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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 04:35, 23 October 2024 John d talk contribs created page Lithography Calibration - Analyzing a Focus-Exposure Matrix (initial version) Tag: Visual edit
- 23:17, 22 October 2024 John d talk contribs created page File:MLA150 Alignment versus Wafer Location v1.jpg
- 23:17, 22 October 2024 John d talk contribs uploaded File:MLA150 Alignment versus Wafer Location v1.jpg
- 21:03, 8 October 2024 Noahdutra talk contribs created page File:Cal DSE Ar+ER.png (DSE STD_Bosch_Si etch AR/ER dependence)
- 21:03, 8 October 2024 Noahdutra talk contribs uploaded File:Cal DSE Ar+ER.png (DSE STD_Bosch_Si etch AR/ER dependence)
- 20:44, 8 October 2024 Noahdutra talk contribs created page File:Copy of 22 013 (1).jpg (STD_Bosch_Si example 8/26/24)
- 20:44, 8 October 2024 Noahdutra talk contribs uploaded File:Copy of 22 013 (1).jpg (STD_Bosch_Si example 8/26/24)
- 20:42, 8 October 2024 Noahdutra talk contribs created page File:30D 003.jpg (STD_Bosch_Si etch picture)
- 20:42, 8 October 2024 Noahdutra talk contribs uploaded File:30D 003.jpg (STD_Bosch_Si etch picture)
- 20:37, 8 October 2024 Noahdutra talk contribs created page File:DSE plot.png (Calibration plot for DSE)
- 20:37, 8 October 2024 Noahdutra talk contribs uploaded File:DSE plot.png (Calibration plot for DSE)
- 20:32, 8 October 2024 Noahdutra talk contribs created page File:Cal vs Legacy DSE.png (Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.)
- 20:32, 8 October 2024 Noahdutra talk contribs uploaded File:Cal vs Legacy DSE.png (Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.)
- 03:23, 8 October 2024 John d talk contribs created page File:GCA Autostep 200 training vid title screen.png
- 03:23, 8 October 2024 John d talk contribs uploaded File:GCA Autostep 200 training vid title screen.png
- 16:23, 30 September 2024 Noahdutra talk contribs created page File:PRStrip 019 (1).jpg (Si Etch FICP 9/19/24)
- 16:23, 30 September 2024 Noahdutra talk contribs uploaded File:PRStrip 019 (1).jpg (Si Etch FICP 9/19/24)
- 16:15, 30 September 2024 Noahdutra talk contribs created page File:PRStrip 022 (1).jpg
- 16:15, 30 September 2024 Noahdutra talk contribs uploaded File:PRStrip 022 (1).jpg
- 21:56, 27 September 2024 John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx (Rev v2024-09-27 - unlocked PI Phone number.)
- 17:54, 24 September 2024 Sawyer l talk contribs created page File:Recipe Importing New Software.pdf
- 17:54, 24 September 2024 Sawyer l talk contribs uploaded File:Recipe Importing New Software.pdf
- 18:49, 17 September 2024 John d talk contribs deleted page File:ASML On Wafer Mark.gds (vendor request to remove this file from public viewing)
- 00:19, 17 September 2024 John d talk contribs created page File:Inverted Contact-AlignMarks with Vernier.png
- 00:19, 17 September 2024 John d talk contribs uploaded File:Inverted Contact-AlignMarks with Vernier.png
- 20:32, 13 September 2024 Noahdutra talk contribs created page File:FICP-Si.png (Fluorine ICP Si Etch Control Chart)
- 20:32, 13 September 2024 Noahdutra talk contribs uploaded File:FICP-Si.png (Fluorine ICP Si Etch Control Chart)
- 22:54, 5 September 2024 John d talk contribs created page Mask Making Guidelines for Contact Aligners (added first layer alignment example image) Tag: Visual edit
- 22:51, 5 September 2024 John d talk contribs created page File:Contact Layer 1 alignment example v1.png
- 22:51, 5 September 2024 John d talk contribs uploaded File:Contact Layer 1 alignment example v1.png
- 01:18, 31 August 2024 John d talk contribs uploaded a new version of File:Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf (added terminology slide)
- 23:36, 22 August 2024 John d talk contribs created page File:AZ5214 negative process schematic.png
- 23:36, 22 August 2024 John d talk contribs uploaded File:AZ5214 negative process schematic.png
- 17:12, 21 August 2024 John d talk contribs created page AZ5214 - Basic Process (Created page with "AZ5214 is a positive PR to start. If you expose and develop, then the exposed areas develop out like a typical positive PR. File:AZ5214 Fabublox Positive PR schematic.png|n...") Tag: Visual edit
- 16:59, 21 August 2024 John d talk contribs created page File:AZ5214 Fabublox negative schematic.png
- 16:59, 21 August 2024 John d talk contribs uploaded File:AZ5214 Fabublox negative schematic.png
- 16:57, 21 August 2024 John d talk contribs created page File:AZ5214 Fabublox Positive PR schematic.png
- 16:57, 21 August 2024 John d talk contribs uploaded File:AZ5214 Fabublox Positive PR schematic.png
- 20:13, 19 August 2024 John d talk contribs deleted page File:Profim3D System Photo.png (tool removed)
- 00:23, 15 August 2024 John d talk contribs created page User:Ffoong (redirect to staff page) Tags: New redirect Visual edit: Switched
- 00:20, 15 August 2024 John d talk contribs created page Gopikrishnan G M (initial page)
- 00:14, 15 August 2024 John d talk contribs created page User:Noahdutra (redirect page) Tags: New redirect Visual edit: Switched
- 00:12, 15 August 2024 John d talk contribs created page Noah Dutra (initial page) Tag: Visual edit: Switched
- 23:33, 14 August 2024 John d talk contribs created page Process Group Interns (first rev of interns table with alumni) Tag: Visual edit
- 20:18, 14 August 2024 John d talk contribs deleted page News Feed (Moved data to another page: content was: "<startfeed /> <!-- Description of the RSS feed --> News from the U.C. Santa Barbara Nanofabrication Facility <!-- Each new news item should be inserted at the TOP of this list, with level 2 heading (==), and finish with user signature (four tildes `~~~~`) --> ==NSF-ATE Award for SBCC and UCSB== UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build an associa...", and the only contributor was "[[Special:Contributions/John d|John d...)
- 23:04, 6 August 2024 John d talk contribs created page Silicon Deep Etcher (Plasma-Therm SLR) (ICP from dry etch recipes)
- 23:02, 6 August 2024 John d talk contribs deleted page Si Deep RIE (PlasmaTherm/Bosch Etch) (content was: "#REDIRECT Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)", and the only contributor was "John d" (talk))
- 22:40, 6 August 2024 John d talk contribs deleted page Nano-Imprint Tool (Nanonex NX2000) (content was: "#REDIRECT Nano-Imprint (Nanonex NX2000)", and the only contributor was "Zwarburg" (talk))
- 22:33, 6 August 2024 John d talk contribs created page Decomissioned Tools (listed some old toold) Tag: Visual edit
- 01:05, 4 August 2024 John d talk contribs created page Processing - How Do I…? (initial holders) Tag: Visual edit
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