Recent changes
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Track the most recent changes to the wiki on this page.
List of abbreviations:
- N
- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
- The page size changed by this number of bytes
27 October 2024
| 17:28 | MLA150 - Troubleshooting diffhist +293 John d talk contribs (→Analyzing misalignment: further explain how to draw arrows) | ||||
26 October 2024
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19:39 | Maskless Aligner (Heidelberg MLA150) 3 changes history +235 [John d (3×)] | |||
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19:39 (cur | prev) −16 John d talk contribs (→Recipes) Tag: Visual edit | |||
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19:36 (cur | prev) +112 John d talk contribs (→Documentation: link to new MLA150 FEM page) Tag: Visual edit | ||||
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19:35 (cur | prev) +139 John d talk contribs (→Recipes: link to FEM analysis section, mention "Series" for FEM) Tag: Visual edit | ||||
| N 19:38 | MLA150 - Focus-Exposure Matrix ("Series" mode) diffhist +21 John d talk contribs (to be added) | ||||
| 19:32 | Stepper 1 (GCA 6300) diffhist +723 John d talk contribs (added Recipes section with link to recipes, FEM analysis etc) | ||||
| 19:30 | Stepper 2 (AutoStep 200) diffhist +728 John d talk contribs (link to FEM analysis pages, Stepper 2 recipes page) | ||||
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19:26 | Stepper 3 (ASML DUV) 2 changes history +491 [John d (2×)] | |||
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19:26 (cur | prev) +339 John d talk contribs (→Recipes: added FEM analysis link) Tag: Visual edit | ||||
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18:42 (cur | prev) +152 John d talk contribs (→Operating Procedures: moved login issue to new page.) Tag: Visual edit | ||||
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N 19:14 | UCSB NetID Login Troubleshooting 2 changes history +3,016 [John d (2×)] | |||
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19:14 (cur | prev) +22 John d talk contribs (→ASML Documentation - request access) Tag: Visual edit | |||
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19:11 (cur | prev) +2,994 John d talk contribs (made "Wrogn google account" and "gdrive wont allow correct account" sections) Tag: Visual edit | |||
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19:02 | (Upload log) [John d (3×)] | |||
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19:02 John d talk contribs uploaded File:UCSB NetID - correct google account v1.png | ||||
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18:50 John d talk contribs uploaded File:UCSB NetID wrong google account access denied v1.png | ||||
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18:46 John d talk contribs uploaded File:UCSB NetID - wrong login access denied.png | ||||
24 October 2024
| 23:32 | Surface Analysis (KLA/Tencor Surfscan) diffhist −17 John d talk contribs (fixed tool2 mfg) | ||||
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22:01 | Thermal Processing Recipes 2 changes history +1,485 [John d (2×)] | |||
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22:01 (cur | prev) −21 John d talk contribs (moved calculation times to "thermal ox" recipes, renamed "thermal ox recipes" to just "Ox recipes (tystar 8300)") Tag: Visual edit | ||||
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21:58 (cur | prev) +1,506 John d talk contribs (→Thermal Oxidation Recipes: process limits, recipes paosted from tool page) Tag: Visual edit | ||||
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22:00 | Tube Furnace (Tystar 8300) 2 changes history −413 [John d (2×)] | |||
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22:00 (cur | prev) −632 John d talk contribs (→Recipes: moved recipes to Tystar Recipes page, linked to them here.) Tag: Visual edit | ||||
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18:39 (cur | prev) +219 John d talk contribs (→Recipes: updated temperature/time limits) Tag: Visual edit | ||||
| 17:48 | ICP Etching Recipes diffhist +299 John d talk contribs (→Process Control Data (DSEiii): added more example images, moved Recipe name & info into "Std Bosch Recipe" section, along with selectivieis etc. Left Process Control info in this section.) | ||||
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17:40 | (Upload log) [John d (2×)] | |||
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17:40 John d talk contribs uploaded File:Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg | ||||
