User contributions for John d

27 September 2024

• 18:2718:27, 27 September 2024 diff hist −1‎ Stepper 2 (AutoStep 200) ‎ →‎Process Information: moved mask palte info to "detailed specs" Tag: Visual edit
• 18:2718:27, 27 September 2024 diff hist +115‎ Stepper 2 (AutoStep 200) ‎ →‎Detailed Specifications: added mask plate specs Tag: Visual edit
• 18:2718:27, 27 September 2024 diff hist +114‎ Stepper 1 (GCA 6300) ‎ →‎Detailed Specifications: added mask plate specs Tag: Visual edit

25 September 2024

• 22:0322:03, 25 September 2024 diff hist +198‎ Wet Benches ‎ →‎Documentation: explained what is in this doc current Tag: Visual edit
• 21:5921:59, 25 September 2024 diff hist +22‎ Wet Benches ‎ →‎Documentation: expanded "SOP" acronym Tag: Visual edit
• 00:1800:18, 25 September 2024 diff hist +30‎ m Services ‎ →‎Statement of Work Tag: Visual edit

24 September 2024

• 18:0518:05, 24 September 2024 diff hist +184‎ Wet Etching Recipes ‎ →‎Compound Semiconductor Etching: updated Claswson link to state author and date, added description of the paper Tag: Visual edit

23 September 2024

• 23:5223:52, 23 September 2024 diff hist +12‎ m Template:News ‎ →‎DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies
• 23:3223:32, 23 September 2024 diff hist +815‎ Template:News ‎ added DREAMS projects funded.

20 September 2024

• 23:0123:01, 20 September 2024 diff hist +102‎ Services ‎ →‎Paperwork for Fabrication Services: added NOT prof's signature Tag: Visual edit
• 22:2322:23, 20 September 2024 diff hist +14‎ m Lithography Recipes ‎ →‎Recipes Table (S-Cubed Flexi) Tag: Visual edit
• 19:3619:36, 20 September 2024 diff hist −344‎ Template:Announcements ‎ dse update
• 18:4018:40, 20 September 2024 diff hist +188‎ Stepper 3 (ASML DUV) ‎ →‎About: link to stepper tutorial, fixed mask making guidelines link Tag: Visual edit

17 September 2024

• 18:4918:49, 17 September 2024 diff hist +548‎ Calculators + Utilities ‎ →‎ASML Stepper: link to mask making guidelines, deleted ASML Alignment Mark CAD Tag: Visual edit
• 00:1900:19, 17 September 2024 diff hist +212‎ Calculators + Utilities ‎ →‎General CAD files for Litho: inverted alignmetn mark Tag: Visual edit
• 00:1900:19, 17 September 2024 diff hist +91‎ N File:Inverted Contact-AlignMarks with Vernier.png ‎No edit summary current

14 September 2024

• 00:4700:47, 14 September 2024 diff hist +69‎ Process Group Interns ‎ →‎Current Interns: added Terry Tag: Visual edit
• 00:1300:13, 14 September 2024 diff hist +159‎ ICP Etching Recipes ‎ →‎Si Etching (Fluorine ICP Etcher): explained double gas flow. Tag: Visual edit

13 September 2024

• 21:3921:39, 13 September 2024 diff hist +1,029‎ Process Group - Process Control Data ‎ →‎PlasmaTherm SLR Fluorine Etcher: added Si etch cal Tag: Visual edit: Switched

12 September 2024

• 21:1921:19, 12 September 2024 diff hist 0‎ m Template:Announcements ‎ →‎IBD is UP
• 21:1821:18, 12 September 2024 diff hist +86‎ Template:Announcements ‎ IBD up, YES Up
• 18:1918:19, 12 September 2024 diff hist +816‎ PECVD Recipes ‎ →‎Low-Stress SiN deposition (PECVD #2): added LS SiN 3x Time section + charts etc. Tag: Visual edit
• 17:2417:24, 12 September 2024 diff hist +426‎ ICP Etching Recipes ‎ →‎Through Silicon Via (TSV) etch (DSEiii): updates, note on wax mounting Tag: Visual edit
• 01:1501:15, 12 September 2024 diff hist −1‎ m Template:Announcements ‎No edit summary
• 01:1501:15, 12 September 2024 diff hist −1‎ m Template:Announcements ‎No edit summary
• 01:1401:14, 12 September 2024 diff hist −1‎ m Template:Announcements ‎No edit summary
• 01:1401:14, 12 September 2024 diff hist −938‎ Template:Announcements ‎ many updates

