Atomic Layer Deposition Recipes

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Atomic Layer Deposition (Oxford FlexAL)

Al₂O₃ deposition

• Al₂O₃ 300
• Al₂O₃ 300 Saturated
• Al₂O₃ plasma 300C
• Al₂O₃ 100

AlN deposition

• AlN 300

HfO₂ deposition

• HfO₂ 100
• HfO₂ 300

SiO₂ deposition

• SiO₂ 100
• SiO₂ 300

ZrO₂ deposition

• ZrO₂ 300