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17:12 John d talk contribs uploaded File:Spontaneous Wafer Bond Glass to Silicon - Demis D John.png | ||||
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17:18 | Plasma Activation (EVG 810) 3 changes history +912 [John d (3×)] | |||
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17:18 (cur | prev) +363 John d talk contribs (→Examples: added more description of the example process) Tag: Visual edit | ||||
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17:15 (cur | prev) +411 John d talk contribs (added wafer bond example.) Tag: Visual edit | ||||
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16:34 (cur | prev) +138 John d talk contribs (note on "no PR") Tag: Visual edit | ||||
23 October 2024
| 18:22 | Ion Beam Deposition (Veeco NEXUS) diffhist +240 John d talk contribs (→Schematics/Examples: added example DBR spectrum) | ||||
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m 16:54 | Stepper 2 (AutoStep 200) 2 changes history −58 [John d (2×)] | |||
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16:54 (cur | prev) −59 John d talk contribs (→Video Training) Tag: Visual edit | |||
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16:53 (cur | prev) +1 John d talk contribs (→Video Training) Tag: Visual edit | |||
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05:28 | Processing - How Do I…? 2 changes history +4,379 [John d (2×)] | |||
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05:28 (cur | prev) +3,383 John d talk contribs (→Design of Experiments: DOE exmaple, added Trello and gDrive examples and llinks etc.) Tag: Visual edit | ||||
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04:37 (cur | prev) +996 John d talk contribs (→Lithography: FEM analysis section) Tag: Visual edit | ||||
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05:25 | (Upload log) [John d (3×)] | |||
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05:25 John d talk contribs uploaded File:Google Drive - Example Job Folder.png | ||||
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05:22 John d talk contribs uploaded File:Trello - example job card.png | ||||
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05:21 John d talk contribs uploaded File:Trello - Example Job Cards.png | ||||
| N 04:35 | Lithography Calibration - Analyzing a Focus-Exposure Matrix diffhist +6,971 John d talk contribs (initial version) | ||||
| 03:37 | ASML Stepper 3 Standard Operating Procedure diffhist +180 John d talk contribs (→General process:: ASML: keep focus constant for Fine FEM) | ||||
| 03:30 | ASML Stepper 3 Error Recovery, Troubleshooting and Calibration diffhist −8,307 John d talk contribs (deleted info, instead link to google docs (access restricted)) | ||||
| 03:23 | Mask Making Guidelines for Contact Aligners diffhist +1,061 John d talk contribs (added "general process" section) | ||||
22 October 2024
| 23:52 | ICP Etching Recipes diffhist +468 John d talk contribs (→Process Control Data (Oxford ICP Etcher): added GaN etch) | ||||
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23:32 | MLA150 - Troubleshooting 4 changes history +3,506 [John d (4×)] | |||
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23:32 (cur | prev) +46 John d talk contribs (→Misalignment) Tag: Visual edit | |||
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23:31 (cur | prev) +46 John d talk contribs (→Aligning to a quarter-wafer/irregular piece: autor) Tag: Visual edit | ||||
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23:29 (cur | prev) +100 John d talk contribs (→Misalignment: added typical value for scaling) Tag: Visual edit | ||||
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23:26 (cur | prev) +3,314 John d talk contribs (addded misalignment section) Tag: Visual edit | ||||
| 23:17 | Upload log John d talk contribs uploaded File:MLA150 Alignment versus Wafer Location v1.jpg | ||||
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13:21 | Template:Announcements 3 changes history −362 [Sawyer l; John d (2×)] | |||
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13:21 (cur | prev) −412 Sawyer l talk contribs | ||||
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00:39 (cur | prev) −370 John d talk contribs (deleted eBeam 2) | ||||
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00:39 (cur | prev) +420 John d talk contribs (updated ASML) | ||||
| 00:41 | Dry Etching Recipes diffhist 0 Noahdutra talk contribs (Changed FICP Si to R6 and OXFD GaN to R3) | ||||