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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
20 December 2024
18 December 2024
| 23:08 | E-Beam 1 - 4-inch, 4-wafer Fixture SOP diffhist +70 John d talk contribs (link to EB1 page) | ||||
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23:07 | E-Beam 1 (Sharon) 2 changes history +103 [John d (2×)] | |||
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23:07 (cur | prev) +4 John d talk contribs (fixed link) Tag: Visual edit | ||||
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22:31 (cur | prev) +99 John d talk contribs (link to 4-inch, 4-wafer Fixture SOP) Tag: Visual edit | ||||
| 23:07 | Move log John d talk contribs moved page EB-1 - 4-inch, 4-wafer Fixture SOP to E-Beam 1 - 4-inch, 4-wafer Fixture SOP without leaving a redirect (clarify page name) | ||||
| N 22:52 | EB-1 - 4-inch, 4-wafer Fixture SOP diffhist +1,043 John d talk contribs (added images) | ||||
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22:51 | (Upload log) [John d (4×)] | |||
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22:51 John d talk contribs uploaded File:EB-1 4-wf fixture 04 fixture loaded in chamber.jpg | ||||
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22:48 John d talk contribs uploaded File:EB-1 4-wf fixture 03 wafers inserted.jpg | ||||
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22:46 John d talk contribs uploaded File:EB-1 4-wf fixture 02 bolt.png | ||||
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22:43 John d talk contribs uploaded File:EB-1 4-wf fixture 01 empty.png | ||||
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N 20:04 | Mike Barreraz 2 changes history +30 [John d (2×)] | |||
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20:04 (cur | prev) +4 John d talk contribs (correct syntax) Tag: New redirect | ||||
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20:03 (cur | prev) +26 John d talk contribs (redirect to correctly spelled Staff user page) Tag: Visual edit: Switched | |||
17 December 2024
| 16:29 | Atomic Layer Deposition Recipes diffhist 0 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
16 December 2024
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18:23 | Atomic Layer Deposition Recipes 5 changes history +120 [Biljana (5×)] | |||
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18:23 (cur | prev) 0 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
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18:22 (cur | prev) 0 Biljana talk contribs (→Oxford FlexAL Chamber #3: Dielectrics) | ||||
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18:21 (cur | prev) −2 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) Tag: Manual revert | ||||
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18:20 (cur | prev) +2 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) Tag: Reverted | ||||
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18:19 (cur | prev) +120 Biljana talk contribs (→Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)) | ||||
13 December 2024
| m 18:51 | ICP Etching Recipes diffhist −8 John d talk contribs (→High Rate Bosch Etch (DSEIII): update PR selectivity based on cal data) | ||||
12 December 2024
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17:09 | PECVD Recipes 4 changes history +54 [Biljana (4×)] | |||
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17:09 (cur | prev) −3 Biljana talk contribs (→SiO2 deposition rate at 150C is 35nm/min) | ||||
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17:08 (cur | prev) +2 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
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17:08 (cur | prev) +19 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
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17:08 (cur | prev) +36 Biljana talk contribs (→SiO2 deposition (PECVD #2)) | ||||
| 15:59 | Autostep 200 Mask Making Guidance diffhist +1 John d talk contribs (→Photomask Ordering Info: move ucsb ordering link to photomask ordering heading) | ||||
10 December 2024
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18:18 | Services 2 changes history +397 [John d (2×)] | |||
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18:18 (cur | prev) +370 John d talk contribs (→Statement of Work: link to dicing SOW) Tag: Visual edit | ||||
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17:56 (cur | prev) +27 John d talk contribs (→Fabrication Services by NanoFab Staff: rework for clarity) Tag: Visual edit | |||
9 December 2024
| 21:29 | Dicing Saw (ADT) diffhist +412 John d talk contribs (→About: added Recipes > Example dicing Instructions for remote work) | ||||
| 21:27 | Upload log John d talk contribs uploaded File:Dicing - Example Dicing Instructions for UC Santa Barbara v2.pptx (PPT file for users to fill out for Dicing work) | ||||
| m 16:46 | Process Group Internships diffhist +2 John d talk contribs (header level fix) | ||||
| 16:42 | Process Group Interns diffhist +26 John d talk contribs (→Current Interns: updated Javier) | ||||
8 December 2024
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00:35 | Template:Announcements 2 changes history +125 [John d (2×)] | |||
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00:35 (cur | prev) −133 John d talk contribs (suss update) | ||||
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00:34 (cur | prev) +258 John d talk contribs (oxford ald-ionmill maint) | ||||
7 December 2024
| 18:08 | Main Page diffhist −1 John d talk contribs (removed one newline at top) | ||||
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17:59 | Template:Announcements 2 changes history +452 [John d (2×)] | |||
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17:59 (cur | prev) +196 John d talk contribs (→Holography/PL: HeCd Laser Down Mon Dec 16th) | ||||
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17:56 (cur | prev) +256 John d talk contribs (Holography laser replacment) | ||||
6 December 2024
| 08:30 | Processing - How Do I…? diffhist +85 John d talk contribs (→Travelers (aka. RunCards, Process Followers, Work Instructions): link to MES) | ||||
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07:23 | ASML Stepper 3 - Job Creator 3 changes history +1,384 [John d (3×)] | |||
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07:23 (cur | prev) +75 John d talk contribs (→Required Files: link to demis) Tag: Visual edit | ||||
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06:00 (cur | prev) +528 John d talk contribs (author credits) | ||||
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05:56 (cur | prev) +781 John d talk contribs (link to gDrive Defaults.py file, added screenshot example) Tag: Visual edit | ||||
| 05:54 | Upload log John d talk contribs uploaded File:ASML JobCreator - Example wafer layout.png | ||||
4 December 2024
| 22:39 | Lithography Recipes diffhist +122 John d talk contribs (→Chemicals Stocked + Datasheets: mention utility of numbers in paretheses) | ||||
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06:20 | Services 2 changes history +87 [John d (2×)] | |||
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06:20 (cur | prev) +67 John d talk contribs (→Paperwork for new UC institutions: explained user signed UC MOU) Tag: Visual edit | ||||
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06:17 (cur | prev) +20 John d talk contribs (→Request Remote Fabrication Services: fixed inter-UC MOU link) Tag: Visual edit | ||||
27 November 2024
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23:04 | Oxford ICP Etcher (PlasmaPro 100 Cobra) 2 changes history +555 [Noahdutra (2×)] | |||
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23:04 (cur | prev) +46 Noahdutra talk contribs (→GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for GaN) Tag: Visual edit | ||||
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21:22 (cur | prev) +509 Noahdutra talk contribs (→GaN Etch (Cl2/BCl3/Ar/200°C)) Tag: Visual edit | ||||
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23:03 | ICP Etching Recipes 3 changes history +685 [Noahdutra (3×)] | |||
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23:03 (cur | prev) +46 Noahdutra talk contribs (→Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added recipe name for GaN) Tag: Visual edit | ||||
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21:29 (cur | prev) +128 Noahdutra talk contribs (→Si Etching (Fluorine ICP Etcher): Added Image) Tag: Visual edit | ||||
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21:23 (cur | prev) +511 Noahdutra talk contribs (→Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added GaN) Tag: Visual edit | ||||
| 22:57 | Process Group - Process Control Data diffhist +46 Noahdutra talk contribs (→GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for public GaN etch) | ||||
| 21:25 | Upload log Noahdutra talk contribs uploaded File:Dot Facet 00.jpg (GaN etch, credit: Gopi Meena) | ||||
