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- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
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8 November 2024
| 19:10 | Wet Etching Recipes diffhist +149 Biljana talk contribs (→Table of Wet Etching Recipes: BHF:DI =1:100 etch rate for ALD -SiO2 BDEAS film) | ||||
7 November 2024
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21:57 | Vacuum Deposition Recipes 2 changes history −2,346 [Noahdutra (2×)] | |||
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21:57 (cur | prev) +94 Noahdutra talk contribs (Added AuSn to Thermal evap 2) Tag: Visual edit | ||||
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21:49 (cur | prev) −2,440 Noahdutra talk contribs (changing thermal evaps to be correct) Tag: Visual edit | ||||
| 21:38 | Services diffhist −2 John d talk contribs (→Statement of Work: moved filename to top) | ||||
| 18:04 | Process Group - Process Control Data diffhist +416 John d talk contribs (added GaN etch cal →Oxford PlasmaPro Cobra Etcher) | ||||
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02:00 | Oxford ICP Etcher (PlasmaPro 100 Cobra) 2 changes history +1,453 [John d (2×)] | |||
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02:00 (cur | prev) +226 John d talk contribs (→Process Control Data) Tag: Visual edit: Switched | |||
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02:00 (cur | prev) +1,227 John d talk contribs (link to PC data) Tag: Visual edit: Switched | ||||
| 00:45 | Template:Announcements diffhist −704 John d talk contribs (deleted ASML update) | ||||
6 November 2024
| 21:51 | DSEIII (PlasmaTherm/Deep Silicon Etcher) diffhist +1,325 John d talk contribs (pasted NoahD's example SEM's) | ||||
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21:47 | Process Group - Process Control Data 3 changes history +1,603 [John d (3×)] | |||
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21:47 (cur | prev) +1,010 John d talk contribs (→Etching (Process Control Data): pasted process control data link/image from DSE recipes page) Tag: Visual edit | ||||
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21:42 (cur | prev) +242 John d talk contribs (→PlasmaTherm SLR Fluorine Etcher: subscripts in chemicals) Tag: Visual edit | |||
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21:38 (cur | prev) +351 John d talk contribs (describe purpose of 2 diff EtchCals) Tag: Visual edit | ||||
| 21:43 | Atomic Layer Deposition Recipes diffhist +38 Biljana talk contribs (→SiO2 deposition (ALD CHAMBER 1): Added (BHF:DI=1:100) etch rate) | ||||
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21:39 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 4 changes history +50 [John d (4×)] | |||
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21:39 (cur | prev) +44 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) +11 John d talk contribs (→Process Control Data) Tag: Visual edit | |||
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21:39 (cur | prev) −35 John d talk contribs (→Process Control Data: pasted PC images+links, cleaned up) Tag: Visual edit | ||||
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21:30 (cur | prev) +30 John d talk contribs (→Process Control Data: pasted PC images/links from PC page) | ||||
| 21:26 | Upload log John d talk contribs uploaded a new version of File:ICP2 Process Control Data Example.jpg (newer data, "example" label) | ||||
| 21:22 | ICP Etch 2 (Panasonic E626I) diffhist +366 John d talk contribs (→Recipes: added Process Control Header level 1 & images from PC page) | ||||
| m 21:14 | Process Group Interns diffhist −5 John d talk contribs | ||||
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N 21:12 | Process Group Internships 3 changes history +5,528 [John d (3×)] | |||
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21:12 (cur | prev) +71 John d talk contribs Tag: Visual edit | |||
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21:09 (cur | prev) +7 John d talk contribs (Intenrhsip Goals heading) Tag: Visual edit | ||||
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21:00 (cur | prev) +5,450 John d talk contribs (internship goals, skillss learns and detailed 2-phase approach) Tag: Visual edit | |||
| 16:54 | Lithography Recipes diffhist +444 John d talk contribs (→General Photolithography Techniques: link to FEM page) | ||||
5 November 2024
