User contributions for John d

7 November 2024

• 02:0002:00, 7 November 2024 diff hist +226‎ m Oxford ICP Etcher (PlasmaPro 100 Cobra) ‎ →‎Process Control Data Tag: Visual edit: Switched
• 02:0002:00, 7 November 2024 diff hist +1,227‎ Oxford ICP Etcher (PlasmaPro 100 Cobra) ‎ link to PC data Tag: Visual edit: Switched
• 00:4500:45, 7 November 2024 diff hist −704‎ Template:Announcements ‎ deleted ASML update

6 November 2024

• 21:5121:51, 6 November 2024 diff hist +1,325‎ DSEIII (PlasmaTherm/Deep Silicon Etcher) ‎ pasted NoahD's example SEM's current Tag: Visual edit: Switched
• 21:4721:47, 6 November 2024 diff hist +1,010‎ Process Group - Process Control Data ‎ →‎Etching (Process Control Data): pasted process control data link/image from DSE recipes page Tag: Visual edit
• 21:4221:42, 6 November 2024 diff hist +242‎ m Process Group - Process Control Data ‎ →‎PlasmaTherm SLR Fluorine Etcher: subscripts in chemicals Tag: Visual edit
• 21:3921:39, 6 November 2024 diff hist +44‎ m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data current Tag: Visual edit
• 21:3921:39, 6 November 2024 diff hist +11‎ m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data Tag: Visual edit
• 21:3921:39, 6 November 2024 diff hist −35‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data: pasted PC images+links, cleaned up Tag: Visual edit
• 21:3821:38, 6 November 2024 diff hist +351‎ Process Group - Process Control Data ‎ describe purpose of 2 diff EtchCals Tag: Visual edit
• 21:3021:30, 6 November 2024 diff hist +30‎ Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) ‎ →‎Process Control Data: pasted PC images/links from PC page
• 21:2621:26, 6 November 2024 diff hist 0‎ File:ICP2 Process Control Data Example.jpg ‎ John d uploaded a new version of File:ICP2 Process Control Data Example.jpg current
• 21:2221:22, 6 November 2024 diff hist +366‎ ICP Etch 2 (Panasonic E626I) ‎ →‎Recipes: added Process Control Header level 1 & images from PC page current Tag: Visual edit: Switched
• 21:1421:14, 6 November 2024 diff hist −5‎ m Process Group Interns ‎No edit summary Tag: Visual edit
• 21:1221:12, 6 November 2024 diff hist +71‎ m Process Group Internships ‎No edit summary Tag: Visual edit
• 21:0921:09, 6 November 2024 diff hist +7‎ Process Group Internships ‎ Intenrhsip Goals heading Tag: Visual edit
• 21:0021:00, 6 November 2024 diff hist +5,450‎ N Process Group Internships ‎ internship goals, skillss learns and detailed 2-phase approach Tag: Visual edit
• 16:5416:54, 6 November 2024 diff hist +444‎ Lithography Recipes ‎ →‎General Photolithography Techniques: link to FEM page Tag: Visual edit

5 November 2024

• 23:5423:54, 5 November 2024 diff hist 0‎ File:FEM example analysis GMoody Group 2024-11-04 v2.png ‎ John d uploaded a new version of File:FEM example analysis GMoody Group 2024-11-04 v2.png current
• 23:5223:52, 5 November 2024 diff hist +465‎ Lithography Calibration - Analyzing a Focus-Exposure Matrix ‎ uploaded Moody group FEM example current Tag: Visual edit
• 23:4723:47, 5 November 2024 diff hist +73‎ N File:FEM example analysis GMoody Group 2024-11-04 v2.png ‎No edit summary

4 November 2024

• 22:5122:51, 4 November 2024 diff hist +25‎ Services ‎ →‎Fabrication Services by NanoFab Staff: clarify charged rates Tag: Visual edit

2 November 2024

• 17:4817:48, 2 November 2024 diff hist +15‎ m SEM 1 (JEOL IT800SHL) ‎ →‎Operating Procedures current Tag: Visual edit
• 17:3817:38, 2 November 2024 diff hist +46‎ Hummer SEM Sample Coater - Techniques to reduce charging in SEMs ‎No edit summary current Tag: Visual edit
• 17:3517:35, 2 November 2024 diff hist +353‎ JEOL IT800SHL - Reduced Charging Imaging Modes ‎ AUPd help current Tag: Visual edit
• 17:3017:30, 2 November 2024 diff hist +2,619‎ N JEOL IT800SHL - Reduced Charging Imaging Modes ‎ reduced charging by Demis,f rom JEOL training by Jen 2024-09 Tag: Visual edit
• 16:4116:41, 2 November 2024 diff hist +195‎ SEM 1 (JEOL IT800SHL) ‎ →‎Operating Procedures: link to reduced cahrging imaging modes page Tag: Visual edit

