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- This edit created a new page (also see list of new pages)
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27 September 2024
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11:27 | Stepper 2 (AutoStep 200) 2 changes history +114 [John d (2×)] | |||
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11:27 (cur | prev) -1 John d talk contribs →Process Information: moved mask palte info to "detailed specs" Tag: Visual edit | ||||
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11:27 (cur | prev) +115 John d talk contribs →Detailed Specifications: added mask plate specs Tag: Visual edit |
11:27 | Stepper 1 (GCA 6300) diffhist +114 John d talk contribs →Detailed Specifications: added mask plate specs |
25 September 2024
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15:03 | Wet Benches 2 changes history +220 [John d (2×)] | |||
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15:03 (cur | prev) +198 John d talk contribs →Documentation: explained what is in this doc Tag: Visual edit | ||||
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14:59 (cur | prev) +22 John d talk contribs →Documentation: expanded "SOP" acronym Tag: Visual edit |
24 September 2024
20 September 2024
11:40 | Stepper 3 (ASML DUV) diffhist +188 John d talk contribs →About: link to stepper tutorial, fixed mask making guidelines link |
13 September 2024
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14:06 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 2 changes history +837 [Noahdutra (2×)] | |||
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14:06 (cur | prev) +83 Noahdutra talk contribs →Process Control Data | ||||
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13:58 (cur | prev) +754 Noahdutra talk contribs →Process Control Data Tag: Visual edit |
12 September 2024
5 September 2024
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14:48 | Suss Aligners (SUSS MJB-3) 2 changes history +545 [John d (2×)] | |||
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14:48 (cur | prev) +312 John d talk contribs links to CAD files/help Tag: Visual edit | ||||
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14:43 (cur | prev) +233 John d talk contribs →Detailed Specifications: linked to mask making guidelines for contact Tag: Visual edit |
14:47 | Contact Aligner (SUSS MA-6) diffhist +453 John d talk contribs links to CAD file info |
3 September 2024
17:24 | Automated Wafer Cleaver (Loomis LSD-155LT) diffhist +128 John d talk contribs →Recipes: link to Mechanical_Polisher_(Allied) |
11:03 | Automated Coat/Develop System (S-Cubed Flexi) diffhist +350 John d talk contribs →Detailed Specifications: linked to PR's, |