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This special page shows all uploaded files.

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Date Name Thumbnail Size User Description Versions
22:46, 20 November 2024 SURFSCAN 6200 241120 small substrates.pdf (file) 162 KB Biljana   1
22:45, 20 November 2024 SURFSCAN 6200 241120 for 8inch wafers.pdf (file) 104 KB Biljana   1
22:44, 20 November 2024 SURFSCAN 6200 241120 for 6inch wafers.pdf (file) 130 KB Biljana   1
22:44, 20 November 2024 SURFSCAN 6200 241120 for 4inch wafers.pdf (file) 128 KB Biljana   1
00:01, 20 November 2024 RB IK P3 T2 60 800 018.jpg (file) 63 KB Dread   1
23:50, 19 November 2024 Exsitu TGate.jpg (file) 1.44 MB Dread   1
23:42, 19 November 2024 Ex situ porous GaN.png (file) 371 KB Dread   1
23:33, 19 November 2024 In situ porous GaN.jpg (file) 132 KB Dread   1
17:38, 15 November 2024 MLA150 Quick Start Rev B.pdf (file) 565 KB Sawyer l   1
17:37, 15 November 2024 MLA150 SOP Rev M (LS).pdf (file) 1.75 MB Sawyer l   1
21:26, 6 November 2024 ICP2 Process Control Data Example.jpg (file) 159 KB John d newer data, "example" label 2
23:54, 5 November 2024 FEM example analysis GMoody Group 2024-11-04 v2.png (file) 58 KB John d added X in middle 2
16:31, 31 October 2024 EB2 SOP Rev I.pdf (file) 3.04 MB Sawyer l   1
19:02, 26 October 2024 UCSB NetID - correct google account v1.png (file) 96 KB John d   1
18:50, 26 October 2024 UCSB NetID wrong google account access denied v1.png (file) 150 KB John d   1
18:46, 26 October 2024 UCSB NetID - wrong login access denied.png (file) 89 KB John d   1
17:40, 24 October 2024 Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg (file) 1,019 KB John d   1
17:12, 24 October 2024 Spontaneous Wafer Bond Glass to Silicon - Demis D John.png (file) 656 KB John d   1
05:25, 23 October 2024 Google Drive - Example Job Folder.png (file) 42 KB John d   1
05:22, 23 October 2024 Trello - example job card.png (file) 209 KB John d   1
05:21, 23 October 2024 Trello - Example Job Cards.png (file) 126 KB John d   1
23:17, 22 October 2024 MLA150 Alignment versus Wafer Location v1.jpg (file) 8 KB John d   1
21:03, 8 October 2024 Cal DSE Ar+ER.png (file) 16 KB Noahdutra DSE STD_Bosch_Si etch AR/ER dependence 1
20:44, 8 October 2024 Copy of 22 013 (1).jpg (file) 883 KB Noahdutra STD_Bosch_Si example 8/26/24 1
20:42, 8 October 2024 30D 003.jpg (file) 880 KB Noahdutra STD_Bosch_Si etch picture 1
20:37, 8 October 2024 DSE plot.png (file) 26 KB Noahdutra Calibration plot for DSE 1
20:32, 8 October 2024 Cal vs Legacy DSE.png (file) 20 KB Noahdutra Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio. 1
03:23, 8 October 2024 GCA Autostep 200 training vid title screen.png (file) 308 KB John d   1
16:23, 30 September 2024 PRStrip 019 (1).jpg (file) 845 KB Noahdutra Si Etch FICP 9/19/24 1
16:15, 30 September 2024 PRStrip 022 (1).jpg (file) 955 KB Noahdutra   1
21:56, 27 September 2024 Nanofabrication Facility Project Description.xlsx (file) 31 KB John d Rev v2024-09-27 - unlocked PI Phone number. 4
17:54, 24 September 2024 Recipe Importing New Software.pdf (file) 389 KB Sawyer l   1
00:19, 17 September 2024 Inverted Contact-AlignMarks with Vernier.png (file) 158 KB John d   1
20:32, 13 September 2024 FICP-Si.png (file) 28 KB Noahdutra Fluorine ICP Si Etch Control Chart 1
22:51, 5 September 2024 Contact Layer 1 alignment example v1.png (file) 55 KB John d   1
01:18, 31 August 2024 Demis D John - Stepper Reticle Layout vs Wafer Layout.pdf (file) 1 MB John d added terminology slide 2
23:36, 22 August 2024 AZ5214 negative process schematic.png (file) 68 KB John d   1
16:59, 21 August 2024 AZ5214 Fabublox negative schematic.png (file) 46 KB John d   1
16:57, 21 August 2024 AZ5214 Fabublox Positive PR schematic.png (file) 38 KB John d   1
16:00, 30 July 2024 LEXT OLS4100 InstallManual Ver.3.1.8 offline.pdf (file) 882 KB Hopkins a LEXT Offline software 1
17:06, 26 July 2024 LaserMon - Temp Stabilize JoelGuo - 240725 noGas hold200C InPepi DSP.png (file) 108 KB John d   1
19:16, 19 July 2024 Stepper Reticle Tutorial - Reticle Masking Schematic.png (file) 497 KB John d   1
15:54, 17 July 2024 ADT SOP Rev J.pdf (file) 2.98 MB Sawyer l   5
20:20, 16 July 2024 ASML Cal Particle Check.png (file) 279 KB John d higher resolution 3
18:25, 9 July 2024 IBD - Deposition Uniformity across a 6-inch wafer 2010-06-15 v2.png (file) 202 KB John d   1
18:55, 8 July 2024 EB-3 operation instructions 7-8-24.pdf (file) 198 KB Barreraz   1
22:19, 6 June 2024 EB4 Operating Instructions 6-6-24.pdf (file) 1.97 MB Barreraz   1
22:07, 6 June 2024 EB-1 operation instructions 6-6-24.pdf (file) 270 KB Barreraz   1
21:08, 6 June 2024 Post Dicing Tape Expansion SOP.pdf (file) 1.28 MB Sawyer l   1
19:31, 4 June 2024 EB1 Rotation Fixture SOP 6-4-24.pdf (file) 2.58 MB Barreraz   1
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