Lee Sawyer

Lee Sawyer Position Equipment Engineer Room Number 1109F Phone (805) 893-2123 E-Mail lee_sawyer@ucsb.edu

Tools

Lee Sawyer is in charge of the following tools:

• Contact Aligner (SUSS MA-6)
• Suss Aligners (SUSS MJB-3)
• Wafer Bonder (SUSS SB6-8E)
• DUV Flood Expose
• Molecular Vapor Deposition
• ICP Etch 1 (Panasonic E626I)
• RIE 2 (MRC)
• RIE 3 (MRC)

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• UV Ozone Reactor
• Plasma Activation (EVG 810)
• Dicing Saw (ADT)
• Goniometer (Rame-Hart A-100)
• Plasma Clean (YES EcoClean)
• Film Stress (Tencor Flexus)
• Maskless Aligner (Heidelberg MLA150)

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