Recent changes
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Track the most recent changes to the wiki on this page.
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- m
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20 September 2024
| 16:01 | Services diffhist +102 John d talk contribs →Paperwork for Fabrication Services: added NOT prof's signature | ||||
| m 15:23 | Lithography Recipes diffhist +14 John d talk contribs →Recipes Table (S-Cubed Flexi) | ||||
| 12:36 | Template:Announcements diffhist -344 John d talk contribs dse update | ||||
| 11:40 | Stepper 3 (ASML DUV) diffhist +188 John d talk contribs →About: link to stepper tutorial, fixed mask making guidelines link | ||||
18 September 2024
| 14:16 | Template:Announcements diffhist +185 Mehalana v talk contribs →YES EcoClean UP | ||||
17 September 2024
| 15:55 | Lithography Recipes diffhist +890 Gopimeena talk contribs →Recipes Table (S-Cubed Flexi): Added developer recipes from 25sec to 45sec | ||||
| 11:49 | Calculators + Utilities diffhist +548 John d talk contribs →ASML Stepper: link to mask making guidelines, deleted ASML Alignment Mark CAD | ||||
| 11:49 | Deletion log John d talk contribs deleted page File:ASML On Wafer Mark.gds (vendor request to remove this file from public viewing) | ||||
16 September 2024
| 17:19 | Calculators + Utilities diffhist +212 John d talk contribs →General CAD files for Litho: inverted alignmetn mark | ||||
| 17:19 | Upload log John d talk contribs uploaded File:Inverted Contact-AlignMarks with Vernier.png | ||||
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13:02 | Template:Announcements 4 changes history +435 [Mehalana v (4×)] | |||
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13:02 (cur | prev) +34 Mehalana v talk contribs →DSE is Down | ||||
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13:02 (cur | prev) +696 Mehalana v talk contribs | ||||
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13:01 (cur | prev) -149 Mehalana v talk contribs →Lab Closure Monday the 16th | ||||
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13:01 (cur | prev) -146 Mehalana v talk contribs →Focused Ion Beam (Raith Velion) - TOOL DOWN for Raith Service | ||||
| 04:47 | Noah Dutra diffhist -111 Noahdutra talk contribs | ||||
13 September 2024
| 17:47 | Process Group Interns diffhist +69 John d talk contribs →Current Interns: added Terry | ||||
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17:13 | ICP Etching Recipes 5 changes history +1,085 [John d; Noahdutra (4×)] | |||
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17:13 (cur | prev) +159 John d talk contribs →Si Etching (Fluorine ICP Etcher): explained double gas flow. Tag: Visual edit | ||||
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14:05 (cur | prev) +140 Noahdutra talk contribs →Si Etching (Fluorine ICP Etcher) | ||||
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13:59 (cur | prev) -26 Noahdutra talk contribs →Si Etching (Fluorine ICP Etcher) Tag: Visual edit | ||||
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13:42 (cur | prev) -84 Noahdutra talk contribs Tag: Visual edit | ||||
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13:40 (cur | prev) +896 Noahdutra talk contribs →Si Etching (Fluorine ICP Etcher) Tag: Visual edit | ||||
| 14:39 | Process Group - Process Control Data diffhist +1,029 John d talk contribs →PlasmaTherm SLR Fluorine Etcher: added Si etch cal | ||||
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14:06 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 2 changes history +837 [Noahdutra (2×)] | |||
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14:06 (cur | prev) +83 Noahdutra talk contribs →Process Control Data | ||||
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13:58 (cur | prev) +754 Noahdutra talk contribs →Process Control Data Tag: Visual edit | ||||
| 13:52 | Dry Etching Recipes diffhist 0 Noahdutra talk contribs | ||||
| 13:32 | Upload log Noahdutra talk contribs uploaded File:FICP-Si.png (Fluorine ICP Si Etch Control Chart) | ||||
12 September 2024
| 15:19 | E-Beam 3 (Temescal) diffhist -3 Barreraz talk contribs | ||||
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14:19 | Template:Announcements 5 changes history +842 [John d (2×); Mehalana v (3×)] | |||
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14:19 (cur | prev) 0 John d talk contribs →IBD is UP | |||
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14:18 (cur | prev) +86 John d talk contribs IBD up, YES Up | ||||
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10:58 (cur | prev) +467 Mehalana v talk contribs | ||||
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10:57 (cur | prev) +34 Mehalana v talk contribs →Lab Closure Monday the 16th | ||||
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10:57 (cur | prev) +255 Mehalana v talk contribs | ||||
| 11:19 | PECVD Recipes diffhist +816 John d talk contribs →Low-Stress SiN deposition (PECVD #2): added LS SiN 3x Time section + charts etc. | ||||
| 10:24 | ICP Etching Recipes diffhist +426 John d talk contribs →Through Silicon Via (TSV) etch (DSEiii): updates, note on wax mounting | ||||
11 September 2024
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18:15 | Template:Announcements 6 changes history -575 [Mehalana v (2×); John d (4×)] | |||
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18:15 (cur | prev) -1 John d talk contribs | |||
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18:15 (cur | prev) -1 John d talk contribs | |||
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18:14 (cur | prev) -1 John d talk contribs | |||
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18:14 (cur | prev) -938 John d talk contribs many updates | ||||
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17:46 (cur | prev) +41 Mehalana v talk contribs →= | ||||
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17:46 (cur | prev) +325 Mehalana v talk contribs →ASML: intermittent alignment failures | ||||
6 September 2024
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20:48 | Template:Announcements 3 changes history +112 [John d (3×)] | |||
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20:48 (cur | prev) -86 John d talk contribs IBD up | ||||
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18:14 (cur | prev) +460 John d talk contribs asml laser failing | ||||
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12:13 (cur | prev) -262 John d talk contribs lab up, MLA update | ||||
5 September 2024
| 16:04 | Template:Announcements diffhist +286 Mehalana v talk contribs | ||||
| N 15:54 | Mask Making Guidelines for Contact Aligners diffhist +6,389 John d talk contribs added first layer alignment example image | ||||
| 15:51 | Upload log John d talk contribs uploaded File:Contact Layer 1 alignment example v1.png | ||||
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14:48 | Suss Aligners (SUSS MJB-3) 2 changes history +545 [John d (2×)] | |||
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14:48 (cur | prev) +312 John d talk contribs links to CAD files/help Tag: Visual edit | ||||
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14:43 (cur | prev) +233 John d talk contribs →Detailed Specifications: linked to mask making guidelines for contact Tag: Visual edit | ||||
| 14:47 | Contact Aligner (SUSS MA-6) diffhist +453 John d talk contribs links to CAD file info | ||||
| m 14:41 | Photomask Ordering Procedure for UCSB Users diffhist +23 John d talk contribs | ||||