User contributions for John d
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10 March 2023
- 21:0721:07, 10 March 2023 diff hist +45 m Process Group - Process Control Data Litho to Top of page, link to ASML recipes page
- 21:0421:04, 10 March 2023 diff hist +738 Process Group - Process Control Data New Litho section + Stepper3 ASML section with links to process control data Tag: Visual edit: Switched
- 21:0121:01, 10 March 2023 diff hist +1,321 Stepper 3 (ASML DUV) link to Process Control Data Tag: Visual edit
5 March 2023
- 22:3622:36, 5 March 2023 diff hist +114 XeF2 Etch (Xetch) Link to recipes oage Tag: Visual edit
26 February 2023
- 07:1707:17, 26 February 2023 diff hist +14 Template:Announcements →Flip-Chip Bonder repair
- 03:1203:12, 26 February 2023 diff hist −16 Template:Announcements FCB update
25 February 2023
- 17:1717:17, 25 February 2023 diff hist +8 m Step Profilometer (DektakXT) added date of replacement Tag: Visual edit
23 February 2023
- 23:0023:00, 23 February 2023 diff hist +797 PECVD Recipes →ICP-PECVD (Unaxis VLR): cleaned up process control section, and added 800nm max SiO2 thickness before cleaning Tag: Visual edit
21 February 2023
- 22:0122:01, 21 February 2023 diff hist −51 Probe Station: I-V Curves with Keithley 2400 and Python Script anaconda inzstruction Tag: Visual edit
20 February 2023
- 16:5316:53, 20 February 2023 diff hist +56 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): linked to new google sheets data Tag: Visual edit
17 February 2023
- 04:4504:45, 17 February 2023 diff hist +37 Photolithography - Manual Edge-Bead Removal Techniques →Lithographic Edge Bead Removal: link to DUV FLood exposure Tag: Visual edit
- 04:4304:43, 17 February 2023 diff hist +2 m Lithography Recipes fixed link Tag: Visual edit
- 04:4204:42, 17 February 2023 diff hist +2 m Lithography Recipes remove TOC again
- 04:4204:42, 17 February 2023 diff hist +36 Lithography Recipes →General Photolithography Techniques: made each section a linkable header level Tag: Visual edit
- 04:4004:40, 17 February 2023 diff hist −2 m Lithography Recipes add TOC to get header link
14 February 2023
- 19:3619:36, 14 February 2023 diff hist +995 Frequently Asked Questions →General NanoFab Questions: added "what supplies do i need to bring?" Tag: Visual edit
- 19:2119:21, 14 February 2023 diff hist −1 m Template:Announcements No edit summary
- 01:3101:31, 14 February 2023 diff hist −86 Template:Announcements FCB update
13 February 2023
- 17:3517:35, 13 February 2023 diff hist +323 Template:Announcements Unaxis Etch Down
- 17:3417:34, 13 February 2023 diff hist +121 Template:Announcements FCB update
10 February 2023
- 20:2320:23, 10 February 2023 diff hist +168 Probe Station & Curve Tracer →Operation Procedures & Manuals: linked to probe station usage rules current Tag: Visual edit
- 16:2816:28, 10 February 2023 diff hist −9 m Tool List →Electrical Analysis: fix QFI link Tag: Visual edit
8 February 2023
- 07:2507:25, 8 February 2023 diff hist +247 Maskless Aligner (Heidelberg MLA150) →Documentation: link to FEM tips Tag: Visual edit
7 February 2023
- 23:3223:32, 7 February 2023 diff hist +250 MLA150 - Design Guidelines →Greyscale Lithography: addded more info Tag: Visual edit
- 23:2823:28, 7 February 2023 diff hist +833 ASML Stepper 3 Standard Operating Procedure →Running a focus and/or exposure matrix: added "general process" for FEMs Tag: Visual edit
- 18:0818:08, 7 February 2023 diff hist +6 Template:Announcements updated Dektak XT, link for training available
- 18:0618:06, 7 February 2023 diff hist −54 Step Profilometer (DektakXT) updated that tool is availabel for training. Tag: Visual edit
6 February 2023
- 18:3718:37, 6 February 2023 diff hist +202 Template:Announcements added back the "ENDFEED" lines and updated comment to indicate not to delete this.
1 February 2023
- 18:2418:24, 1 February 2023 diff hist −28 m Foong Fatt No edit summary current
- 18:2418:24, 1 February 2023 diff hist −8 m Foong Fatt No edit summary
- 18:1918:19, 1 February 2023 diff hist +296 N Foong Fatt initial page copied from Demis D John Tag: Visual edit: Switched
- 18:1718:17, 1 February 2023 diff hist −7 Staff List Afdded Foong Tag: Visual edit
30 January 2023
- 21:5621:56, 30 January 2023 diff hist +200 ICP Etching Recipes →PlasmaTherm/SLR Fluorine Etcher: added recipe tips, RF 1/RF 2/ignition tips. Tag: Visual edit
- 14:4914:49, 30 January 2023 diff hist −4 Nanofab Job Postings deleted Process Engineer, added Undergrad process technician Tag: Visual edit
- 03:0403:04, 30 January 2023 diff hist +314 Template:Announcements jeol sem down
27 January 2023
- 23:0523:05, 27 January 2023 diff hist +247 Template:Announcements FCB update
- 23:0323:03, 27 January 2023 diff hist −21 Template:Announcements Oxford etcher update
- 21:4821:48, 27 January 2023 diff hist +315 Template:Announcements SB6 down
- 21:4621:46, 27 January 2023 diff hist +429 Template:Announcements MLA downtime Mon 2023-01-30 5:30pm
- 08:5408:54, 27 January 2023 diff hist −549 Template:Announcements deleted GCA maintenance
- 08:5208:52, 27 January 2023 diff hist −36 Template:Announcements blue-m oven UP
26 January 2023
- 18:0418:04, 26 January 2023 diff hist +21 m Template:Announcements blue m update
- 17:5017:50, 26 January 2023 diff hist +206 Template:Announcements updated oxford
25 January 2023
- 18:4218:42, 25 January 2023 diff hist +3 Template:News →Wafer Polisher available: updated to Millerski
- 18:4118:41, 25 January 2023 diff hist +243 Template:News dektak xt announcement
- 18:3918:39, 25 January 2023 diff hist +249 Template:Announcements dektak xt notice
24 January 2023
- 21:1221:12, 24 January 2023 diff hist +18 Suss Aligners (SUSS MJB-3) →Optical Spectrum with No Filter: added "exposure" to clairfy which optical spectrum Tag: Visual edit
- 21:0921:09, 24 January 2023 diff hist +38 m Suss Aligners (SUSS MJB-3) →IR Aligner Tag: Visual edit
23 January 2023
- 21:5121:51, 23 January 2023 diff hist +87 Wafer scanning process traveler No edit summary Tag: Visual edit
- 21:4621:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit