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- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
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7 November 2024
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21:57 | Vacuum Deposition Recipes 2 changes history −2,346 [Noahdutra (2×)] | |||
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21:57 (cur | prev) +94 Noahdutra talk contribs (Added AuSn to Thermal evap 2) Tag: Visual edit | ||||
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21:49 (cur | prev) −2,440 Noahdutra talk contribs (changing thermal evaps to be correct) Tag: Visual edit | ||||
| 21:38 | Services diffhist −2 John d talk contribs (→Statement of Work: moved filename to top) | ||||
| 18:04 | Process Group - Process Control Data diffhist +416 John d talk contribs (added GaN etch cal →Oxford PlasmaPro Cobra Etcher) | ||||
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02:00 | Oxford ICP Etcher (PlasmaPro 100 Cobra) 2 changes history +1,453 [John d (2×)] | |||
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02:00 (cur | prev) +226 John d talk contribs (→Process Control Data) Tag: Visual edit: Switched | |||
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02:00 (cur | prev) +1,227 John d talk contribs (link to PC data) Tag: Visual edit: Switched | ||||
| 00:45 | Template:Announcements diffhist −704 John d talk contribs (deleted ASML update) | ||||
6 November 2024
| 21:51 | DSEIII (PlasmaTherm/Deep Silicon Etcher) diffhist +1,325 John d talk contribs (pasted NoahD's example SEM's) | ||||
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21:47 | Process Group - Process Control Data 3 changes history +1,603 [John d (3×)] | |||
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21:47 (cur | prev) +1,010 John d talk contribs (→Etching (Process Control Data): pasted process control data link/image from DSE recipes page) Tag: Visual edit | ||||
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21:42 (cur | prev) +242 John d talk contribs (→PlasmaTherm SLR Fluorine Etcher: subscripts in chemicals) Tag: Visual edit | |||
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21:38 (cur | prev) +351 John d talk contribs (describe purpose of 2 diff EtchCals) Tag: Visual edit | ||||
| 21:43 | Atomic Layer Deposition Recipes diffhist +38 Biljana talk contribs (→SiO2 deposition (ALD CHAMBER 1): Added (BHF:DI=1:100) etch rate) | ||||
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21:39 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 4 changes history +50 [John d (4×)] | |||
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21:39 (cur | prev) +44 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) +11 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) −35 John d talk contribs (→Process Control Data: pasted PC images+links, cleaned up) Tag: Visual edit | ||||
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21:30 (cur | prev) +30 John d talk contribs (→Process Control Data: pasted PC images/links from PC page) | ||||
| 21:26 | Upload log John d talk contribs uploaded a new version of File:ICP2 Process Control Data Example.jpg (newer data, "example" label) | ||||
| 21:22 | ICP Etch 2 (Panasonic E626I) diffhist +366 John d talk contribs (→Recipes: added Process Control Header level 1 & images from PC page) | ||||
| m 21:14 | Process Group Interns diffhist −5 John d talk contribs | ||||
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N 21:12 | Process Group Internships 3 changes history +5,528 [John d (3×)] | |||
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21:12 (cur | prev) +71 John d talk contribs Tag: Visual edit | |||
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21:09 (cur | prev) +7 John d talk contribs (Intenrhsip Goals heading) Tag: Visual edit | ||||
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21:00 (cur | prev) +5,450 John d talk contribs (internship goals, skillss learns and detailed 2-phase approach) Tag: Visual edit | |||
| 16:54 | Lithography Recipes diffhist +444 John d talk contribs (→General Photolithography Techniques: link to FEM page) | ||||
5 November 2024
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23:54 | (Upload log) [John d (2×)] | |||
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23:54 John d talk contribs uploaded a new version of File:FEM example analysis GMoody Group 2024-11-04 v2.png (added X in middle) | ||||
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23:47 John d talk contribs uploaded File:FEM example analysis GMoody Group 2024-11-04 v2.png | ||||
| 23:52 | Lithography Calibration - Analyzing a Focus-Exposure Matrix diffhist +465 John d talk contribs (uploaded Moody group FEM example) | ||||
4 November 2024
| 22:51 | Services diffhist +25 John d talk contribs (→Fabrication Services by NanoFab Staff: clarify charged rates) | ||||
2 November 2024
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17:48 | SEM 1 (JEOL IT800SHL) 2 changes history +210 [John d (2×)] | |||
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17:48 (cur | prev) +15 John d talk contribs (→Operating Procedures) Tag: Visual edit | |||
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16:41 (cur | prev) +195 John d talk contribs (→Operating Procedures: link to reduced cahrging imaging modes page) Tag: Visual edit | ||||
| 17:38 | Hummer SEM Sample Coater - Techniques to reduce charging in SEMs diffhist +46 John d talk contribs | ||||
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N 17:35 | JEOL IT800SHL - Reduced Charging Imaging Modes 2 changes history +2,972 [John d (2×)] | |||
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17:35 (cur | prev) +353 John d talk contribs (AUPd help) Tag: Visual edit | ||||
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17:30 (cur | prev) +2,619 John d talk contribs (reduced charging by Demis,f rom JEOL training by Jen 2024-09) Tag: Visual edit | |||