Lee Sawyer
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Lee Sawyer
Position
Equipment Engineer
Room Number
1109F
Phone
(805) 893-2123
E-Mail
lee_sawyer@ucsb.edu
About
Current Work
Tools
Lee Sawyer is in charge of the following tools:
Contact Aligner (SUSS MA-6)
Suss Aligners (SUSS MJB-3)
Wafer Bonder (SUSS SB6-8E)
DUV Flood Expose
Molecular Vapor Deposition
ICP Etch 1 (Panasonic E626I)
RIE 2 (MRC)
RIE 3 (MRC)
UV Ozone Reactor
Plasma Activation (EVG 810)
Dicing Saw (ADT)
Goniometer (Rame-Hart A-100)
Plasma Clean (YES EcoClean)
Film Stress (Tencor Flexus)
Maskless Aligner (Heidelberg MLA150)
E-Beam 2 (Custom)
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