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- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
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- This edit was performed by a bot
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8 November 2024
| 19:10 | Wet Etching Recipes diffhist +149 Biljana talk contribs (→Table of Wet Etching Recipes: BHF:DI =1:100 etch rate for ALD -SiO2 BDEAS film) | ||||
7 November 2024
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21:57 | Vacuum Deposition Recipes 2 changes history −2,346 [Noahdutra (2×)] | |||
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21:57 (cur | prev) +94 Noahdutra talk contribs (Added AuSn to Thermal evap 2) Tag: Visual edit | ||||
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21:49 (cur | prev) −2,440 Noahdutra talk contribs (changing thermal evaps to be correct) Tag: Visual edit | ||||
| 21:38 | Services diffhist −2 John d talk contribs (→Statement of Work: moved filename to top) | ||||
| 18:04 | Process Group - Process Control Data diffhist +416 John d talk contribs (added GaN etch cal →Oxford PlasmaPro Cobra Etcher) | ||||
| 02:00 | Oxford ICP Etcher (PlasmaPro 100 Cobra) diffhist +1,227 John d talk contribs (link to PC data) | ||||
| 00:45 | Template:Announcements diffhist −704 John d talk contribs (deleted ASML update) | ||||
6 November 2024
| 21:51 | DSEIII (PlasmaTherm/Deep Silicon Etcher) diffhist +1,325 John d talk contribs (pasted NoahD's example SEM's) | ||||
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21:47 | Process Group - Process Control Data 2 changes history +1,603 [John d (2×)] | |||
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21:47 (cur | prev) +1,010 John d talk contribs (→Etching (Process Control Data): pasted process control data link/image from DSE recipes page) Tag: Visual edit | ||||
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21:38 (cur | prev) +351 John d talk contribs (describe purpose of 2 diff EtchCals) Tag: Visual edit | ||||
| 21:43 | Atomic Layer Deposition Recipes diffhist +38 Biljana talk contribs (→SiO2 deposition (ALD CHAMBER 1): Added (BHF:DI=1:100) etch rate) | ||||
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21:39 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) 2 changes history −5 [John d (2×)] | |||
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21:39 (cur | prev) −35 John d talk contribs (→Process Control Data: pasted PC images+links, cleaned up) Tag: Visual edit | ||||
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21:30 (cur | prev) +30 John d talk contribs (→Process Control Data: pasted PC images/links from PC page) | ||||
| 21:26 | Upload log John d talk contribs uploaded a new version of File:ICP2 Process Control Data Example.jpg (newer data, "example" label) | ||||
| 21:22 | ICP Etch 2 (Panasonic E626I) diffhist +366 John d talk contribs (→Recipes: added Process Control Header level 1 & images from PC page) | ||||
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N 21:09 | Process Group Internships 2 changes history +5,457 [John d (2×)] | |||
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21:09 (cur | prev) +7 John d talk contribs (Intenrhsip Goals heading) Tag: Visual edit | ||||
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21:00 (cur | prev) +5,450 John d talk contribs (internship goals, skillss learns and detailed 2-phase approach) Tag: Visual edit | |||
| 16:54 | Lithography Recipes diffhist +444 John d talk contribs (→General Photolithography Techniques: link to FEM page) | ||||
5 November 2024
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23:54 | (Upload log) [John d (2×)] | |||
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23:54 John d talk contribs uploaded a new version of File:FEM example analysis GMoody Group 2024-11-04 v2.png (added X in middle) | ||||
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23:47 John d talk contribs uploaded File:FEM example analysis GMoody Group 2024-11-04 v2.png | ||||
| 23:52 | Lithography Calibration - Analyzing a Focus-Exposure Matrix diffhist +465 John d talk contribs (uploaded Moody group FEM example) | ||||
4 November 2024
| 22:51 | Services diffhist +25 John d talk contribs (→Fabrication Services by NanoFab Staff: clarify charged rates) | ||||
2 November 2024
| 17:38 | Hummer SEM Sample Coater - Techniques to reduce charging in SEMs diffhist +46 John d talk contribs | ||||
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N 17:35 | JEOL IT800SHL - Reduced Charging Imaging Modes 2 changes history +2,972 [John d (2×)] | |||
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17:35 (cur | prev) +353 John d talk contribs (AUPd help) Tag: Visual edit | ||||
