Lithography

Vacuum Deposition

@@ Line 24: / Line 24: @@
 |}
-=Vacuum Deposition=
+= Vacuum Deposition =
 {|
-|-valign="top"
+|- valign="top"
-|width=300|
+| width="300" |
-* [[E-Beam 1 (Sharon)]]
+*[[E-Beam 1 (Sharon)]]
-* [[E-Beam 2 (Custom)]]
+*[[E-Beam 2 (Custom)]]
-* [[E-Beam 3 (Temescal)]]
+*[[E-Beam 3 (Temescal)]]
-* [[E-Beam 4 (CHA)]]
+*[[E-Beam 4 (CHA)]]
-* [[Sputter 1 (Custom)]]
+*[[Sputter 1 (Custom)]]
-* [[Sputter 2 (SFI Endeavor)]]
+*[[Sputter 2 (SFI Endeavor)]]
-* [[Sputter 3 (AJA 2000-F)]]
+*[[Sputter 3 (ATC 2000-F)]]
-* [[Sputter 4 (AJA 2200-V)]]
+*[[Sputter 4 (ATC 2200-V)]]
-* [[Sputter 5 (Lesker AXXIS)]]
+*[[Sputter 5 (Lesker AXXIS)]]
-|width=400|
+| width="400" |
-* [[PECVD 1 (PlasmaTherm 790)]]
-* [[PECVD 2 (Advanced Vacuum)]]
+*[[PECVD 1 (PlasmaTherm 790)]]
+*[[PECVD 2 (Advanced Vacuum)]]
-* [[Thermal Evap 1]]
-* [[Thermal Evap 2]]
+*[[Thermal Evap 1]]
-* [[Unaxis VLR ICP-PECVD]]
+*[[Thermal Evap 2]]
+*[[Unaxis VLR ICP-PECVD]]
-* [[Ion Beam Deposition (Veeco NEXUS)]]
-* [[Molecular Vapor Deposition]]
+*[[Ion Beam Deposition (Veeco NEXUS)]]
+*[[Molecular Vapor Deposition]]
-* [[Atomic Layer Deposision (Oxford FlexAL)]]
+*[[Atomic Layer Deposision (Oxford FlexAL)]]
-|-
 |}