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21:26, 28 September 2023
RIE 2 SOP Rev D.pdf
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file
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1.11 MB
Sawyer l
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talk
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contribs
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2
18:02, 27 September 2023
EDS SOP.pdf
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file
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5.18 MB
Hopkins a
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talk
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contribs
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1
15:21, 26 September 2023
JEOL IT800SHL Operating Procedure.docx
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file
)
5.63 MB
Hopkins a
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talk
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contribs
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1
15:15, 26 September 2023
Loomis Scriber SOP.docx
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file
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4.98 MB
Hopkins a
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talk
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contribs
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1
14:28, 20 September 2023
Suss Bonder Recipe Guidelines.docx
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file
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17 KB
Hopkins a
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talk
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contribs
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Bonder Recipe Guidelines
1
14:21, 20 September 2023
Bonder Pressure Rules Vis Aid.docx
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file
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252 KB
Hopkins a
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talk
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contribs
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Bonder Pressure Rules Visual Aid
1
23:46, 18 September 2023
EB1 9-18-23.jpg
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file
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1.82 MB
Barreraz
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talk
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contribs
)
Post automation upgrade
1
16:27, 18 September 2023
EB-1 operation instructions 9-18-23.pdf
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file
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114 KB
Barreraz
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talk
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contribs
)
1
16:24, 18 September 2023
EB-1 Operation Instructions.pdf
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file
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114 KB
Barreraz
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talk
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contribs
)
2
19:50, 13 September 2023
ASML IQC Focus Mean Correction screenshot.jpg
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file
)
165 KB
John d
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talk
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contribs
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Cleaner straightened photo
2
18:09, 13 September 2023
ASML Stepper 3 - HELP button error log screenshot.png
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file
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54 KB
John d
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talk
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contribs
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1
15:23, 13 September 2023
Ultron 1042R Film specs.pdf
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file
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67 KB
Sawyer l
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talk
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contribs
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1
16:16, 29 August 2023
UV Ozone SOP Rev A.pdf
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file
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709 KB
Sawyer l
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talk
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contribs
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2
18:31, 25 August 2023
EB2 SOP Rev H.pdf
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file
)
2.88 MB
Sawyer l
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talk
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contribs
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1
17:52, 22 August 2023
ICP -1 Standard Etch Recipes.pdf
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file
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474 KB
Sawyer l
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talk
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contribs
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2
17:59, 16 August 2023
IMG 0554.jpg
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file
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2.85 MB
Hopkins a
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talk
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contribs
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1
13:32, 3 August 2023
ADT SOP Rev I.pdf
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file
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2.85 MB
Sawyer l
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talk
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contribs
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1
16:33, 2 August 2023
MA-6 SOP Rev D.pdf
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file
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709 KB
Sawyer l
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talk
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contribs
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2
23:49, 18 July 2023
JEOL 7600F UserManual.pdf
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file
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608 KB
John d
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talk
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contribs
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v08.12, from Bill Mitchell
1
15:57, 15 June 2023
RTA AET Operating Instructions.pdf
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file
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496 KB
Millerski w
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talk
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contribs
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Operating Instructions
1
23:31, 9 June 2023
Gas mixture comparison.jpg
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file
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136 KB
Ffoong
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talk
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contribs
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1
23:17, 9 June 2023
Au oxidation by O2-N2 ash.jpg
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file
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124 KB
Ffoong
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talk
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contribs
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1
06:36, 6 June 2023
Surfscan 230113A7G2 after low particles.jpg
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file
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878 KB
John d
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talk
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contribs
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1
06:35, 6 June 2023
Surfscan - 230113A7 Gain4 high particles.jpg
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file
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1.12 MB
John d
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talk
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contribs
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1
16:39, 5 June 2023
PPR 220-7 Etch Rates vs Temperature.jpg
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file
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68 KB
Ffoong
