Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
6 August 2024
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17:06 | Template:Announcements 3 changes history -885 [Mehalana v; John d (2×)] | |||
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17:06 (cur | prev) +212 John d talk contribs Suss bonder update | ||||
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15:52 (cur | prev) -1,066 John d talk contribs multiple updates | ||||
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13:34 (cur | prev) -31 Mehalana v talk contribs | ||||
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16:05 | ICP Etching Recipes 2 changes history -2,992 [John d (2×)] | |||
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16:05 (cur | prev) -1,398 John d talk contribs moved Si deep RIE to decomisioned tools Tag: Visual edit | ||||
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15:41 (cur | prev) -1,594 John d talk contribs moved Unaxis Etch --> Decomm'd tools page Tag: Visual edit | ||||
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N 16:04 | Silicon Deep Etcher (Plasma-Therm SLR) 2 changes history +1,310 [John d (2×)] | |||
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16:04 (cur | prev) -86 John d talk contribs | ||||
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16:04 (cur | prev) +1,396 John d talk contribs ICP from dry etch recipes | |||
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N 16:03 | Decomissioned Tools 3 changes history +746 [John d (3×)] | |||
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16:03 (cur | prev) +44 John d talk contribs →Dry Etching Tag: Visual edit | ||||
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15:36 (cur | prev) +116 John d talk contribs note to web admins Tag: Visual edit | ||||
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15:33 (cur | prev) +586 John d talk contribs listed some old toold Tag: Visual edit | |||
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16:02 | (Deletion log) [John d (2×)] | |||
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16:02 John d talk contribs deleted page Si Deep RIE (PlasmaTherm/Bosch Etch) (content was: "#REDIRECT Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP)", and the only contributor was "John d" (talk)) | ||||
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15:40 John d talk contribs deleted page Nano-Imprint Tool (Nanonex NX2000) (content was: "#REDIRECT Nano-Imprint (Nanonex NX2000)", and the only contributor was "Zwarburg" (talk)) | ||||
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16:00 | Template:News 2 changes history +372 [John d (2×)] | |||
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16:00 (cur | prev) +16 John d talk contribs rie3 removed | ||||
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15:58 (cur | prev) +356 John d talk contribs RIE#3 removed | ||||
| 15:44 | Vacuum Deposition Recipes diffhist +72 John d talk contribs linked to ranking table at bottom | ||||
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15:41 | Dry Etching Recipes 2 changes history -1,551 [John d (2×)] | |||
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15:41 (cur | prev) -1,092 John d talk contribs deleted Unaxis Etch column Tag: Visual edit | ||||
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15:37 (cur | prev) -459 John d talk contribs deleted RIE3 Tag: Visual edit | ||||
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15:38 | ICP-Etch (Unaxis VLR) 2 changes history +1,575 [John d (2×)] | |||
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15:38 (cur | prev) +1,397 John d talk contribs pasted recipes section | ||||
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13:29 (cur | prev) +178 John d talk contribs note that tool is decommissioned, point to Oxforrd Etcher Tag: Visual edit | ||||
| 15:37 | RIE Etching Recipes diffhist -390 John d talk contribs moved RIE3 to Decomm'd tools page | ||||
| 15:35 | RIE 3 (MRC) diffhist +381 John d talk contribs pasted recipes | ||||
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15:28 | Tool List 2 changes history +97 [John d (2×)] | |||
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15:28 (cur | prev) +142 John d talk contribs Made a "Decomissioned tools" section Tag: Visual edit | ||||
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13:26 (cur | prev) -45 John d talk contribs →ICP-RIE: removed Unaxis Etch, renamed Fluorine Etcher Tag: Visual edit | ||||
5 August 2024
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10:16 | Vacuum Deposition Recipes 5 changes history +3,717 [Noahdutra (5×)] | |||
