Tool List
Revision as of 07:01, 13 April 2018 by John d (talk | contribs) (→Wet Processing: link to Chemical List page)
Lithography
You can see our available photoresists on the Chemical Datasheets page.
Vacuum Deposition
Dry Etch
Wet Processing
The Chemical List page lists available chemicals such as Developers, Acids, Solvents etc.
Thermal Processing
- Rapid Thermal Processor (AET RX6)
- Strip Annealer
- Tube Furnace (Tystar 8300)
- Tube Furnace Wafer Bonding (Thermco)
- Tube Furnace AlGaAs Oxidation (Linberg)
- Wafer Bonder (SUSS SB6-8E)
- Ovens 1, 2 & 3 (Labline)
- Oven 4 (Fisher)
- Oven 5 (Labline)
- High Temp Oven (Blue M)
- Vacuum Oven (YES)