Tony Bosch
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Tony Bosch
Position
Senior Development Engineer
Room Number
1109C
Phone
(805) 839-3918x217
E-Mail
bosch@ece.ucsb.edu
Tools
Tony Bosch
is the supervisor for the following tools.
Nano-Imprint (Nanonex NX2000)
Oven 4 (Fisher)
Vacuum Oven (YES)
E-Beam 2 (Custom)
E-Beam 4 (CHA)
Sputter 3 (AJA ATC 2000-F)
ICP-PECVD (Unaxis VLR)
ICP-Etch (Unaxis VLR)
UV Ozone Reactor
Gold Plating Bench
Strip Annealer
Tube Furnace (Tystar 8300)
Tube Furnace AlGaAs Oxidation (Linberg)
Flip-Chip Bonder (Finetech)
Microscopes
Probe Station & Curve Tracer
Optical Film Thickness (Filmetrics)
SEM Sample Coater (Hummer)
Resistivity Mapper (CDE RESMAP)
Laser Scanning Confocal M-scope (Olympus LEXT)
Deep UV Optical Microscope (Olympus)
Fluorescence Microscope (Olympus MX51)
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