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10:16 (cur | prev) +2,866 Noahdutra talk contribs added Ebeams rankings Tag: Visual edit | ||||
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09:55 (cur | prev) -30 Noahdutra talk contribs Tag: Visual edit | ||||
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09:54 (cur | prev) -47 Noahdutra talk contribs Tag: Visual edit | ||||
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09:53 (cur | prev) +16 Noahdutra talk contribs Tag: Visual edit | ||||
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09:52 (cur | prev) +912 Noahdutra talk contribs added process ranking table Tag: Visual edit | ||||
3 August 2024
| N 18:05 | Processing - How Do I…? diffhist +538 John d talk contribs initial holders | ||||
1 August 2024
| 17:21 | Hummer SEM Sample Coater - Techniques to reduce charging in SEMs diffhist +272 John d talk contribs link to Hummer tool page | ||||
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17:17 | SEM Sample Coater (Hummer) 2 changes history +38 [John d (2×)] | |||
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17:17 (cur | prev) +1 John d talk contribs →Operating Procedures: fixed bullet points, listed approx film thickness Tag: Visual edit | ||||
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17:17 (cur | prev) +37 John d talk contribs →About Tag: Visual edit | ||||
| 17:16 | SEM 1 (JEOL IT800SHL) diffhist +70 John d talk contribs →Operating Procedures: link to hummer techniques | ||||
31 July 2024
| 18:52 | Template:Announcements diffhist +372 Mehalana v talk contribs | ||||
| 17:46 | Lift-Off with DUV Imaging + PMGI Underlayer diffhist +148 John d talk contribs →Suggested Process for Liftoff: added N2 dry step | ||||
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14:13 | Vacuum Deposition Recipes 6 changes history -522 [Ffoong (6×)] | |||
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14:13 (cur | prev) -20 Ffoong talk contribs Correct the links for UNAXIS PECVD Tag: Visual edit | ||||
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14:12 (cur | prev) -10 Ffoong talk contribs Tag: Visual edit | ||||
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14:11 (cur | prev) +4 Ffoong talk contribs Add R level for UNAXIS PECVD Tag: Visual edit | ||||
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13:39 (cur | prev) -20 Ffoong talk contribs R5 on IBD Al2O3 Tag: Visual edit | ||||
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13:38 (cur | prev) -504 Ffoong talk contribs Added R levels to IBD dep Tag: Visual edit | ||||
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11:00 (cur | prev) +28 Ffoong talk contribs add R levels for ALD system Tag: Visual edit | ||||
30 July 2024
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15:34 | Vacuum Deposition Recipes 3 changes history +34 [Ffoong (3×)] | |||
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15:34 (cur | prev) +15 Ffoong talk contribs change PECVD1 R levels and add links Tag: Visual edit | ||||
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15:18 (cur | prev) +18 Ffoong talk contribs Changed PECVD2 levels and added proper internal links Tag: Visual edit | ||||
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15:13 (cur | prev) +1 Ffoong talk contribs Changed Si in PECVD2 to R3 Tag: Visual edit | ||||
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15:04 | Dry Etching Recipes 5 changes history +98 [Ffoong; Noahdutra (4×)] | |||
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15:04 (cur | prev) -1 Noahdutra talk contribs changed "Process Control Data" link at the top so it didn't have an "f" at the front of it. Tag: Visual edit | ||||
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14:33 (cur | prev) 0 Ffoong talk contribs changed Al2O3 etch from R4 to R3 Tag: Visual edit | ||||
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10:39 (cur | prev) +85 Noahdutra talk contribs corrected SiC for ICP2 so that it is R1 instead of R4, which was a mistake to ever put it at R4. Also added a link to GaAs etch on ICP2 Tag: Visual edit | ||||
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10:36 (cur | prev) +83 Noahdutra talk contribs added link to Al etch Tag: Visual edit | ||||
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10:35 (cur | prev) -69 Noahdutra talk contribs Did process rankings for ICP2, I also deleted a redundant row for Ru, there were two Ru rows Tag: Visual edit | ||||
| 09:02 | Laser Scanning Confocal M-scope (Olympus LEXT) diffhist +6 Hopkins a talk contribs →Offline software | ||||