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23:54 | (Upload log) [John d (2×)] | |||
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23:54 John d talk contribs uploaded a new version of File:FEM example analysis GMoody Group 2024-11-04 v2.png (added X in middle) | ||||
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23:47 John d talk contribs uploaded File:FEM example analysis GMoody Group 2024-11-04 v2.png | ||||
| 23:52 | Lithography Calibration - Analyzing a Focus-Exposure Matrix diffhist +465 John d talk contribs (uploaded Moody group FEM example) | ||||
4 November 2024
| 22:51 | Services diffhist +25 John d talk contribs (→Fabrication Services by NanoFab Staff: clarify charged rates) | ||||
2 November 2024
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17:48 | SEM 1 (JEOL IT800SHL) 2 changes history +210 [John d (2×)] | |||
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17:48 (cur | prev) +15 John d talk contribs (→Operating Procedures) Tag: Visual edit | |||
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16:41 (cur | prev) +195 John d talk contribs (→Operating Procedures: link to reduced cahrging imaging modes page) Tag: Visual edit | ||||
| 17:38 | Hummer SEM Sample Coater - Techniques to reduce charging in SEMs diffhist +46 John d talk contribs | ||||
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N 17:35 | JEOL IT800SHL - Reduced Charging Imaging Modes 2 changes history +2,972 [John d (2×)] | |||
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17:35 (cur | prev) +353 John d talk contribs (AUPd help) Tag: Visual edit | ||||
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17:30 (cur | prev) +2,619 John d talk contribs (reduced charging by Demis,f rom JEOL training by Jen 2024-09) Tag: Visual edit | |||
31 October 2024
| 16:32 | E-Beam 2 (Custom) diffhist 0 Sawyer l talk contribs (SOP rev) | ||||
| 16:31 | Upload log Sawyer l talk contribs uploaded File:EB2 SOP Rev I.pdf | ||||
30 October 2024
28 October 2024
| 21:38 | Probe Station: I-V Curves with Keithley 2400 and Python Script diffhist +67 John d talk contribs (added computer login) | ||||
27 October 2024
| 17:28 | MLA150 - Troubleshooting diffhist +293 John d talk contribs (→Analyzing misalignment: further explain how to draw arrows) | ||||
26 October 2024
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19:39 | Maskless Aligner (Heidelberg MLA150) 3 changes history +235 [John d (3×)] | |||
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19:39 (cur | prev) −16 John d talk contribs (→Recipes) Tag: Visual edit | |||
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19:36 (cur | prev) +112 John d talk contribs (→Documentation: link to new MLA150 FEM page) Tag: Visual edit | ||||
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19:35 (cur | prev) +139 John d talk contribs (→Recipes: link to FEM analysis section, mention "Series" for FEM) Tag: Visual edit | ||||
| N 19:38 | MLA150 - Focus-Exposure Matrix ("Series" mode) diffhist +21 John d talk contribs (to be added) | ||||
| 19:32 | Stepper 1 (GCA 6300) diffhist +723 John d talk contribs (added Recipes section with link to recipes, FEM analysis etc) | ||||
| 19:30 | Stepper 2 (AutoStep 200) diffhist +728 John d talk contribs (link to FEM analysis pages, Stepper 2 recipes page) | ||||
| 19:26 | Stepper 3 (ASML DUV) diffhist +339 John d talk contribs (→Recipes: added FEM analysis link) | ||||
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N 19:14 | UCSB NetID Login Troubleshooting 2 changes history +3,016 [John d (2×)] | |||
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19:14 (cur | prev) +22 John d talk contribs (→ASML Documentation - request access) Tag: Visual edit | |||
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19:11 (cur | prev) +2,994 John d talk contribs (made "Wrogn google account" and "gdrive wont allow correct account" sections) Tag: Visual edit | |||
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19:02 | (Upload log) [John d (3×)] | |||
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19:02 John d talk contribs uploaded File:UCSB NetID - correct google account v1.png | ||||
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18:50 John d talk contribs uploaded File:UCSB NetID wrong google account access denied v1.png | ||||
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18:46 John d talk contribs uploaded File:UCSB NetID - wrong login access denied.png | ||||
