Recent changes
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8 October 2024
| 15:09 | Lithography Recipes diffhist +1,656 John d talk contribs →Available Variations: bolded variables on the table, italics descriptions for section | ||||
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14:03 | (Upload log) [Noahdutra (5×)] | |||
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14:03 Noahdutra talk contribs uploaded File:Cal DSE Ar+ER.png (DSE STD_Bosch_Si etch AR/ER dependence) | ||||
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13:44 Noahdutra talk contribs uploaded File:Copy of 22 013 (1).jpg (STD_Bosch_Si example 8/26/24) | ||||
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13:42 Noahdutra talk contribs uploaded File:30D 003.jpg (STD_Bosch_Si etch picture) | ||||
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13:37 Noahdutra talk contribs uploaded File:DSE plot.png (Calibration plot for DSE) | ||||
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13:32 Noahdutra talk contribs uploaded File:Cal vs Legacy DSE.png (Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio.) | ||||
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| 10:33 | Stepper 2 (AutoStep 200) diffhist +3 John d talk contribs →Video Training: link to biljana as supervisor | ||||
7 October 2024
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20:25 | Stepper 2 (AutoStep 200) 2 changes history +1,049 [John d (2×)] | |||
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20:25 (cur | prev) +186 John d talk contribs →Video Training: added video thumbnail and link Tag: Visual edit: Switched | ||||
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13:34 (cur | prev) +863 John d talk contribs Added link to Training videpo Tag: Visual edit | ||||
| 20:23 | Upload log John d talk contribs uploaded File:GCA Autostep 200 training vid title screen.png | ||||
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10:02 | Services 2 changes history +175 [John d (2×)] | |||
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10:02 (cur | prev) +29 John d talk contribs →Statement of Work Tag: Visual edit | |||
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09:56 (cur | prev) +146 John d talk contribs →Statement of Work: link to example Stepper SOW Tag: Visual edit | ||||
4 October 2024
| m 16:04 | Stepper 2 (AutoStep 200) diffhist +3 John d talk contribs →Reference/Other Info | ||||
| 15:31 | Dry Etching Recipes diffhist 0 Noahdutra talk contribs changed Oxford GaAs to R2 since we have no data, but there is a recipe on the tool. | ||||
3 October 2024
| 18:36 | Template:Announcements diffhist +330 Mehalana v talk contribs | ||||
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10:59 | Surface Analysis (KLA/Tencor Surfscan) 10 changes history -1 [Biljana (10×)] | |||
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10:59 (cur | prev) -90 Biljana talk contribs →Operating Procedures | ||||
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10:58 (cur | prev) +90 Biljana talk contribs →Operating Procedures | ||||
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10:53 (cur | prev) -107 Biljana talk contribs →Operating Procedures | ||||
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10:53 (cur | prev) +104 Biljana talk contribs →Operating Procedures | ||||
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10:51 (cur | prev) -91 Biljana talk contribs →Operating Procedures | ||||
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10:50 (cur | prev) -1 Biljana talk contribs →Operating Procedures | ||||
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10:49 (cur | prev) +3 Biljana talk contribs →Operating Procedures | ||||
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10:45 (cur | prev) -4 Biljana talk contribs →Operating Procedures | ||||
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10:36 (cur | prev) +4 Biljana talk contribs →Operating Procedures | ||||
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10:34 (cur | prev) +91 Biljana talk contribs →Operating Procedures | ||||
2 October 2024
| 22:19 | Mask Making Guidelines for Contact Aligners diffhist +146 John d talk contribs →Generic Contact Mask Parameters: added CAD images | ||||
| m 22:15 | Calculators + Utilities diffhist -1 John d talk contribs →CAD Files & Templates: indent figure | ||||
| 22:03 | Stepper 1 (GCA 6300) diffhist +248 John d talk contribs added related tools | ||||
| 22:02 | Stepper 2 (AutoStep 200) diffhist +189 John d talk contribs added Related Tools | ||||
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17:52 | Template:News 2 changes history +22 [John d (2×)] | |||
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17:52 (cur | prev) -2 John d talk contribs →NSF-ATE Award for SBCC and UCSB: AS Degree in Semiconductors | ||||
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17:51 (cur | prev) +24 John d talk contribs →NSF-ATE Award for SBCC and UCSB: AS Degree in Semiconductors: change associates degree language according to Jens's request | ||||
| 17:46 | Template:Announcements diffhist -924 John d talk contribs updated MLA, deleted DSE and YES | ||||
| 17:44 | Nanofab Job Postings diffhist +162 John d talk contribs updated hiring dates to Spring 2025, added expansion into other cals. | ||||
| 10:32 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) diffhist +223 Noahdutra talk contribs →Process Control Data: added picture to this page for Si etch | ||||
1 October 2024
30 September 2024
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14:24 | PECVD Recipes 2 changes history +42 [Biljana (2×)] | |||
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14:24 (cur | prev) +4 Biljana talk contribs →Gap-Fill SiO2 [ICP-PECVD] | ||||
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13:53 (cur | prev) +38 Biljana talk contribs →Gap-Fill SiO2 [ICP-PECVD] | ||||
| 09:36 | ICP Etching Recipes diffhist +157 Noahdutra talk contribs Added a photo attributed to the SiVertHFv2 cal recipe | ||||
| 09:23 | Upload log Noahdutra talk contribs uploaded File:PRStrip 019 (1).jpg (Si Etch FICP 9/19/24) | ||||
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