Tool List: Difference between revisions

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**[[Acid Benches]]
**[[Acid Benches]]
**[[Solvent Benches]]
**[[Solvent Benches]]
**[[Lithography Development & Solvent Clean Benches]]
**[[Photoresist Spin Coat Benches]]
**[[Wet Etch Benches]]
**[[Develop Wet Benches]]
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Revision as of 15:25, 10 July 2012

Lithography

Vacuum Deposition

Dry Etch

Wet Processing

Thermal Processing

Packaging

Inspection, Test and Characterization