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talk
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contribs
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1
16:34, 5 June 2023
PPR220-7 Etch Rates vs Temperature.jpg
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file
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52 KB
Ffoong
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talk
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contribs
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1
16:28, 5 June 2023
PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp (1).png
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file
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26 KB
Ffoong
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talk
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contribs
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1
16:19, 5 June 2023
PPR220-7 Etch Rates (nm min) vs. Temp(C) Recipe STD O2only 3KW-3min-Temp.png
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file
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20 KB
Ffoong
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talk
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contribs
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1
19:08, 2 June 2023
PECVD1 SiN Stress vs. N2 plot.jpg
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file
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85 KB
John d
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talk
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contribs
)
better formatting, colors axes mathcing markers etc
2
16:36, 26 May 2023
MJB 3 IR Camera SOP Rev B.pdf
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file
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991 KB
Sawyer l
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talk
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contribs
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2
23:30, 18 May 2023
ASML CD Cals - Example Plot.jpg
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file
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32 KB
John d
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talk
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contribs
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1
23:28, 18 May 2023
ASML CD Cals - Example Table.jpg
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file
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100 KB
John d
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talk
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contribs
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1
16:04, 15 May 2023
Mechanical Polisher SOP Rev A.pdf
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file
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192 KB
Millerski w
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talk
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contribs
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1
05:05, 11 May 2023
SEM1 JEOL IT800HSL.jpg
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file
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2.69 MB
John d
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talk
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contribs
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photo of SEM #1, JEOL IT800HSL
1
04:58, 11 May 2023
Amscope Stereoscope Photo.jpg
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file
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2.92 MB
John d
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talk
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contribs
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1
04:51, 11 May 2023
DektakXT.jpg
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file
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1.96 MB
John d
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talk
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contribs
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image of Dektak XT
1
17:34, 10 May 2023
EB2 SOP Rev G.pdf
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file
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2.88 MB
Sawyer l
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talk
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contribs
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1
17:00, 28 April 2023
Vented font screnshot.jpg
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file
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59 KB
John d
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talk
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contribs
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1
16:57, 28 April 2023
Vernier Template v2 screenshot.jpg
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file
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118 KB
John d
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talk
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contribs
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1
06:27, 26 April 2023
IBD Schematic.jpg
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file
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112 KB
John d
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talk
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contribs
)
added numbering for each component
2
21:51, 17 April 2023
Vented font DDJ.gds
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file
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28 KB
John d
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talk
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contribs
)
added "UCSB Nnanofab" in the comments
2
19:00, 11 April 2023
EBeam4 Operating Instructions 4-7-2023.pdf
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file
)
1.91 MB
Barreraz
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talk
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contribs
)
Updated Operating Instructions for EBeam4
1
20:03, 21 March 2023
Surfscan P1 SiN 221208Z5G4 after.jpg
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file
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1.25 MB
John d
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talk
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contribs
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1
19:59, 21 March 2023
Surfscan G4 before example - P1 230317E7G4 before.jpg
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file
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1,014 KB
John d
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talk
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contribs
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1
19:56, 21 March 2023
UCSBTEST1.png
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file
)
6.52 MB
John d
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talk
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contribs
)
Typical Recipe UCSB Gain2 for larger particulates
2
19:55, 21 March 2023
UCSBTEST2 .png
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file
)
6.76 MB
John d
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talk
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contribs
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Typical Surfscan results for UCSB Gain4 for smaller particulates
2
18:52, 21 March 2023
ICP -1 Gas Change N2-He-N2.pdf
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file
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501 KB
Sawyer l
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talk
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contribs
)
2
18:51, 21 March 2023
ICP -1 Gas Change CHF3-Ar.pdf
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file
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498 KB
Sawyer l
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talk
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contribs
)
1
18:50, 21 March 2023
ICP -1 Gas Change CF4-SF6-CF4.pdf
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file
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500 KB
Sawyer l
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talk
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contribs
)
2
17:12, 21 March 2023
EBeam5 Operating Procedures.pdf
(
file
)
291 KB
Barreraz
(
talk
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contribs
)
1
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