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This special page shows all uploaded files.

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Date Name Thumbnail Size User Description Versions
15:33, 15 February 2022 Oxford Cal 01 26 22 New002 CS 002.jpg (file) 107 KB Pakala (talk | contribs)   1
15:10, 15 February 2022 Oxford Cal 01 26 22 031New CS 001.jpg (file) 116 KB Pakala (talk | contribs)   1
15:07, 15 February 2022 Oxford Cal 01 26 22 003New 45d 001.jpg (file) 150 KB Pakala (talk | contribs)   1
18:47, 14 February 2022 ASML Reticle Programming Params - MASKJAN2020 v1.xlsx (file) 11 KB John d (talk | contribs) More comments to help users fill this out. 7
18:09, 8 February 2022 Oxford Cal 1 26 22 003 CS007.jpg (file) 135 KB Pakala (talk | contribs)   1
18:05, 8 February 2022 Oxford Cal 1 26 22 001 CS 004.jpg (file) 118 KB Pakala (talk | contribs)   1
18:03, 8 February 2022 Oxford Cal 1 26 22 003 45D 002.jpg (file) 163 KB Pakala (talk | contribs)   1
17:59, 8 February 2022 Oxford Cal 1 26 22 001 45D 005.jpg (file) 164 KB Pakala (talk | contribs)   1
21:09, 2 February 2022 MLA150 SOP Rev K (LS).pdf (file) 2.05 MB Sawyer l (talk | contribs)   1
19:09, 1 February 2022 Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg (file) 135 KB Pakala (talk | contribs)   1
18:35, 1 February 2022 Oxford InP Cal - SEM 45D 001.jpg (file) 165 KB Pakala (talk | contribs)   1
23:44, 26 January 2022 EB -3 OPERATING INSTRUCTIONS docx.pdf (file) 35 KB Freeborn d (talk | contribs)   2
06:03, 14 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal03.pdf (file) 1.53 MB John d (talk | contribs) Oxford ICP Etch Cals03 1
05:55, 14 January 2022 2022-01-12 Oxford InP Ridge Wiki Post - Cal02.pdf (file) 1.11 MB John d (talk | contribs) Oxford ICP Cal SEMs 1
05:51, 14 January 2022 2022-01-11 Oxford InP Ridge Wiki Post - Cal01.pdf (file) 1.13 MB John d (talk | contribs) Oxford ICP Etch Cal SEMs 1
18:15, 5 January 2022 MLA150 SOP Rev J (LS).docx.pdf (file) 2.01 MB Sawyer l (talk | contribs)   1
19:50, 4 January 2022 ADT Dicing - Blade Exposure diagram.png (file) 196 KB John d (talk | contribs)   1
17:12, 4 January 2022 Oxford Cobra 300 SOP v2021-12-14.pdf (file) 154 KB Bosch t (talk | contribs)   1
17:58, 3 January 2022 EB2 SOP Rev C.pdf (file) 3.02 MB Sawyer l (talk | contribs)   1
17:24, 3 January 2022 EVG Plasma Activation SOP Rev C.pdf (file) 676 KB Sawyer l (talk | contribs)   1
23:10, 21 December 2021 Out of Focus Exposures - Carl Peterson (Krisnamoorthy Group, 2021-12).png (file) 543 KB John d (talk | contribs) Added scale bars 200µm 2
19:15, 8 December 2021 MA-6 4-inch BSA chuck - 2631 - measurements.jpg (file) 1.11 MB John d (talk | contribs)   1
16:57, 30 November 2021 Cleaning Rules for Fluorine ICP Etch tool.pdf (file) 50 KB Freeborn d (talk | contribs)   1
22:07, 18 November 2021 Surfscan Low-Particle Example - G2.png (file) 783 KB John d (talk | contribs)   1
22:05, 18 November 2021 Surfscan Low-Particle Example - G4.png (file) 858 KB John d (talk | contribs)   1
22:17, 9 November 2021 SOFL0103.pdf (file) 70 KB Ningcao (talk | contribs)   1
00:59, 9 November 2021 IP210212.pdf (file) 61 KB Ningcao (talk | contribs)   1
00:56, 9 November 2021 IP210201.pdf (file) 42 KB Ningcao (talk | contribs)   1
15:51, 1 November 2021 MLA Quarter-Wafer Alignment.jpg (file) 320 KB John d (talk | contribs) Moved left AlMk to left corner, instead of along edge. User JeurgenM from FP said this is better. 2
18:49, 12 October 2021 Bay 4 toxic Corrosive - wafer sample holders - IMG 4243.jpg (file) 1.86 MB John d (talk | contribs)   1
17:42, 29 September 2021 OxfordPlasmaPro.jpg (file) 33 KB John d (talk | contribs) shrunk to 400px 2
00:23, 22 September 2021 CAD Tutorial for ASML Reticle v1 GDS.gds (file) 4 KB John d (talk | contribs)   1
18:28, 10 September 2021 ICP -1 Rules & Important Notes.pdf (file) 501 KB Sawyer l (talk | contribs)   1
18:27, 10 September 2021 ICP -1 Gas Change CHF3-Ar-CHF3.pdf (file) 498 KB Sawyer l (talk | contribs)   1
22:38, 9 September 2021 GCA Local Alignment Mark Dotted.gds (file) 62 KB John d (talk | contribs)   1
22:36, 9 September 2021 GCA Local Alignment Mark.gds (file) 2 KB John d (talk | contribs)   1
22:27, 9 September 2021 GCA Global Mark.gds (file) 2 KB John d (talk | contribs)   1
19:39, 9 September 2021 ADT SOP Rev D.pdf (file) 827 KB Sawyer l (talk | contribs)   1
19:55, 3 September 2021 Annotated PR etch - Om1000 03 - ARC + Cl + PR etch v1.jpg (file) 210 KB John d (talk | contribs) v2 - indicated when PR was fully removed 2
21:08, 23 August 2021 ADT Dicing Saw SOP Rev C.pdf (file) 638 KB Sawyer l (talk | contribs)   2
21:08, 11 August 2021 MA-6 Exp Mode Visual Aid.pdf (file) 566 KB Sawyer l (talk | contribs)   2
21:05, 11 August 2021 BA6 SOP Rev A.pdf (file) 1.78 MB Sawyer l (talk | contribs)   1
01:45, 11 August 2021 I2210411.pdf (file) 45 KB Ningcao (talk | contribs)   1
21:17, 10 August 2021 ADT Dicing Saw SOP Rev B.pdf (file) 634 KB Sawyer l (talk | contribs)   1
02:24, 10 August 2021 I2210508.pdf (file) 72 KB Ningcao (talk | contribs)   1
21:15, 4 August 2021 GCA Stepper MaskPlate Master-DarkField 5x.gds (file) 216 KB John d (talk | contribs) GCA Stepper (Autostep 200 or 6300) Photomask template. Darkfield, at Reticle-scale (5x magnification already applied). Insert your design as Instances with 5x up-scaling applied. 1
01:27, 23 July 2021 I2210308.pdf (file) 79 KB Ningcao (talk | contribs)   1
15:33, 20 July 2021 Autostep 200 Restart SOP June 2021.pdf (file) 6.2 MB Sawyer l (talk | contribs)   1
20:18, 19 July 2021 MLA150 Substrate Template Rules.pdf (file) 395 KB Sawyer l (talk | contribs)   1
17:46, 13 July 2021 200um square v1.gds (file) 170 bytes John d (talk | contribs) TESTING only - please delte 1
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