User contributions for John d

Results for John d talk block log uploads logs

A user with 4,676 edits. Account created on 5 September 2012.

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16:3116:31, 14 December 2021 diff hist +598 Old Deposition Data - NastaziaM 2021-11-22 modified PECVD1 and PECVD 1 for same titles as old data current Tag: Visual edit
16:2016:20, 14 December 2021 diff hist +24,230 Old Deposition Data - NastaziaM 2021-11-22 pasted all old data from https://wiki.nanotech.ucsb.edu/wiki/PECVD_Recipes Tag: Visual edit
16:0216:02, 14 December 2021 diff hist +10 m Nanofab Staff Internal Pages No edit summary Tag: Visual edit

16:2116:21, 11 December 2021 diff hist +115 m ICP Etching Recipes →Si Deep RIE (PlasmaTherm/Bosch Etch): linnks to new DSE & FL_ICP recipes Tag: Visual edit
16:2016:20, 11 December 2021 diff hist +331 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): links for GaAs, GaSb Tag: Visual edit

19:1619:16, 8 December 2021 diff hist +504 N MA6 Backside Alignment - Allowed Mark Locations 100-mm BSA chuck with cutouts measurements current Tag: Visual edit
19:1519:15, 8 December 2021 diff hist +67 N File:MA-6 4-inch BSA chuck - 2631 - measurements.jpg No edit summary current
19:1219:12, 8 December 2021 diff hist +53 Contact Aligner (SUSS MA-6) →Documentation: link to "backside alignment - allowed mark locations" Tag: Visual edit
19:1019:10, 8 December 2021 diff hist +2 m Contact Aligner (SUSS MA-6) minor wording Tag: Visual edit

19:1119:11, 7 December 2021 diff hist 0 m Template:Announcements →New COVID Protocols: minor formatting
19:1019:10, 7 December 2021 diff hist −1,191 Template:Announcements delete old Weekly-Testing & COVID-Protocols & OxfordICP messages

18:0118:01, 1 December 2021 diff hist +439 DSEIII (PlasmaTherm/Deep Silicon Etcher) added section for Edge-Bead removal of PR etc Tag: Visual edit

18:2718:27, 24 November 2021 diff hist +164 m Photolithography - Improving Adhesion Photoresist Adhesion mentioned lift-off delam Tag: Visual edit
18:2518:25, 24 November 2021 diff hist +26 m Lithography Recipes →General Photolithography Techniques Tag: Visual edit
18:2418:24, 24 November 2021 diff hist +180 Lithography Recipes added General Photolitho section to TOC Tag: Visual edit
18:2218:22, 24 November 2021 diff hist +1,309 N Photolithography - Manual Edge-Bead Removal Techniques added razor, EBR100 and lithographic methods Tag: Visual edit
18:1218:12, 24 November 2021 diff hist 0 m Lithography Recipes →General Photolithography Techniques: changed linked page title Tag: Visual edit
18:1218:12, 24 November 2021 diff hist 0 m Photolithography - Improving Adhesion Photoresist Adhesion John d moved page Photolithography - HMDS Process for Improving Adhesion to Photolithography - Improving Adhesion Photoresist Adhesion without leaving a redirect: more generalized page title
18:1118:11, 24 November 2021 diff hist +1,119 N Photolithography - Improving Adhesion Photoresist Adhesion added Underlayers for PR adhesion Tag: Visual edit
18:0518:05, 24 November 2021 diff hist +447 Lithography Recipes Added "General Photlith techniques" section and links to 2 pages Tag: Visual edit

04:4304:43, 23 November 2021 diff hist +938 Process Group - Billing Instructions added "Billing rates" section Tag: Visual edit

20:4520:45, 22 November 2021 diff hist +7 N Old Deposition Data - NastaziaM 2021-11-22 Created page with "Testing" Tag: Visual edit
20:4520:45, 22 November 2021 diff hist +31 Nanofab Staff Internal Pages →Process Group: link to old dep data Tag: Visual edit

22:0922:09, 18 November 2021 diff hist +527 Surface Analysis (KLA/Tencor Surfscan) added exmaple of low particle count Tag: Visual edit
22:0722:07, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G2.png No edit summary current
22:0522:05, 18 November 2021 diff hist +44 N File:Surfscan Low-Particle Example - G4.png No edit summary current

21:3521:35, 15 November 2021 diff hist +207 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick added POLOS cleaning step Tag: Visual edit
21:3321:33, 15 November 2021 diff hist +172 Logitech WBS7 - Procedure for Wax Mounting with bulk Crystalbond Stick link to Logitech Wafer Bonder Tag: Visual edit

15:4315:43, 12 November 2021 diff hist +379 KLayout Design Tips force TOC at top, minor updates
15:2915:29, 12 November 2021 diff hist +338 Maskless Aligner (Heidelberg MLA150) "updates to training video" links below video training Tag: Visual edit

19:2319:23, 11 November 2021 diff hist +1,060 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: discussion of "process window" and "tolerance" Tag: Visual edit

23:4723:47, 4 November 2021 diff hist −181 Template:Announcements Removed fl-icp
18:1718:17, 4 November 2021 diff hist +377 PECVD Recipes →Cleaning Recipes (PECVD #2): added cleaning times Tag: Visual edit
18:0418:04, 4 November 2021 diff hist +91 m PECVD 2 (Advanced Vacuum) →About: link to LSNitride data Tag: Visual edit
18:0318:03, 4 November 2021 diff hist +179 PECVD 2 (Advanced Vacuum) →About: separated specs into sub-sections Tag: Visual edit
17:5317:53, 4 November 2021 diff hist −1 m Template:Announcements No edit summary
17:5317:53, 4 November 2021 diff hist +181 Template:Announcements FL-ICP down
17:4517:45, 4 November 2021 diff hist +90 Stepper 3 (ASML DUV) →Process Information: added Max wafer thickness Tag: Visual edit

19:0819:08, 1 November 2021 diff hist +63 Resistivity Mapper (CDE RESMAP) added CSV export Tag: Visual edit
15:5815:58, 1 November 2021 diff hist +392 MLA150 - Troubleshooting →Unexpected Behavior: moved to top. Added Reconverting CAD file. Tag: Visual edit
15:5115:51, 1 November 2021 diff hist 0 File:MLA Quarter-Wafer Alignment.jpg John d uploaded a new version of File:MLA Quarter-Wafer Alignment.jpg current

18:2118:21, 28 October 2021 diff hist +213 Lift-Off with DUV Imaging + PMGI Underlayer →Process Limits: suggest LOL, PMGI double-spin etc. Tag: Visual edit
04:5104:51, 28 October 2021 diff hist −5 m ASML Stepper 3 Error Recovery, Troubleshooting and Calibration corrected max. expansion to 200pm (current machine setting) Tag: Visual edit
04:4904:49, 28 October 2021 diff hist +837 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration added Wafer Expansion workaround Tag: Visual edit

19:1519:15, 22 October 2021 diff hist +229 N Template:StaffInfoSecondary DJ Copy of NickL's "StaffInfoSecondary" template
19:1319:13, 22 October 2021 diff hist +10,286 N Template:Tool2 copy of NickL's "Tool2" template
19:1219:12, 22 October 2021 diff hist +659 N Template:StaffInfo DJ copy of original StaffInfo tempalte
18:4218:42, 22 October 2021 diff hist +183 Template:StaffInfo added descriptive info about this template. current
18:2018:20, 22 October 2021 diff hist +193 Services →Important Info on Fabrication Services: added link to publications policy Tag: Visual edit
00:0100:01, 22 October 2021 diff hist −359 Template:Announcements deleted wifi maint.

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