Lithography

Vacuum Deposition

@@ Line 104: / Line 104: @@
 =Inspection, Test and Characterization=
+{|
-* [[Field Emission SEM 1]]
+|-valign="top"
-* [[Field Emission SEM 2]]
+|width=300|
-* [[Step Profile]]
+* [[Field Emission SEM 1 (FEI Sirion)]]
-* [[Step Profilometer]]
+* [[Field Emission SEM 2 (JEOL 7600F]]
-* [[Ellipsometer]]
+* [[Step Profile (Dektak IIA)]]
+* [[Step Profilometer (Dektak 6M)]]
+* [[Ellipsometer (Rudolph)]]
 * [[Microscopes]]
 * [[Probe Station & Curve Tracer]]
 * [[Optical Film Thickness (Filmetrics)]]
-* [[Scanning Probe Microscope]]
+* [[Scanning Probe Microscope (Veeco NanoMan)]]
 * [[Tencor Flexus Film Stress]]
+|width=400|
 * [[Optical Film Thickness (Nanometric)]]
-* [[SEM Sample Coater]]
+* [[SEM Sample Coater (Hummer)]]
-* [[Surface Analysis]]
+* [[Surface Analysis (KLA/Tencor Surfscan)]]
-* [[Photo-emission & IR Microscope]]
+* [[Photo-emission & IR Microscope (QFI)]]
 * [[Ellipsometer (Woollam)]]
 * [[Goniometer]]
 * [[4-Point Probe Resistivity Mapper]]
+* [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
+* [[Deep UV Optical Microscope (Olympus)]]
+|-
+|}