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List of abbreviations:
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- This edit created a new page (also see list of new pages)
- m
- This is a minor edit
- b
- This edit was performed by a bot
- (±123)
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24 October 2024
23 October 2024
| 18:22 | Ion Beam Deposition (Veeco NEXUS) diffhist +240 John d talk contribs (→Schematics/Examples: added example DBR spectrum) | ||||
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m 16:54 | Stepper 2 (AutoStep 200) 2 changes history −58 [John d (2×)] | |||
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16:54 (cur | prev) −59 John d talk contribs (→Video Training) Tag: Visual edit | |||
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16:53 (cur | prev) +1 John d talk contribs (→Video Training) Tag: Visual edit | |||
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05:28 | Processing - How Do I…? 2 changes history +4,379 [John d (2×)] | |||
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05:28 (cur | prev) +3,383 John d talk contribs (→Design of Experiments: DOE exmaple, added Trello and gDrive examples and llinks etc.) Tag: Visual edit | ||||
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04:37 (cur | prev) +996 John d talk contribs (→Lithography: FEM analysis section) Tag: Visual edit | ||||
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05:25 | (Upload log) [John d (3×)] | |||
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05:25 John d talk contribs uploaded File:Google Drive - Example Job Folder.png | ||||
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05:22 John d talk contribs uploaded File:Trello - example job card.png | ||||
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05:21 John d talk contribs uploaded File:Trello - Example Job Cards.png | ||||
| N 04:35 | Lithography Calibration - Analyzing a Focus-Exposure Matrix diffhist +6,971 John d talk contribs (initial version) | ||||
| 03:37 | ASML Stepper 3 Standard Operating Procedure diffhist +180 John d talk contribs (→General process:: ASML: keep focus constant for Fine FEM) | ||||
| 03:30 | ASML Stepper 3 Error Recovery, Troubleshooting and Calibration diffhist −8,307 John d talk contribs (deleted info, instead link to google docs (access restricted)) | ||||
| 03:23 | Mask Making Guidelines for Contact Aligners diffhist +1,061 John d talk contribs (added "general process" section) | ||||
22 October 2024
| 23:52 | ICP Etching Recipes diffhist +468 John d talk contribs (→Process Control Data (Oxford ICP Etcher): added GaN etch) | ||||
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23:32 | MLA150 - Troubleshooting 4 changes history +3,506 [John d (4×)] | |||
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23:32 (cur | prev) +46 John d talk contribs (→Misalignment) Tag: Visual edit | |||
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23:31 (cur | prev) +46 John d talk contribs (→Aligning to a quarter-wafer/irregular piece: autor) Tag: Visual edit | ||||
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23:29 (cur | prev) +100 John d talk contribs (→Misalignment: added typical value for scaling) Tag: Visual edit | ||||
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23:26 (cur | prev) +3,314 John d talk contribs (addded misalignment section) Tag: Visual edit | ||||
| 23:17 | Upload log John d talk contribs uploaded File:MLA150 Alignment versus Wafer Location v1.jpg | ||||
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13:21 | Template:Announcements 3 changes history −362 [Sawyer l; John d (2×)] | |||
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13:21 (cur | prev) −412 Sawyer l talk contribs | ||||
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00:39 (cur | prev) −370 John d talk contribs (deleted eBeam 2) | ||||
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00:39 (cur | prev) +420 John d talk contribs (updated ASML) | ||||
| 00:41 | Dry Etching Recipes diffhist 0 Noahdutra talk contribs (Changed FICP Si to R6 and OXFD GaN to R3) | ||||
21 October 2024
18 October 2024
| 18:58 | Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) diffhist +65 John d talk contribs (→Detailed Specifications: added chuck temp) | ||||
| 17:08 | MLA150 - Troubleshooting diffhist +18 Sawyer l talk contribs (Piezo range values) | ||||
17 October 2024
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17:00 | Atomic Layer Deposition Recipes 2 changes history +48 [Biljana (2×)] | |||
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17:00 (cur | prev) +13 Biljana talk contribs (→SiO{{sub|2}} deposition (ALD CHAMBER 1)) | ||||
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16:59 (cur | prev) +35 Biljana talk contribs (→SiO{{sub|2}} deposition (ALD CHAMBER 1)) | ||||
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16:48 | Template:Announcements 3 changes history +412 [Mehalana v (3×)] | |||
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16:48 (cur | prev) +412 Mehalana v talk contribs (→E- Beam #2 Maint Work Next Week) | ||||
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16:47 (cur | prev) −53 Mehalana v talk contribs (Reverted edits by Mehalana v (talk) to last revision by John d) Tag: Rollback | |||
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16:46 (cur | prev) +53 Mehalana v talk contribs (→E- Beam #2 Maint Work Next Week) Tag: Reverted | ||||
16 October 2024
| 15:44 | Template:Announcements diffhist −26 John d talk contribs (→E- Beam #2 Maint Work Next Week) | ||||
13 October 2024
10 October 2024
| 20:35 | Frequently Asked Questions diffhist +123 John d talk contribs (→How do I get my files from the NanoFab computers?: mentioned midnight folder sync) | ||||
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20:23 | Template:Announcements 2 changes history −134 [Mehalana v; John d] | |||
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20:23 (cur | prev) +396 Mehalana v talk contribs (→Stepper #3 (ASML DUV) - Tool UP) | ||||
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00:36 (cur | prev) −530 John d talk contribs (asml up, deleted MLA) | ||||
9 October 2024
| 23:39 | ICP Etching Recipes diffhist −30 Noahdutra talk contribs (→Process Control Data (DSEiii): took off SiO2/Al2O3 selectivity for dse) | ||||
8 October 2024
| 22:09 | Lithography Recipes diffhist +1,656 John d talk contribs (→Available Variations: bolded variables on the table, italics descriptions for section) | ||||
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21:03 | (Upload log) [Noahdutra (2×)] | |||
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21:03 Noahdutra talk contribs uploaded File:Cal DSE Ar+ER.png (DSE STD_Bosch_Si etch AR/ER dependence) | ||||
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20:44 Noahdutra talk contribs uploaded File:Copy of 22 013 (1).jpg (STD_Bosch_Si example 8/26/24) | ||||
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