Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
2 October 2024
| 22:19 | Mask Making Guidelines for Contact Aligners diffhist +146 John d talk contribs →Generic Contact Mask Parameters: added CAD images | ||||
| m 22:15 | Calculators + Utilities diffhist -1 John d talk contribs →CAD Files & Templates: indent figure | ||||
| 22:03 | Stepper 1 (GCA 6300) diffhist +248 John d talk contribs added related tools | ||||
| 22:02 | Stepper 2 (AutoStep 200) diffhist +189 John d talk contribs added Related Tools | ||||
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17:52 | Template:News 2 changes history +22 [John d (2×)] | |||
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17:52 (cur | prev) -2 John d talk contribs →NSF-ATE Award for SBCC and UCSB: AS Degree in Semiconductors | ||||
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17:51 (cur | prev) +24 John d talk contribs →NSF-ATE Award for SBCC and UCSB: AS Degree in Semiconductors: change associates degree language according to Jens's request | ||||
| 17:46 | Template:Announcements diffhist -924 John d talk contribs updated MLA, deleted DSE and YES | ||||
| 17:44 | Nanofab Job Postings diffhist +162 John d talk contribs updated hiring dates to Spring 2025, added expansion into other cals. | ||||
| 10:32 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) diffhist +223 Noahdutra talk contribs →Process Control Data: added picture to this page for Si etch | ||||
1 October 2024
30 September 2024
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14:24 | PECVD Recipes 2 changes history +42 [Biljana (2×)] | |||
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14:24 (cur | prev) +4 Biljana talk contribs →Gap-Fill SiO2 [ICP-PECVD] | ||||
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13:53 (cur | prev) +38 Biljana talk contribs →Gap-Fill SiO2 [ICP-PECVD] | ||||
| 09:36 | ICP Etching Recipes diffhist +157 Noahdutra talk contribs Added a photo attributed to the SiVertHFv2 cal recipe | ||||
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09:23 | (Upload log) [Noahdutra (2×)] | |||
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09:23 Noahdutra talk contribs uploaded File:PRStrip 019 (1).jpg (Si Etch FICP 9/19/24) | ||||
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09:15 Noahdutra talk contribs uploaded File:PRStrip 022 (1).jpg | ||||
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27 September 2024
| 14:56 | Upload log John d talk contribs uploaded a new version of File:Nanofabrication Facility Project Description.xlsx (Rev v2024-09-27 - unlocked PI Phone number.) | ||||
| 12:20 | Template:Announcements diffhist +351 Mehalana v talk contribs | ||||
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11:32 | Stepper Mask-Making Guidelines (Generic) 3 changes history +436 [John d (3×)] | |||
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11:32 (cur | prev) +166 John d talk contribs →Generic Stepper Mask Parameters Tag: Visual edit | ||||
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11:31 (cur | prev) +2 John d talk contribs →Generic Stepper Mask Parameters: added stepper mask sizes Tag: Visual edit | ||||
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11:30 (cur | prev) +268 John d talk contribs added stepper mask plate sizes. Tag: Visual edit | ||||
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11:27 | Stepper 2 (AutoStep 200) 2 changes history +114 [John d (2×)] | |||
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11:27 (cur | prev) -1 John d talk contribs →Process Information: moved mask palte info to "detailed specs" Tag: Visual edit | ||||
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11:27 (cur | prev) +115 John d talk contribs →Detailed Specifications: added mask plate specs Tag: Visual edit | ||||
| 11:27 | Stepper 1 (GCA 6300) diffhist +114 John d talk contribs →Detailed Specifications: added mask plate specs | ||||
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10:15 | PECVD Recipes 3 changes history +124 [Biljana (3×)] | |||
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10:15 (cur | prev) -15 Biljana talk contribs →Standard Clean Recipe | ||||
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10:15 (cur | prev) -1 Biljana talk contribs →Standard Clean Recipe | ||||
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10:15 (cur | prev) +140 Biljana talk contribs →Standard Clean Recipe | ||||