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  1. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (1 revision)
  2. UV Ozone Quick Start‏‎ (1 revision)
  3. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (1 revision)
  4. Unaxis SOP 3-12-2020.docx‏‎ (1 revision)
  5. Unaxis Test Recipe Page‏‎ (1 revision)
  6. Filmetrics F50 - Operating Procedure‏‎ (1 revision)
  7. PECVD1-SiN-standard recipe.pdf‏‎ (1 revision)
  8. Publications - 2013-2014‏‎ (1 revision)
  9. Stepper 1 (GCA6300) How to select proper chuck‏‎ (1 revision)
  10. ASML Stepper 3 - Job Creator‏‎ (1 revision)
  11. SiN 100C Table-2019‏‎ (1 revision)
  12. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  13. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  14. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  15. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  16. Sputter 5‏‎ (1 revision)
  17. Flood Exposure Recipes‏‎ (1 revision)
  18. Stepper 1 (GCA 6300) Available chucks‏‎ (1 revision)
  19. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (1 revision)
  20. Equipment Group - Video Training Procedures‏‎ (1 revision)
  21. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (1 revision)
  22. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (1 revision)
  23. Plasma Clean (Gasonics 2000)‏‎ (1 revision)
  24. InP Etch test -details‏‎ (1 revision)
  25. TEST PAGE‏‎ (1 revision)
  26. YES Recipe Screenshots: STD-O2‏‎ (1 revision)
  27. Video Training - Introduction (Internal)‏‎ (1 revision)
  28. InP Etch Test-in details‏‎ (1 revision)
  29. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (1 revision)
  30. Photomask Ordering Procedure for UCSB Users‏‎ (1 revision)
  31. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (1 revision)
  32. Operating Instructions‏‎ (1 revision)
  33. Older Publications‏‎ (1 revision)
  34. PECVD.docx‏‎ (1 revision)
  35. PECVD1 Operating Instructions.pdf‏‎ (1 revision)
  36. LegacyTable‏‎ (1 revision)
  37. YES Recipe Screenshots: STD-N2-O2‏‎ (1 revision)
  38. Advanced PECVD Recipes‏‎ (1 revision)
  39. Wafer coating procedure‏‎ (1 revision)
  40. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (1 revision)
  41. Wafer Cleaver Recipes (LSD-155LT)‏‎ (1 revision)
  42. STD SiO2 recipe‏‎ (1 revision)
  43. Lab Rules backup‏‎ (1 revision)
  44. UCSBTEST1Gain4.jpg‏‎ (1 revision)
  45. MA6 Backside Alignment - Allowed Mark Locations‏‎ (1 revision)
  46. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (1 revision)
  47. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  48. THz Physics Presentations‏‎ (2 revisions)
  49. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  50. E-Beam Lithography Recipes‏‎ (2 revisions)

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