Lithography

Vacuum Deposition

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 =Lithography=
 {|
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 |width=300|
 * [[Suss Aligners (SUSS MJB-3)]]
 * [[IR Aligner (SUSS MJB-3 IR)]]
-* [[DUV Flood Expsaad3 (Labline)]]
+* [[DUV Flood Expose]]
+* [[Ovens 1, 2 & 3 (Labline)]]
 * [[Oven 4 (Fisher)]]
 * [[High Temp Oven (Blue M)]]
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 |width=300|
-* [[Gold Plating Bench]]
-* [[Critical Point Dryer]]
-* [[Spin Rinse Dryer (SemiTool)]]
-* [[Chemical-Mechanical Polisher (Logitech)]]
-|width=400|
 * [[Wet Benches]]
 **[[Solvent Cleaning Benches]]
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 **[[HF/TMAH Processing Benches]]
 **[[Plating Bench]]
+|width=400|
+* [[Gold Plating Bench]]
+* [[Critical Point Dryer]]
+* [[Spin Rinse Dryer (SemiTool)]]
+* [[Chemical-Mechanical Polisher (Logitech)]]
 |-
 |}