Difference between revisions of "Tool List"
Jump to navigation
Jump to search
Abrahamsen (talk | contribs) |
Reynolds t (talk | contribs) |
||
Line 53: | Line 53: | ||
{| |
{| |
||
|- valign="top" |
|- valign="top" |
||
− | | width="300" | |
+ | | width="300" | |
− | *[[RIE 1 (Custom)]] |
||
*[[RIE 2 (MRC)]] |
*[[RIE 2 (MRC)]] |
||
*[[RIE 3 (MRC)]] |
*[[RIE 3 (MRC)]] |
Revision as of 15:00, 13 June 2015
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)