Imprint (Nanonex NX2000)]]
-*[[Oven 4 (Fisher)]]
-*[[Vacuum Oven (YES)]]
-*[[E-Beam 2 (Custom)]]
-*[[E-Beam 4 (CHA)]]
 *[[Sputter 3 (AJA ATC 2000-F)]]
+*[[Sputter 4 (AJA ATC 2200-V)]]
+*[[Sputter 5 (AJA ATC 2200-V)]]
 *[[ICP-PECVD (Unaxis VLR)]]
 *[[ICP-Etch (Unaxis VLR)]]
+*[[Oxford ICP Etcher (PlasmaPro 100 Cobra)]]
-*[[UV Ozone Reactor]]
 *[[Gold Plating Bench]]
+*[[ICP Etch 2 (Panasonic E640)]]
-*[[Strip Annealer]]
 ||
 *[[Tube Furnace (Tystar 8300)]]
 *[[Tube Furnace AlGaAs Oxidation (Linberg)]]
 *[[Flip-Chip Bonder (Finetech)]]
-*[[Microscopes]]
-*[[Probe Station & Curve Tracer]]
-*[[Optical Film Thickness (Filmetrics)]]
-*[[SEM Sample Coater (Hummer)]]
-*[[Resistivity Mapper (CDE RESMAP)]]
-*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
 *[[Deep UV Optical Microscope (Olympus)]]
-* [[Fluorescence Microscope (Olympus MX51)]]
+*[[Laser Scanning Confocal M-scope (Olympus LEXT)]]
+*[[Automated Coat/Develop System (S-Cubed Flexi)]]
+*[[DSEIII (PlasmaTherm/Deep Silicon Etcher)]]
+*[[Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)]]
 |}