Pages with the fewest revisions

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Showing below up to 100 results in range #1 to #100.

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  1. Oxford Etcher - Sample Size Effect on Etch Rate‏‎ (1 revision)
  2. Publications - 2013-2014‏‎ (1 revision)
  3. Unaxis SOP 3-12-2020.docx‏‎ (1 revision)
  4. Stepper 1 (GCA6300) How to select proper chuck‏‎ (1 revision)
  5. ASML Stepper 3 - Job Creator‏‎ (1 revision)
  6. PECVD1-SiN-standard recipe.pdf‏‎ (1 revision)
  7. Unaxis Test Recipe Page‏‎ (1 revision)
  8. SiN 100C Table-2019‏‎ (1 revision)
  9. Filmetrics F50 - Operating Procedure‏‎ (1 revision)
  10. RIE5 - Standard Operating procedure (Cortex Software)‏‎ (1 revision)
  11. ProcessGroup: Shipping Samples on Dicing Tape+Frame‏‎ (1 revision)
  12. Nanofab-IT - Add Device to Network‏‎ (1 revision)
  13. Ellipsometer (Woollam) - Measuring thin dielectrics with Native Oxide pre-measurement‏‎ (1 revision)
  14. Sputter 5‏‎ (1 revision)
  15. Flood Exposure Recipes‏‎ (1 revision)
  16. Hummer SEM Sample Coater - Techniques to reduce charging in SEMs‏‎ (1 revision)
  17. Stepper 1 (GCA 6300) Available chucks‏‎ (1 revision)
  18. Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers‏‎ (1 revision)
  19. Equipment Group - Video Training Procedures‏‎ (1 revision)
  20. YES Recipe Screenshots: STD-O2‏‎ (1 revision)
  21. Video Training - Introduction (Internal)‏‎ (1 revision)
  22. InP Etch test -details‏‎ (1 revision)
  23. TEST PAGE‏‎ (1 revision)
  24. Photomask Ordering Procedure for UCSB Users‏‎ (1 revision)
  25. InP Etch Test-in details‏‎ (1 revision)
  26. AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx‏‎ (1 revision)
  27. Stepper 1 (GCA 6300) Substrate Thickness, Shim Thickness ans Target Thickness‏‎ (1 revision)
  28. Surfscan Errors and Workarounds‏‎ (1 revision)
  29. Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts‏‎ (1 revision)
  30. Operating Instructions‏‎ (1 revision)
  31. YES Recipe Screenshots: STD-N2-O2‏‎ (1 revision)
  32. PECVD.docx‏‎ (1 revision)
  33. PECVD1 Operating Instructions.pdf‏‎ (1 revision)
  34. Older Publications‏‎ (1 revision)
  35. Lab Rules backup‏‎ (1 revision)
  36. Advanced PECVD Recipes‏‎ (1 revision)
  37. Wafer coating procedure‏‎ (1 revision)
  38. LegacyTable‏‎ (1 revision)
  39. Wafer Cleaver Recipes (LSD-155LT)‏‎ (1 revision)
  40. STD SiO2 recipe‏‎ (1 revision)
  41. Comparison of ash rate for different gas mixtures, especially between O2 only vs O2/N2 mixture.‏‎ (1 revision)
  42. ASML Stepper 3 - Substrates smaller than 100mm/4-inch‏‎ (1 revision)
  43. UCSBTEST1Gain4.jpg‏‎ (1 revision)
  44. UV Ozone Quick Start‏‎ (1 revision)
  45. AUTOSTEP 200-PIECES instruction 6-20-19.pptx‏‎ (1 revision)
  46. MA6 Backside Alignment - Allowed Mark Locations‏‎ (1 revision)
  47. Process Group - Lab Stocking/Supplies Tasks‏‎ (2 revisions)
  48. Molecular Vapor Deposition Recipes‏‎ (2 revisions)