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17:30 (cur | prev) +2,619 John d talk contribs (reduced charging by Demis,f rom JEOL training by Jen 2024-09) Tag: Visual edit | |||
| 16:41 | SEM 1 (JEOL IT800SHL) diffhist +195 John d talk contribs (→Operating Procedures: link to reduced cahrging imaging modes page) | ||||
31 October 2024
| 16:32 | E-Beam 2 (Custom) diffhist 0 Sawyer l talk contribs (SOP rev) | ||||
| 16:31 | Upload log Sawyer l talk contribs uploaded File:EB2 SOP Rev I.pdf | ||||
30 October 2024
28 October 2024
| 21:38 | Probe Station: I-V Curves with Keithley 2400 and Python Script diffhist +67 John d talk contribs (added computer login) | ||||
27 October 2024
| 17:28 | MLA150 - Troubleshooting diffhist +293 John d talk contribs (→Analyzing misalignment: further explain how to draw arrows) | ||||
26 October 2024
| N 19:38 | MLA150 - Focus-Exposure Matrix ("Series" mode) diffhist +21 John d talk contribs (to be added) | ||||
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19:36 | Maskless Aligner (Heidelberg MLA150) 2 changes history +251 [John d (2×)] | |||
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19:36 (cur | prev) +112 John d talk contribs (→Documentation: link to new MLA150 FEM page) Tag: Visual edit | ||||
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19:35 (cur | prev) +139 John d talk contribs (→Recipes: link to FEM analysis section, mention "Series" for FEM) Tag: Visual edit | ||||
| 19:32 | Stepper 1 (GCA 6300) diffhist +723 John d talk contribs (added Recipes section with link to recipes, FEM analysis etc) | ||||
| 19:30 | Stepper 2 (AutoStep 200) diffhist +728 John d talk contribs (link to FEM analysis pages, Stepper 2 recipes page) | ||||
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19:26 | Stepper 3 (ASML DUV) 2 changes history +491 [John d (2×)] | |||
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19:26 (cur | prev) +339 John d talk contribs (→Recipes: added FEM analysis link) Tag: Visual edit | ||||
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18:42 (cur | prev) +152 John d talk contribs (→Operating Procedures: moved login issue to new page.) Tag: Visual edit | ||||
| N 19:11 | UCSB NetID Login Troubleshooting diffhist +2,994 John d talk contribs (made "Wrogn google account" and "gdrive wont allow correct account" sections) | ||||
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19:02 | (Upload log) [John d (3×)] | |||
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19:02 John d talk contribs uploaded File:UCSB NetID - correct google account v1.png | ||||
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18:50 John d talk contribs uploaded File:UCSB NetID wrong google account access denied v1.png | ||||
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18:46 John d talk contribs uploaded File:UCSB NetID - wrong login access denied.png | ||||
24 October 2024
| 23:32 | Surface Analysis (KLA/Tencor Surfscan) diffhist −17 John d talk contribs (fixed tool2 mfg) | ||||
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22:01 | Thermal Processing Recipes 2 changes history +1,485 [John d (2×)] | |||
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22:01 (cur | prev) −21 John d talk contribs (moved calculation times to "thermal ox" recipes, renamed "thermal ox recipes" to just "Ox recipes (tystar 8300)") Tag: Visual edit | ||||
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21:58 (cur | prev) +1,506 John d talk contribs (→Thermal Oxidation Recipes: process limits, recipes paosted from tool page) Tag: Visual edit | ||||
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22:00 | Tube Furnace (Tystar 8300) 2 changes history −413 [John d (2×)] | |||
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22:00 (cur | prev) −632 John d talk contribs (→Recipes: moved recipes to Tystar Recipes page, linked to them here.) Tag: Visual edit | ||||
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18:39 (cur | prev) +219 John d talk contribs (→Recipes: updated temperature/time limits) Tag: Visual edit | ||||
| 17:48 | ICP Etching Recipes diffhist +299 John d talk contribs (→Process Control Data (DSEiii): added more example images, moved Recipe name & info into "Std Bosch Recipe" section, along with selectivieis etc. Left Process Control info in this section.) | ||||
| 17:40 | Upload log John d talk contribs uploaded File:Plasmatherm DSE - 40um deep Si etch Cal 241007 - 30D 002.jpg | ||||
| 17:18 | Plasma Activation (EVG 810) diffhist +363 John d talk contribs (→Examples: added more description of the example process) | ||||