28 October 2024

• 21:3821:38, 28 October 2024 diff hist +67‎ Probe Station: I-V Curves with Keithley 2400 and Python Script ‎ added computer login current Tag: Visual edit

27 October 2024

• 17:2817:28, 27 October 2024 diff hist +293‎ MLA150 - Troubleshooting ‎ →‎Analyzing misalignment: further explain how to draw arrows current Tag: Visual edit

26 October 2024

• 19:3919:39, 26 October 2024 diff hist −16‎ m Maskless Aligner (Heidelberg MLA150) ‎ →‎Recipes Tag: Visual edit
• 19:3819:38, 26 October 2024 diff hist +21‎ N MLA150 - Focus-Exposure Matrix ("Series" mode) ‎ to be added current Tag: Visual edit
• 19:3619:36, 26 October 2024 diff hist +112‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Documentation: link to new MLA150 FEM page Tag: Visual edit
• 19:3519:35, 26 October 2024 diff hist +139‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Recipes: link to FEM analysis section, mention "Series" for FEM Tag: Visual edit
• 19:3219:32, 26 October 2024 diff hist +723‎ Stepper 1 (GCA 6300) ‎ added Recipes section with link to recipes, FEM analysis etc current Tag: Visual edit
• 19:3019:30, 26 October 2024 diff hist +728‎ Stepper 2 (AutoStep 200) ‎ link to FEM analysis pages, Stepper 2 recipes page current Tag: Visual edit
• 19:2619:26, 26 October 2024 diff hist +339‎ Stepper 3 (ASML DUV) ‎ →‎Recipes: added FEM analysis link Tag: Visual edit
• 19:1419:14, 26 October 2024 diff hist +22‎ m UCSB NetID Login Troubleshooting ‎ →‎ASML Documentation - request access current Tag: Visual edit
• 19:1119:11, 26 October 2024 diff hist +2,994‎ N UCSB NetID Login Troubleshooting ‎ made "Wrogn google account" and "gdrive wont allow correct account" sections Tag: Visual edit
• 19:0219:02, 26 October 2024 diff hist +93‎ N File:UCSB NetID - correct google account v1.png ‎No edit summary current
• 18:5018:50, 26 October 2024 diff hist +42‎ N File:UCSB NetID wrong google account access denied v1.png ‎No edit summary current
• 18:4618:46, 26 October 2024 diff hist +64‎ N File:UCSB NetID - wrong login access denied.png ‎No edit summary current
• 18:4218:42, 26 October 2024 diff hist +152‎ Stepper 3 (ASML DUV) ‎ →‎Operating Procedures: moved login issue to new page. Tag: Visual edit

24 October 2024

• 23:3223:32, 24 October 2024 diff hist −17‎ Surface Analysis (KLA/Tencor Surfscan) ‎ fixed tool2 mfg
• 22:0122:01, 24 October 2024 diff hist −21‎ Thermal Processing Recipes ‎ moved calculation times to "thermal ox" recipes, renamed "thermal ox recipes" to just "Ox recipes (tystar 8300)" current Tag: Visual edit
• 22:0022:00, 24 October 2024 diff hist −632‎ Tube Furnace (Tystar 8300) ‎ →‎Recipes: moved recipes to Tystar Recipes page, linked to them here. current Tag: Visual edit
• 21:5821:58, 24 October 2024 diff hist +1,506‎ Thermal Processing Recipes ‎ →‎Thermal Oxidation Recipes: process limits, recipes paosted from tool page Tag: Visual edit
• 18:3918:39, 24 October 2024 diff hist +219‎ Tube Furnace (Tystar 8300) ‎ →‎Recipes: updated temperature/time limits Tag: Visual edit
• 17:4817:48, 24 October 2024 diff hist +299‎ ICP Etching Recipes ‎ →‎Process Control Data (DSEiii): added more example images, moved Recipe name & info into "Std Bosch Recipe" section, along with selectivieis etc. Left Process Control info in this section. Tag: Visual edit
• 17:4017:40, 24 October 2024 diff hist +44‎ N File:Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg ‎No edit summary current
• 17:1817:18, 24 October 2024 diff hist +363‎ Plasma Activation (EVG 810) ‎ →‎Examples: added more description of the example process current Tag: Visual edit