  49. THz Physics Presentations‏‎ (2 revisions)
  50. E-Beam Lithography Recipes‏‎ (2 revisions)
  51. Video Training: Uploading to GauchoCast/Panopto (Internal)‏‎ (2 revisions)
  52. Surfscan photo‏‎ (2 revisions)
  53. Thermal Evaporator 2‏‎ (2 revisions)
  54. Plasma Clean (Gasonics 2000)‏‎ (2 revisions)
  55. ASML Stepper 3: Wafer Handler Reset Procedure‏‎ (2 revisions)
  56. Michael Barreraz‏‎ (2 revisions)
  57. Main Page mod‏‎ (2 revisions)
  58. SPR220-7 at 3kW various temperature without N2 gas‏‎ (2 revisions)
  59. Exposing a wafer piece‏‎ (2 revisions)
  60. Unaxis SiN100C 300nm-2019‏‎ (2 revisions)
  61. Surfscan6200 photos‏‎ (2 revisions)
  62. Autostep 200 Old training manual‏‎ (2 revisions)
  63. CDE ResMap Quick-Start instructions‏‎ (2 revisions)
  64. Errors‏‎ (2 revisions)
  65. SiO2 Etching Test using CF4/CHF3‏‎ (2 revisions)
  66. ASML 5500: Choose Marks for Prealignment‏‎ (2 revisions)
  67. E-Beam 5 (Plasys)‏‎ (2 revisions)
  68. Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses‏‎ (2 revisions)
  69. Stepper 2 (Autostep 200) - Chuck Selection‏‎ (2 revisions)
  70. Strip Annealer‏‎ (2 revisions)
  71. ADT 7100 - Recovering an Old Recipe (2019)‏‎ (2 revisions)
  72. GCA 6300 training manual -old instructions‏‎ (2 revisions)
  73. Test Data of etching SiO2 with CHF3/CF4/O2‏‎ (2 revisions)
  74. Test Page‏‎ (2 revisions)
  75. PECVD1-SIN Standard Recipe (PlasmaTherm 790)‏‎ (2 revisions)
  76. PECVD1-SiN standard recipe.pdf‏‎ (3 revisions)
  77. Test Data of Etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  78. Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond‏‎ (3 revisions)
  79. Ellipsometer (Rudolph)‏‎ (3 revisions)
  80. Test Data of etching SiO2 with CHF3/CF4-Florine ICP Etcher‏‎ (3 revisions)
  81. DS-K101-304 Bake Temp. versus Develop Rate‏‎ (3 revisions)
  82. Gold surface oxidation (darkening) due to O2/N2 plasma; the need for O2 only recipe.‏‎ (3 revisions)
  83. Wire Saw (Takatori)‏‎ (3 revisions)
  84. Vacuum Oven (YES)‏‎ (3 revisions)
  85. Vapor HF Etch (uETCH)‏‎ (3 revisions)
  86. Nanofab New User Onboarding‏‎ (3 revisions)
  87. Mike Day‏‎ (3 revisions)
  88. ASML 5500: Recovering from a Typo in Reticle ID‏‎ (3 revisions)
  89. Sputter 1 (Custom)‏‎ (3 revisions)
  90. Video Training: Hosting with Zoom and GacuhoCast/Panopto‏‎ (3 revisions)
  91. Nick test‏‎ (3 revisions)
  92. Foong Fatt‏‎ (3 revisions)
  93. Glossary‏‎ (3 revisions)
  94. User Accessible Commands‏‎ (3 revisions)
  95. MVD - Wafer Coating - Process Traveler‏‎ (3 revisions)
  96. ASML Stepper 3 Dicing Guide Programming‏‎ (3 revisions)
  97. Vacuum Sealer‏‎ (3 revisions)
  98. Ellipsometer (Woollam) - Measuring thin metals with oxide pre-measurement‏‎ (3 revisions)
  99. ADT UV-Tape Table 1042R‏‎ (3 revisions)
  100. Tube Furnace AlGaAs Oxidation (Lindberg)‏‎ (4 revisions)

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