7 September 2024

• 03:4803:48, 7 September 2024 diff hist −86‎ Template:Announcements ‎ IBD up
• 01:1401:14, 7 September 2024 diff hist +460‎ Template:Announcements ‎ asml laser failing

6 September 2024

• 19:1319:13, 6 September 2024 diff hist −262‎ Template:Announcements ‎ lab up, MLA update

5 September 2024

• 22:5422:54, 5 September 2024 diff hist +6,389‎ N Mask Making Guidelines for Contact Aligners ‎ added first layer alignment example image Tag: Visual edit
• 22:5122:51, 5 September 2024 diff hist +41‎ N File:Contact Layer 1 alignment example v1.png ‎No edit summary current
• 21:4821:48, 5 September 2024 diff hist +312‎ Suss Aligners (SUSS MJB-3) ‎ links to CAD files/help Tag: Visual edit
• 21:4721:47, 5 September 2024 diff hist +453‎ Contact Aligner (SUSS MA-6) ‎ links to CAD file info Tag: Visual edit
• 21:4321:43, 5 September 2024 diff hist +233‎ Suss Aligners (SUSS MJB-3) ‎ →‎Detailed Specifications: linked to mask making guidelines for contact Tag: Visual edit
• 21:4121:41, 5 September 2024 diff hist +23‎ m Photomask Ordering Procedure for UCSB Users ‎No edit summary current Tag: Visual edit
• 21:4121:41, 5 September 2024 diff hist +170‎ Photomask Ordering Procedure for UCSB Users ‎ mentioned plate size and CD Tag: Visual edit
• 18:5118:51, 5 September 2024 diff hist +22‎ Template:Announcements ‎ mla down
• 16:2716:27, 5 September 2024 diff hist +311‎ Template:Announcements ‎ lab closure house vacuum

4 September 2024

• 00:2700:27, 4 September 2024 diff hist +31‎ Wafer Cleaver Recipes (LSD-155LT) ‎ added foongs' credit current Tag: Visual edit
• 00:2400:24, 4 September 2024 diff hist +128‎ Automated Wafer Cleaver (Loomis LSD-155LT) ‎ →‎Recipes: link to Mechanical_Polisher_(Allied) current Tag: Visual edit

3 September 2024

• 18:0518:05, 3 September 2024 diff hist +196‎ Lithography Recipes ‎ →‎Recipes Table (S-Cubed Flexi): explain DSK 185C/220C usage Tag: Visual edit
• 18:0318:03, 3 September 2024 diff hist +350‎ Automated Coat/Develop System (S-Cubed Flexi) ‎ →‎Detailed Specifications: linked to PR's, current Tag: Visual edit

31 August 2024

• 01:1801:18, 31 August 2024 diff hist 0‎ File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf ‎ John d uploaded a new version of File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf current

30 August 2024

• 22:1922:19, 30 August 2024 diff hist 0‎ Lithography Recipes ‎ →‎Chemicals Stocked + Datasheets: corrected Photo-BCB nummber Tag: Visual edit

28 August 2024

• 23:4023:40, 28 August 2024 diff hist +243‎ Template:Announcements ‎ MLA down
• 23:1223:12, 28 August 2024 diff hist +2,690‎ Stepper Mask-Making Guidelines (Generic) ‎ added Definitions Tag: Visual edit

27 August 2024

• 21:2521:25, 27 August 2024 diff hist −2‎ Template:Announcements ‎No edit summary
• 21:2421:24, 27 August 2024 diff hist +681‎ Template:Announcements ‎ eBeam 2 update
• 19:3319:33, 27 August 2024 diff hist +77‎ PECVD 2 (Advanced Vacuum) ‎ →‎About: alternating LS-SiN dep Tag: Visual edit