Lee Sawyer: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
 
(4 intermediate revisions by the same user not shown)
Line 12: Line 12:
=Tools=
=Tools=
Lee Sawyer is in charge of the following tools:
Lee Sawyer is in charge of the following tools:
{|
|- valign="top"
|
* [[Contact Aligner (SUSS MA-6)]]
* [[Contact Aligner (SUSS MA-6)]]
* [[Suss Aligners (SUSS MJB-3)]]
* [[Suss Aligners (SUSS MJB-3)]]
Line 20: Line 23:
* [[RIE 2 (MRC)]]
* [[RIE 2 (MRC)]]
* [[RIE 3 (MRC)]]
* [[RIE 3 (MRC)]]
||
* [[UV Ozone Reactor]]
* [[UV Ozone Reactor]]
* [[Plasma Activation (EVG 810)]]
* [[Dicing Saw (ADT)]]
* [[Goniometer (Rame-Hart A-100)]]
* [[Plasma Clean (YES EcoClean)]]
* [[Film Stress (Tencor Flexus)]]
* [[Maskless Aligner (Heidelberg MLA150)]]
* [[E-Beam 2 (Custom)]]
|}

Latest revision as of 16:59, 28 October 2021