User contributions for John d
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4 January 2023
- 00:3800:38, 4 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
3 January 2023
- 22:3222:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 22:2922:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 22:2622:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 22:2522:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 22:2322:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 22:2222:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
31 December 2022
- 18:0618:06, 31 December 2022 diff hist −3 m Template:News →Raith Velion: FIB/SEM Installation
- 18:0518:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
22 December 2022
- 15:3615:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 04:1504:15, 22 December 2022 diff hist −393 Template:Announcements nanofab holiday closure
21 December 2022
- 17:5017:50, 21 December 2022 diff hist −12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 17:4917:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 17:4817:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
19 December 2022
- 15:3415:34, 19 December 2022 diff hist −8 m Dry Etching Recipes No edit summary Tag: Visual edit
- 15:3315:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
16 December 2022
- 07:2307:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched
15 December 2022
- 22:5822:58, 15 December 2022 diff hist +112 Stepper Recipes →DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit
- 21:3921:39, 15 December 2022 diff hist +23 Tool List →Thermal Evaporation: Added EBeam 5 (plasys) link to new page Tag: Visual edit
14 December 2022
- 22:2522:25, 14 December 2022 diff hist −66 Template:Announcements asml up
- 21:4721:47, 14 December 2022 diff hist +101 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): note about DSK@220C equivalence to DUV42P Tag: Visual edit
13 December 2022
- 14:5714:57, 13 December 2022 diff hist −1 Wafer Cleaver (PELCO Flip-Scribe) changed room --> ESB 1111 current Tag: Visual edit
- 14:5314:53, 13 December 2022 diff hist −48 Template:Announcements ASML Down: laser fail
12 December 2022
- 18:1718:17, 12 December 2022 diff hist +126 Microscopes →Microscope Training Guide: basic list of topics Tag: Visual edit
- 04:5304:53, 12 December 2022 diff hist −1 m Template:Announcements No edit summary
- 04:5204:52, 12 December 2022 diff hist +5 m Template:Announcements No edit summary
- 04:4904:49, 12 December 2022 diff hist +17 Template:Announcements asml laser pm update
10 December 2022
- 07:3607:36, 10 December 2022 diff hist −899 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit
- 07:2807:28, 10 December 2022 diff hist +114 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned allowed folder names Tag: Visual edit
- 07:2307:23, 10 December 2022 diff hist −3 m Autostep 200 Mask Making Guidance →CAD Files Tag: Visual edit
9 December 2022
- 15:1715:17, 9 December 2022 diff hist +33 m Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): spelling correction current Tag: Visual edit
6 December 2022
- 23:5523:55, 6 December 2022 diff hist +13 Template:Announcements EB2 heater update
- 23:5223:52, 6 December 2022 diff hist −550 Process Group - Remote Fabrication Jobs updated to Trello current Tag: Visual edit
- 20:4920:49, 6 December 2022 diff hist +9 m Tube Furnace (Tystar 8300) →Gases Available Tag: Visual edit
- 20:4720:47, 6 December 2022 diff hist −4 m Rapid Thermal Processor (SSI Solaris 150) →Detailed Specificiations: bullets Tag: Visual edit
- 18:3418:34, 6 December 2022 diff hist +181 N File:UCSB ASML DUV Stepper - Programming Worksheet.pptx Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. current
- 18:1918:19, 6 December 2022 diff hist +165 Stepper 3 (ASML DUV) →Design Tools: note about JobCreator outage Tag: Visual edit
3 December 2022
- 00:1600:16, 3 December 2022 diff hist +745 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
- 00:0900:09, 3 December 2022 diff hist +25 Dry Etching Recipes fixed FL-ICP: Si link Tag: Visual edit
1 December 2022
- 19:2319:23, 1 December 2022 diff hist +20 Direct-Write Lithography Recipes converted File links to Media links (open PDF directly) Tag: Visual edit
- 19:2019:20, 1 December 2022 diff hist 0 Direct-Write Lithography Recipes testing File-->Media link
- 19:2019:20, 1 December 2022 diff hist +443 Contact Alignment Recipes links to all PR datasheets Tag: Visual edit
- 19:1619:16, 1 December 2022 diff hist +17 Direct-Write Lithography Recipes linkto nLOF2020 Tag: Visual edit
- 19:1419:14, 1 December 2022 diff hist 0 File:AXP4000pb-Datasheet.pdf John d uploaded a new version of File:AXP4000pb-Datasheet.pdf current
- 19:1019:10, 1 December 2022 diff hist −42 Contact Alignment Recipes added some of the PR datasheet links Tag: Visual edit
30 November 2022
- 07:1207:12, 30 November 2022 diff hist +323 MLA150 - Design Guidelines →Greyscale Lithography: clarified levels and linked to GDSpy Tag: Visual edit
29 November 2022
- 00:4700:47, 29 November 2022 diff hist +206 Template:Announcements ASML Dec 12th Laser PM
28 November 2022
- 17:5417:54, 28 November 2022 diff hist +111 RIE 5 (PlasmaTherm) →Detailed Specifications: added laser monitor Tag: Visual edit
23 November 2022
- 23:2923:29, 23 November 2022 diff hist +985 Maskless Aligner (Heidelberg MLA150) →Video Trainings: added old video training back Tag: Visual edit
- 18:4118:41, 23 November 2022 diff hist +682 Wet Benches →Plating Bench: added basic info of what is/isn't provided. Tag: Visual edit