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- 17:07, 5 January 2023 diff hist +464 Template:News added info about process control data
- 10:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit
- 19:22, 3 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
- 18:53, 3 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
- 17:41, 3 January 2023 diff hist -21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
- 17:40, 3 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit
- 17:38, 3 January 2023 diff hist +135 Contact Aligner (SUSS MA-6) →Documentation: added link to alignment mark GDS file Tag: Visual edit
- 15:32, 3 January 2023 diff hist +481 ASML Stepper 3 - UCSB Test Reticles →Alignment Markers: added CAD files for alignment marks Tag: Visual edit
- 15:29, 3 January 2023 diff hist +72 N File:MA6-FrontBack AlignMarks only.gds CAD File for front/back alignment marks on Contact Aligner current
- 15:26, 3 January 2023 diff hist +90 N File:Contact-AlignFront.gds CAD file for contact alignment mark, as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:25, 3 January 2023 diff hist +95 N File:EBL-GlobalMulti NEG.gds CAD file for EBL negative alignment mark, as printed on ASML DUV mask "UCSB-OPC1" current
- 15:23, 3 January 2023 diff hist +72 N File:EBL-GlobalMulti POS.gds EBL Alignment Mark as printed on ASML DUV Mask "UCSB-OPC1" current
- 15:22, 3 January 2023 diff hist +84 N File:GCA stepper align.gds GCA Stepper Alignment Mark as drawn on ASML DUV Mask Plate "UCSB-OPC1" current
- 11:06, 31 December 2022 diff hist -3 m Template:News →Raith Velion: FIB/SEM Installation
- 11:05, 31 December 2022 diff hist +42 Template:Announcements Lab open after Xmas shutdown
- 08:36, 22 December 2022 diff hist +33 Holographic Lith/PL Setup (Custom) →Detailed Specifications: added max sample size Tag: Visual edit
- 21:15, 21 December 2022 diff hist -393 Template:Announcements nanofab holiday closure
- 10:50, 21 December 2022 diff hist -12 m Stepper Recipes →Anti-Reflective Coatings: removed bold Tag: Visual edit
- 10:49, 21 December 2022 diff hist +19 m Stepper Recipes →Anti-Reflective Coatings Tag: Visual edit
- 10:48, 21 December 2022 diff hist +838 Stepper Recipes →Stepper 3 (ASML DUV): added TOC Tag: Visual edit
- 08:34, 19 December 2022 diff hist -8 m Dry Etching Recipes Tag: Visual edit
- 08:33, 19 December 2022 diff hist +9 Dry Etching Recipes fix Pan1/AlGaAs link Tag: Visual edit
- 00:23, 16 December 2022 diff hist +871 N E-Beam 5 (Plasys) inital page and descriptions Tag: Visual edit: Switched
- 15:58, 15 December 2022 diff hist +112 Stepper Recipes →DS-K101-304: changed spin speed to 2500rpm Tag: Visual edit
- 14:39, 15 December 2022 diff hist +23 Tool List →Thermal Evaporation: Added EBeam 5 (plasys) link to new page Tag: Visual edit
- 15:25, 14 December 2022 diff hist -66 Template:Announcements asml up
- 14:47, 14 December 2022 diff hist +101 Lithography Recipes →Automated Coat/Develop System Recipes (S-Cubed Flexi): note about DSK@220C equivalence to DUV42P Tag: Visual edit
- 07:57, 13 December 2022 diff hist -1 Wafer Cleaver (PELCO Flip-Scribe) changed room --> ESB 1111 current Tag: Visual edit
- 07:53, 13 December 2022 diff hist -48 Template:Announcements ASML Down: laser fail
- 11:17, 12 December 2022 diff hist +126 Microscopes →Microscope Training Guide: basic list of topics Tag: Visual edit
- 21:53, 11 December 2022 diff hist -1 m Template:Announcements
- 21:52, 11 December 2022 diff hist +5 m Template:Announcements
- 21:49, 11 December 2022 diff hist +17 Template:Announcements asml laser pm update
- 00:36, 10 December 2022 diff hist -899 Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added comment about NP vs ND meas, deleted extraneous tables of old non-standard measurements Tag: Visual edit
- 00:28, 10 December 2022 diff hist +114 Frequently Asked Questions →How do I get my files from the NanoFab computers?: mentioned allowed folder names Tag: Visual edit
- 00:23, 10 December 2022 diff hist -3 m Autostep 200 Mask Making Guidance →CAD Files Tag: Visual edit
- 08:17, 9 December 2022 diff hist +33 m Other Dry Etching Recipes →CAIBE (Oxford Ion Mill): spelling correction current Tag: Visual edit
- 16:55, 6 December 2022 diff hist +13 Template:Announcements EB2 heater update
- 16:52, 6 December 2022 diff hist -550 Process Group - Remote Fabrication Jobs updated to Trello current Tag: Visual edit
- 13:49, 6 December 2022 diff hist +9 m Tube Furnace (Tystar 8300) →Gases Available Tag: Visual edit
- 13:47, 6 December 2022 diff hist -4 m Rapid Thermal Processor (SSI Solaris 150) →Detailed Specificiations: bullets Tag: Visual edit
- 11:34, 6 December 2022 diff hist +181 N File:UCSB ASML DUV Stepper - Programming Worksheet.pptx Similar to ASML programming spreadsheet, with Image coords/sizes, but also includes diagrams and wafer layout specs. More in depth version of prrogramming spreadsheet. current
- 11:19, 6 December 2022 diff hist +165 Stepper 3 (ASML DUV) →Design Tools: note about JobCreator outage Tag: Visual edit
- 17:16, 2 December 2022 diff hist +745 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): added Al2O3/SiO2 masking procedure Tag: Visual edit
- 17:09, 2 December 2022 diff hist +25 Dry Etching Recipes fixed FL-ICP: Si link Tag: Visual edit
- 12:23, 1 December 2022 diff hist +20 Direct-Write Lithography Recipes converted File links to Media links (open PDF directly) Tag: Visual edit
- 12:20, 1 December 2022 diff hist 0 Direct-Write Lithography Recipes testing File-->Media link
- 12:20, 1 December 2022 diff hist +443 Contact Alignment Recipes links to all PR datasheets current Tag: Visual edit
- 12:16, 1 December 2022 diff hist +17 Direct-Write Lithography Recipes linkto nLOF2020 Tag: Visual edit
- 12:14, 1 December 2022 diff hist 0 File:AXP4000pb-Datasheet.pdf John d uploaded a new version of File:AXP4000pb-Datasheet.pdf current