Tool List
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Lithography
Suss Aligners (SUSS MJB-3)
IR Aligner (SUSS MJB-3 IR)
DUV Flood Expose
Ovens 1, 2 & 3 (Labline)
Oven 4 (Fisher)
Oven 5 (Blue M)
Vacuum Oven (YES)
Holographic Lith/PL Setup
Stepper 1 (GCA 6300)
Stepper 2 (AutoStep 200)
Stepper 3 (ASML)
E-Beam Lithography System (JEOL JBX-6300FS)
Nano-Imprint Tool (Nanonex NX2000)
Contact Aligner (SUSS MA-6)
Wafer Bonder (SUSS SB6-8E)
Vacuum Deposition
E-Beam 1 (Sharon)
E-Beam 2 (Custom)
E-Beam 3 (Temescal)
E-Beam 4 (CHA)
Sputter 1 (Custom)
Sputter 2 (SFI Endeavor)
Sputter 3 (ATC 2000-F)
Sputter 4 (ATC 2200-V)
Sputter 5 (Lesker AXXIS)
PECVD 1 (PlasmaTherm 790)
PECVD 2 (Advanced Vacuum)
Thermal Evap 1
Thermal Evap 2 (Solder)
Unaxis VLR ICP-PECVD
Ion Beam Deposition (Veeco NEXUS)
Molecular Vapor Deposition
Atomic Layer Deposision (Oxford FlexAL)
Dry Etch
RIE 1 (Custom)
RIE 2 (MRC)
RIE 3 (MRC)
RIE 5 (PlasmaTherm SLR)
Si Deep RIE (Bosch Etch)
Ashers (Technics PEII)
Unaxis VLR ICP-Etch
ICP Etch 1 (Panasonic E626I)
ICP Etch 2 (Panasonic E640)
UV Ozone Reactor
Plasma Clean (Gasonics 2000)
XeF
2
Etch (Xetch)
Plasma Activation Tool (EVG 810)
HF Vapor Etch
Wet Processing
Gold Plating Bench
Critical Point Dryer
Spin Rinse Dryer (SemiTool)
Chemical-Mechanical Polisher (Logitech)
Wet Benches
Acid Benches
Solvent Benches
Photoresist Spin Coat Benches
Develop Wet Benches
Thermal Processing
Rapid Thermal Processor (AET RX6)
Strip Annealer
Tube Furnace (Tystar 8300)
Tube Furnace Wafer Bonding (Thermco)
Tube Furnace AlGaAs Oxidation (Linberg)
Packaging
Flip-Chip Bonder (Finetech)
Vacuum Sealer
Dicing Saw (ADT)
Wire Saw (Takatori)
Inspection, Test and Characterization
Field Emission SEM 1 (FEI Sirion)
Field Emission SEM 2 (JEOL 7600F)
Step Profile (Dektak IIA)
Step Profilometer (Dektak 6M)
Ellipsometer (Rudolph)
Microscopes
Probe Station & Curve Tracer
Optical Film Thickness (Filmetrics)
Optical Film Thickness (Nanometric)
Scanning Probe Microscope (Veeco NanoMan)
Tencor Flexus Film Stress
SEM Sample Coater (Hummer)
Surface Analysis (KLA/Tencor Surfscan)
Photo-emission & IR Microscope (QFI)
Ellipsometer (Woollam)
Goniometer
4-Point Probe Resistivity Mapper
Laser Scanning Confocal M-scope (Olympus LEXT)
Deep UV Optical Microscope (Olympus)
Atomic Force Microsope (Dimension 3100/Nanoscope IVA)
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