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- 23:49, 15 December 2021 diff hist +1,751 Deposition Data - temporary 2021-12-15 New data links Tag: Visual edit
- 07:35, 15 December 2021 diff hist +24,157 N Old Deposition Data - 2021-12-15 Created page with "OLD Data: Copied on 2021-12-14 {{recipes|Vacuum Deposition}} =PECVD 1 (PlasmaTherm 790)= ====Historical Particulate Data==== *[https://docs.google.com/spreadsheets/d..." Tag: Visual edit: Switched
- 07:35, 15 December 2021 diff hist +107 Nanofab Staff Internal Pages →Old / Defunct Tag: Visual edit
- 07:32, 15 December 2021 diff hist -11,328 Deposition Data - temporary 2021-12-15
- 07:31, 15 December 2021 diff hist +26 Deposition Data - temporary 2021-12-15 Tag: Visual edit
- 07:31, 15 December 2021 diff hist +24,158 N Deposition Data - temporary 2021-12-15 pasted old data
- 07:30, 15 December 2021 diff hist +83 Nanofab Staff Internal Pages →Old / Defunct: temp. link to dep data Tag: Visual edit
- 06:10, 15 December 2021 diff hist +1,908 MLA150 - Troubleshooting →Out Of Focus Exposures: Debugging section Tag: Visual edit
- 09:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
- 09:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
- 09:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages Tag: Visual edit
- 09:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
- 09:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit
- 12:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
- 12:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg current
- 12:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
- 12:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit
- 12:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
- 12:10, 7 December 2021 diff hist -1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages
- 11:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit
- 11:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
- 11:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
- 11:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
- 11:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
- 11:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
- 11:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
- 11:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit
- 21:43, 22 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section current Tag: Visual edit
- 13:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
- 13:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit
- 15:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
- 15:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png current
- 15:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png current
- 14:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
- 14:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit
- 08:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
- 08:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit
- 12:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit
- 16:47, 4 November 2021 diff hist -181 Template:Announcements Removed fl-icp
- 11:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
- 11:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
- 11:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
- 10:53, 4 November 2021 diff hist -1 m Template:Announcements
- 10:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
- 10:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit
- 12:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
- 08:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
- 08:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current
- 11:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit