Tool List

Lithography

Suss Aligners (SUSS MJB-3) IR Aligner (SUSS MJB-3 IR) DUV Flood Expose Ovens 1, 2 & 3 (Labline) Oven 4 (Fisher) Oven 5 (Blue M) Vacuum Oven (YES) Holographic Lith/PL Setup (Custom)

Stepper 1 (GCA 6300) Stepper 2 (AutoStep 200) Stepper 3 (ASML DUV) E-Beam Lithography System (JEOL JBX-6300FS) Nano-Imprint (Nanonex NX2000) Contact Aligner (SUSS MA-6)

Vacuum Deposition

E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2 (SFI Endeavor) Sputter 3 (ATC 2000-F) Sputter 4 (ATC 2200-V) Sputter 5 (Lesker AXXIS)

PECVD 1 (PlasmaTherm 790) PECVD 2 (Advanced Vacuum) Thermal Evap 1 Thermal Evap 2 (Solder) ICP-PECVD (Unaxis VLR) Ion Beam Deposition (Veeco NEXUS) Molecular Vapor Deposition Atomic Layer Deposision (Oxford FlexAL)

Dry Etch

RIE 1 (Custom) RIE 2 (MRC) RIE 3 (MRC) RIE 5 (PlasmaTherm) Si Deep RIE (PlasmaTherm/Bosch Etch) Ashers (Technics PEII) UV Ozone Reactor

ICP Etch 1 (Panasonic E626I) ICP Etch 2 (Panasonic E640) ICP-Etch (Unaxis VLR) Plasma Clean (Gasonics 2000) XeF2 Etch (Xetch) Plasma Activation (EVG 810) HF Vapor Etch

Wet Processing

Gold Plating Bench Critical Point Dryer Spin Rinse Dryer (SemiTool) Chemical-Mechanical Polisher (Logitech)

Wet Benches Acid Benches Solvent Benches Photoresist Spin Coat Benches Develop Wet Benches

Thermal Processing

• Rapid Thermal Processor (AET RX6)
• Strip Annealer
• Tube Furnace (Tystar 8300)
• Tube Furnace Wafer Bonding (Thermco)
• Tube Furnace AlGaAs Oxidation (Linberg)

Packaging

• Flip-Chip Bonder (Finetech)
• Vacuum Sealer
• Dicing Saw (ADT)
• Wire Saw (Takatori)
• Wafer Bonder (SUSS SB6-8E)

Inspection, Test and Characterization

Field Emission SEM 1 (FEI Sirion) Field Emission SEM 2 (JEOL 7600F) Step Profile (Dektak IIA) Step Profilometer (Dektak 6M) Ellipsometer (Rudolph) Microscopes Probe Station & Curve Tracer Optical Film Thickness (Filmetrics) Optical Film Thickness (Nanometric) Goniometer

Tencor Flexus Film Stress SEM Sample Coater (Hummer) Surface Analysis (KLA/Tencor Surfscan) Photo-emission & IR Microscope (QFI) Ellipsometer (Woollam) 4-Point Probe Resistivity Mapper Laser Scanning Confocal M-scope (Olympus LEXT) Deep UV Optical Microscope (Olympus) Atomic Force Microsope (Dimension 3100/Nanoscope IVA)