User contributions for John d
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26 October 2024
- 18:5018:50, 26 October 2024 diff hist +42 N File:UCSB NetID wrong google account access denied v1.png No edit summary current
- 18:4618:46, 26 October 2024 diff hist +64 N File:UCSB NetID - wrong login access denied.png No edit summary current
- 18:4218:42, 26 October 2024 diff hist +152 Stepper 3 (ASML DUV) →Operating Procedures: moved login issue to new page. Tag: Visual edit
24 October 2024
- 23:3223:32, 24 October 2024 diff hist −17 Surface Analysis (KLA/Tencor Surfscan) fixed tool2 mfg
- 22:0122:01, 24 October 2024 diff hist −21 Thermal Processing Recipes moved calculation times to "thermal ox" recipes, renamed "thermal ox recipes" to just "Ox recipes (tystar 8300)" Tag: Visual edit
- 22:0022:00, 24 October 2024 diff hist −632 Tube Furnace (Tystar 8300) →Recipes: moved recipes to Tystar Recipes page, linked to them here. Tag: Visual edit
- 21:5821:58, 24 October 2024 diff hist +1,506 Thermal Processing Recipes →Thermal Oxidation Recipes: process limits, recipes paosted from tool page Tag: Visual edit
- 18:3918:39, 24 October 2024 diff hist +219 Tube Furnace (Tystar 8300) →Recipes: updated temperature/time limits Tag: Visual edit
- 17:4817:48, 24 October 2024 diff hist +299 ICP Etching Recipes →Process Control Data (DSEiii): added more example images, moved Recipe name & info into "Std Bosch Recipe" section, along with selectivieis etc. Left Process Control info in this section. Tag: Visual edit
- 17:4017:40, 24 October 2024 diff hist +44 N File:Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg No edit summary current
- 17:1817:18, 24 October 2024 diff hist +363 Plasma Activation (EVG 810) →Examples: added more description of the example process current Tag: Visual edit
- 17:1517:15, 24 October 2024 diff hist +411 Plasma Activation (EVG 810) added wafer bond example. Tag: Visual edit
- 17:1217:12, 24 October 2024 diff hist +62 N File:Spontaneous Wafer Bond Glass to Silicon - Demis D John.png No edit summary current
- 16:3416:34, 24 October 2024 diff hist +138 Plasma Activation (EVG 810) note on "no PR" Tag: Visual edit
23 October 2024
- 18:2218:22, 23 October 2024 diff hist +240 Ion Beam Deposition (Veeco NEXUS) →Schematics/Examples: added example DBR spectrum
- 16:5416:54, 23 October 2024 diff hist −59 m Stepper 2 (AutoStep 200) →Video Training Tag: Visual edit
- 16:5316:53, 23 October 2024 diff hist +1 m Stepper 2 (AutoStep 200) →Video Training Tag: Visual edit
- 05:2805:28, 23 October 2024 diff hist +3,383 Processing - How Do I…? →Design of Experiments: DOE exmaple, added Trello and gDrive examples and llinks etc. Tag: Visual edit
- 05:2505:25, 23 October 2024 diff hist +44 N File:Google Drive - Example Job Folder.png No edit summary current
- 05:2205:22, 23 October 2024 diff hist +36 N File:Trello - example job card.png No edit summary current
- 05:2105:21, 23 October 2024 diff hist +37 N File:Trello - Example Job Cards.png No edit summary current
- 04:3704:37, 23 October 2024 diff hist +996 Processing - How Do I…? →Lithography: FEM analysis section Tag: Visual edit
- 04:3504:35, 23 October 2024 diff hist +6,971 N Lithography Calibration - Analyzing a Focus-Exposure Matrix initial version Tag: Visual edit
- 03:3703:37, 23 October 2024 diff hist +180 ASML Stepper 3 Standard Operating Procedure →General process:: ASML: keep focus constant for Fine FEM Tag: Visual edit
- 03:3003:30, 23 October 2024 diff hist −8,307 ASML Stepper 3 Error Recovery, Troubleshooting and Calibration deleted info, instead link to google docs (access restricted) current Tags: Replaced Visual edit
- 03:2303:23, 23 October 2024 diff hist +1,061 Mask Making Guidelines for Contact Aligners added "general process" section Tag: Visual edit
22 October 2024
- 23:5223:52, 22 October 2024 diff hist +468 ICP Etching Recipes →Process Control Data (Oxford ICP Etcher): added GaN etch Tag: Visual edit
- 23:3223:32, 22 October 2024 diff hist +46 m MLA150 - Troubleshooting →Misalignment Tag: Visual edit
- 23:3123:31, 22 October 2024 diff hist +46 MLA150 - Troubleshooting →Aligning to a quarter-wafer/irregular piece: autor Tag: Visual edit
- 23:2923:29, 22 October 2024 diff hist +100 MLA150 - Troubleshooting →Misalignment: added typical value for scaling Tag: Visual edit
- 23:2623:26, 22 October 2024 diff hist +3,314 MLA150 - Troubleshooting addded misalignment section Tag: Visual edit
- 23:1723:17, 22 October 2024 diff hist +22 N File:MLA150 Alignment versus Wafer Location v1.jpg No edit summary current
- 00:3900:39, 22 October 2024 diff hist −370 Template:Announcements deleted eBeam 2
- 00:3900:39, 22 October 2024 diff hist +420 Template:Announcements updated ASML
21 October 2024
- 18:4618:46, 21 October 2024 diff hist +109 Services →Statement of Work: clarify UCSB staff steps Tag: Visual edit
18 October 2024
- 18:5818:58, 18 October 2024 diff hist +65 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Detailed Specifications: added chuck temp Tag: Visual edit
16 October 2024
10 October 2024
- 20:3520:35, 10 October 2024 diff hist +123 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned midnight folder sync Tag: Visual edit
- 00:3600:36, 10 October 2024 diff hist −530 Template:Announcements asml up, deleted MLA
8 October 2024
- 22:0922:09, 8 October 2024 diff hist +1,656 Lithography Recipes →Available Variations: bolded variables on the table, italics descriptions for section Tag: Visual edit
- 21:1221:12, 8 October 2024 diff hist +148 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): added @Noah's new recipe Tag: Visual edit
- 17:3317:33, 8 October 2024 diff hist +3 Stepper 2 (AutoStep 200) →Video Training: link to biljana as supervisor Tag: Visual edit
- 03:2503:25, 8 October 2024 diff hist +186 Stepper 2 (AutoStep 200) →Video Training: added video thumbnail and link Tag: Visual edit: Switched
- 03:2303:23, 8 October 2024 diff hist +41 N File:GCA Autostep 200 training vid title screen.png No edit summary
7 October 2024
- 20:3420:34, 7 October 2024 diff hist +863 Stepper 2 (AutoStep 200) Added link to Training videpo Tag: Visual edit
- 17:0217:02, 7 October 2024 diff hist +29 m Services →Statement of Work Tag: Visual edit
- 16:5616:56, 7 October 2024 diff hist +146 Services →Statement of Work: link to example Stepper SOW Tag: Visual edit
4 October 2024
- 23:0423:04, 4 October 2024 diff hist +3 m Stepper 2 (AutoStep 200) →Reference/Other Info Tag: Visual edit
3 October 2024
- 05:1905:19, 3 October 2024 diff hist +146 Mask Making Guidelines for Contact Aligners →Generic Contact Mask Parameters: added CAD images Tag: Visual edit: Switched
- 05:1505:15, 3 October 2024 diff hist −1 m Calculators + Utilities →CAD Files & Templates: indent figure